Diffraction element device
A diffraction element device includes a diffractive element and a power source, the diffractive element includes a substrate and a plurality of multi-step structures, each of the multi-step structures is composed of a plurality of steps, an electrode is provided at a part of the multi-step structures, a piezoelectric material or an electrostrictive material is included in a part of the multi-step structures, the power source is connected to the electrode or the substrate, and a height of the multi-step structures changes due to a voltage applied from the power source.
1 . A diffraction element device comprising:
a diffractive element including a substrate and a plurality of multi-step structures on the substrate, each of the plurality of multi-step structures composed of a plurality of steps including at least one of a piezoelectric material or an electrostrictive material; and
a power source configured to apply voltage to the diffractive element, wherein a height of each of the plurality of multi-step structures changes due to a voltage applied from the power source.
2 . The diffraction element device according to claim 1 , wherein the height of each of the plurality of steps is configured to change in response to a voltage applied from the power source.
3 . The diffraction element device according to claim 1 , wherein each of the plurality of multi-step structures comprises a plurality of structures having different heights.
4 . The diffraction element device according to claim 1 , wherein the substrate and the plurality of multi-step structures are formed of a same material and have a monolithic structure.
5 . The diffraction element device according to claim 1 , wherein each of the plurality of multi-step structures includes the plurality of steps arranged on a side surface of the substrate.
6 . A diffraction element device comprising:
a lower substrate;
an upper substrate arranged apart from the lower substrate and including a plurality of multi-step structures disposed on a side of the upper substrate that is opposite to the lower substrate; and
an actuator disposed between the upper substrate and the lower substrate, the actuator being configured to change a curvature of the upper substrate according to an applied voltage.
7 . The diffraction element device according to claim 6 , wherein the actuator is made of a piezoelectric material or an electrostrictive material.
8 . The diffraction element device according to claim 6 , further comprising a power source connected to the actuator, the upper substrate, or the lower substrate.
9 . The diffraction element device according to claim 8 , wherein the power source is configured to modulate a change in height of each of the plurality of multi-step structures.
10 . The diffraction element device according to claim 8 , further comprising an electrode provided in a part of each of the plurality of multi-step structures and electrically connected to the power source.
11 . The diffraction element device according to claim 6 , further comprising a power source configured to modulate the change of the curvature of the upper substrate.
12 . A diffraction element device comprising:
a diffractive element including a substrate and a plurality of multi-step structures on the substrate, each of the plurality of multi-step structures composed of a plurality of steps including at least one of a piezoelectric material or an electrostrictive material, wherein
a height of each of the plurality of multi-step structures is configured to change in response to an applied voltage.