Pressure sensor with non-metallic block and non-metallic diaphragm
A sheet-like diaphragm made from a non-metallic material, a main body block made from a non-metallic material, having a diaphragm facing surface facing a main plane of the diaphragm, disposed in a manner that the diaphragm facing surface is covered by the diaphragm, and provided with a fluid outlet and a fluid inlet facing the diaphragm side, a sensor head that has a recess for accommodating pressure transmission liquid, is disposed on a side opposite to the main body block across the diaphragm such that an opening of the recess is closed by the diaphragm, and is configured to detect pressure of fluid flowing between the diaphragm and the diaphragm facing surface by a deformation amount of the diaphragm are included. The fluid inlet and the fluid outlet are provided in a manner separated from the diaphragm further than the diaphragm facing surface.
1 . A pressure sensor comprising:
a sheet-like diaphragm made from a non-metallic material;
a main body block made from a non-metallic material, having a diaphragm facing surface facing a main plane of the diaphragm, disposed in a manner that the diaphragm facing surface is covered by the diaphragm, and provided with a fluid outlet and a fluid inlet facing the diaphragm side;
a sensor head that has a recess for accommodating pressure transmission liquid, is disposed on a side opposite to the main body block across the diaphragm such that an opening of the recess is closed by the diaphragm, and is configured to detect pressure of fluid flowing between the diaphragm and the diaphragm facing surface by a deformation amount of the diaphragm;
a packing that is provided so as to be in contact with a peripheral edge portion of the diaphragm and prevents leakage of the pressure transmission liquid from the peripheral edge portion of the diaphragm; and
a spacer provided separately from the main body block and surrounding an outer periphery of the diaphragm facing surface of the main body block,
wherein the packing is sandwiched between a surface of the sensor head directed the main body block and the spacer, whereby the peripheral edge portion of the diaphragm is sealed.
2 . The pressure sensor according to claim 1 , wherein the fluid inlet and the fluid outlet are provided to be separated from the diaphragm further than the diaphragm facing surface.