Substrate processing device and method for operating the same
A substrate processing device includes a platen, a polishing pad disposed on the platen, a first rotating body, a second rotating body spaced apart from the first rotating body, a caterpillar module disposed on a portion of the polishing pad and engaged with the first rotating body and the second rotating body, and a temperature controller thermally connected to the caterpillar module.
1 . A substrate processing device comprising:
a platen;
a polishing pad disposed on the platen;
a first rotating body;
a second rotating body spaced apart from the first rotating body; and
a caterpillar module disposed on a portion of the polishing pad, engaged with the first rotating body and the second rotating body, and extending outside of an outer circumferential surface of the platen.
2 . The substrate processing device of claim 1 , further comprising a temperature controller thermally connected to the caterpillar module.
3 . The substrate processing device of claim 1 , wherein the polishing pad is configured to rotate in a first direction and the caterpillar module is configured to rotate in a second direction, perpendicular to the first direction.
4 . A substrate processing device comprising:
a platen;
a polishing pad disposed on the platen;
a first rotating body;
a second rotating body spaced apart from the first rotating body;
a caterpillar module disposed on a portion of the polishing pad and engaged with the first rotating body and the second rotating body; and
a temperature controller thermally connected to the caterpillar module.
5 . The substrate processing device of claim 4 ,
wherein the first rotating body is supplied with a first temperature-controlling fluid, and
the caterpillar module is thermally connected to the first rotating body.
6 . The substrate processing device of claim 4 ,
wherein the second rotating body is supplied with a second temperature-controlling fluid, and
the caterpillar module is thermally connected to the second rotating body.
7 . The substrate processing device of claim 4 ,
wherein the temperature controller comprises a heat transfer module disposed between the first rotating body and the second rotating body, providing heat to the caterpillar module.
8 . The substrate processing device of claim 7 ,
wherein the heat transfer module comprises:
a first heat transfer module surrounding a first portion of the caterpillar module between the first rotating body and the second rotating body; and
a second heat transfer module spaced apart from the first heat transfer module and surrounding a second portion of the caterpillar module disposed on the polishing pad.
9 . The substrate processing device of claim 8 ,
wherein the second portion of the caterpillar module is disposed between the second heat transfer module and the polishing pad, and the second heat transfer module surrounds sides of the second portion of the caterpillar module.
10 . The substrate processing device of claim 4 ,
wherein the second rotating body is disposed outside of an outer circumferential surface of the platen.
11 . The substrate processing device of claim 4 , further comprising:
a cleaning module disposed on an outer circumferential surface of the platen and disposed in contact with the caterpillar module.
12 . The substrate processing device of claim 11 ,
wherein the cleaning module comprises a spray unit spraying a cleaning fluid to a surface of the caterpillar module.
13 . The substrate processing device of claim 11 ,
wherein the cleaning module comprises a brush unit disposed in contact with the caterpillar module and connected to a driving shaft for rotating the brush unit.
14 . The substrate processing device of claim 4 , wherein temperature controller comprises:
a first Peltier cell thermally connected to the first rotating body; and
a second Peltier cell thermally connected to the second rotating body.
15 . The substrate processing device of claim 14 ,
wherein a temperature of the first rotating body is controlled by the first Peltier cell, and
the caterpillar module is thermally connected to the first rotating body, and
wherein a temperature of the second rotating body is controlled by the second Peltier cell, and the caterpillar module is thermally connected to the second rotating body.
16 . The substrate processing device of claim 15 ,
wherein the first Peltier cell includes a first slip ring connected to a power line supplying electrical energy, and the first Peltier cell converts the electrical energy into thermal energy to control the temperature of the first rotating body, and
wherein the second Peltier cell includes a second slip ring connected to a power line supplying electrical energy, and the second Peltier cell converts the electrical energy into thermal energy to control the temperature of the second rotating body.
17 . A method for operating a substrate processing device comprising a platen, a polishing pad disposed on the platen, a first rotating body, a second rotating body spaced apart from the first rotating body, and a caterpillar module disposed on a portion of the polishing pad and engaged with the first rotating body and the second rotating body, the method comprising:
rotating first rotating body and the second rotating body to rotate the caterpillar module;
rotating the polishing pad;
transferring heat to the caterpillar module; and
transferring heat to a surface of the polishing pad by the caterpillar module.
18 . The method of claim 17 ,
wherein transferring heat to the caterpillar module includes supplying, by a heat transfer module disposed between the first rotating body and the second rotating body, heat to the caterpillar module.
19 . The method of claim 17 , further comprising:
cleaning the caterpillar module using a cleaning module disposed on an outer circumferential surface of the platen and disposed below the caterpillar module.
20 . The method of claim 19 , further comprising:
moving contaminants on the polishing pad to the caterpillar module by the rotation of the polishing pad;
moving the contaminants to the cleaning module by the rotation of the caterpillar module; and
removing the contaminants from the caterpillar module by the cleaning module.