Inductive encoder with shield structures
An inductive encoder system includes a scale including a periodic scale pattern, and a detector portion configured to move along a measuring axis direction relative to the periodic scale pattern. The detector portion includes a field generating portion configured to generate a changing magnetic flux, and a sensing portion comprising one or more sets of sensing elements and configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by the periodic scale pattern, wherein each set of sensing elements is coupled to a set of sensor vias. The detector portion further includes a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions.
1 . An inductive encoder system configured to measure a relative position between two elements along a measuring axis direction, the system comprising:
a scale extending along the measuring axis direction which includes a periodic scale pattern comprising signal modulating elements;
a detector portion configured to be positioned proximate to the periodic scale pattern and to move along the measuring axis direction relative to the periodic scale pattern, the detector portion comprising:
a field generating portion PRTFGE configured to generate a changing magnetic flux in response to a drive signal; and
a sensing portion PRTSEN comprising one or more sets of sensing elements arranged along the measuring axis direction, wherein each set of sensing elements is coupled to a set of sensor vias, and the sensing portion PRTSEN is configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent signal modulating elements of the periodic scale pattern; and
a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure SST one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions, wherein:
the plurality of shield structures SST comprise: a first shield structure which comprises a first plurality of shield vias; and a second shield structure which comprises a second plurality of shield vias; and
the first and second shield structures SST, and correspondingly the first and second pluralities of shield vias, are located on opposite sides of a first set of sensor vias which comprises at least two sensor vias that are coupled to a set of sensing elements of the sensing portion PRTSEN.
2 . The system of claim 1 , wherein for each shield structure SST, the plurality of shield vias comprise at least a first shield via and a second shield via, which are coupled together by a first conductor portion and are coupled together by a second conductor portion, for which the first shield via, the first conductor portion, the second shield via and the second conductor portion form a first respective shield loop of the one or more shield loops.
3 . The system of claim 2 , wherein for one or more shield structures SST of the plurality of shield structures SST, the plurality of shield vias comprise at least a third respective shield via, which is coupled to the second shield via by a third conductor portion and is coupled to the second shield via by a fourth conductor portion, for which the second shield via, the third conductor portion, the third shield via and the fourth conductor portion form a second respective shield loop of the one or more shield loops.
4 . The system of claim 3 , wherein for each shield structure SST, the plurality of shield vias are in a linear arrangement.
5 . The system of claim 2 , wherein the first conductor portion is in a first layer of a printed circuit board and the second conductor portion is in a second layer of the printed circuit board.
6 . The system of claim 1 , wherein the first set of sensor vias comprises at least four sensor vias.
7 . The system of claim 1 , wherein the field generating portion PRTFGE comprises a set of field generating vias, and each plurality of shield vias are configured to at least partially shield at least some of the sensor vias from one or more magnetic fields resulting from current flowing in one or more field generating vias of the set of field generating vias.
8 . The system of claim 1 , wherein:
the shield vias of the first plurality of shield vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction; and
the shield vias of the second plurality of shield vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction.
9 . The system of claim 8 , wherein at least some sensor vias of the first set of sensor vias which the first and second shield structures SST are located on opposite sides of are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction.
10 . The system of claim 9 , wherein a distance length of the linear arrangement of the first plurality of shield vias of the first shield structure SST is at least as long as a distance length of the linear arrangement of the sensor vias of the first set of sensor vias.
11 . The system of claim 1 , wherein the field generating portion PRTFGE comprises one or more field generating elements surrounding an interior area that is aligned with at least part of the periodic scale pattern of signal modulating elements during operation, wherein the one or more field generating elements are configured to generate the changing magnetic flux in the interior area in response to the drive signal.
12 . The system of claim 11 , wherein each shield structure SST is configured to at least partially shield a proximate set of sensor vias from stray magnetic fields that result from the operation of the field generating portion PRTFGE.
13 . The system of claim 1 , wherein members of the sets of sensing elements comprise loops.
14 . The system of claim 1 , wherein the one or more sets of the sensing elements comprises at least a first set of sensing elements and at least one additional set of sensing elements, wherein each additional set of sensing elements has a spatial phase offset relative to the first set of sensing elements.
15 . A method of operating an inductive encoder system configured to measure a relative position between two elements along a measuring axis direction,
the inductive encoder system comprising:
a scale extending along the measuring axis direction which includes a periodic scale pattern comprising signal modulating elements;
a detector portion configured to be positioned proximate to the periodic scale pattern and to move along the measuring axis direction relative to the periodic scale pattern, the detector portion comprising:
a field generating portion PRTFGE configured to generate a changing magnetic flux in response to a drive signal; and
a sensing portion PRTSEN comprising one or more sets of sensing elements arranged along the measuring axis direction, wherein each set of sensing elements is coupled to a plurality sensor vias, and the sensing portion PRTSEN is configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent signal modulating elements of the periodic scale pattern; and
a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure SST one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions, wherein
the plurality of shield structures SST comprise: a first shield structure which comprises a first plurality of shield vias; and a second shield structure which comprises a second plurality of shield vias; and
the first and second shield structures SST, and correspondingly the first and second pluralities of shield vias, are located on opposite sides of a first set of sensor vias which comprises at least two sensor vias that are coupled to a set of sensing elements of the sensing portion PRTSEN;
the method comprising:
providing a drive signal that causes the field generating portion PRTFGE to generate the changing magnetic flux, wherein the operation of the field generating portion PRTFGE produces one or more stray magnetic fields;
receiving detector signals from the sensing portion PRTSEN, wherein the first set of sensor vias is at least partially shielded from the one or more stray magnetic fields by the first and second shield structures; and
determining a relative position between the detector portion and the scale based at least in part on the detector signals.
16 . The method of claim 15 , wherein at least some sensor vias of the first set of sensor vias form at least part of one or more parasitic loops, and the shielding of the first set of sensor vias reduces an offset signal portion in the detector signals that would otherwise result from the one or more stray magnetic fields coupling to the one or more parasitic loops if the first and second shield structures were not present.
17 . The method of claim 15 , wherein the relative position does not include a position error that would otherwise result if the first and second shield structures were not present.
18 . A detector portion for use in an inductive encoder configured to measure a relative position between two elements along a measuring axis direction, the encoder including a scale extending along the measuring axis direction which includes a periodic scale pattern comprising signal modulating elements, wherein the detector portion is configured to be positioned proximate to the periodic scale pattern and to move along the measuring axis direction relative to the periodic scale pattern, the detector portion comprising:
a field generating portion PRTFGE configured to generate a changing magnetic flux in response to a drive signal;
a sensing portion PRTSEN comprising one or more sets of sensing elements arranged along the measuring axis direction, wherein each set of sensing elements is coupled to a plurality sensor vias, and the sensing portion PRTSEN is configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent signal modulating elements of the periodic scale pattern; and
a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure SST one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions, wherein:
the plurality of shield structures SST comprise: a first shield structure which comprises a first plurality of shield vias; and a second shield structure which comprises a second plurality of shield vias; and
the first and second shield structures SST, and correspondingly the first and second pluralities of shield vias, are located on opposite sides of a first set of sensor vias which comprises at least two sensor vias that are coupled to a set of sensing elements of the sensing portion PRTSEN.
19 . The system of claim 1 , wherein:
the plurality of shield structures SST further comprise a third shield structure which comprises a third plurality of shield vias; and
the second and third shield structures SST, and correspondingly the second and third pluralities of shield vias, are located on opposite sides of a second set of sensor vias which comprises at least two sensor vias.
20 . The system of claim 19 , wherein:
the shield vias of the first plurality of shield vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction;
the shield vias of the second plurality of shield vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction;
the shield vias of the third plurality of shield vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction;
at least some sensor vias of the first set of sensor vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction; and
at least some sensor vias of the second set of sensor vias are in a linear arrangement that extends in a direction that is perpendicular to the measuring axis direction.