Thermistor sintered body and method for manufacturing thermistor sintered body
A thermistor sintered body has a thickness in a range of 1 μm to 100 μm and an area in a range of 1 mm 2 to 10 mm 2 , and is composed of a single body of a sintered body having a composition of NiMn 2 O 4 . This thermistor sintered body can be manufactured by a first step of dropping a raw material liquid RL onto a surface of a substrate rotatably supported, a second step of rotating the substrate with the dropped raw material liquid RL and spreading the raw material liquid RL, a third step of forming a sintered body having the composition of NiMn 2 O 4 on the surface of the substrate by heating and holding the raw material liquid RL and the substrate on which the raw material liquid RL has been placed, and a fourth step of separating the sintered body from the substrate.
1 . A thermistor sintered body, wherein the thermistor sintered body has a thickness in a range of 1 μm to 100 μm and an area in a range of 1 mm 2 to 10 mm 2 , and the thermistor sintered body is composed of a single body of a sintered body having a composition of NiMn 2 O 4 , wherein in the thermistor sintered body, 40% to 80% of Mn in the NiMn 2 O 4 is substituted with Fe, and the thermistor sintered body has a relative density of 90% or more.
2 . The thermistor sintered body according to claim 1 , wherein:
the thickness is in a range of 10 μm to 50 μm; and
the area is in a range of 2 mm 2 to 5 mm 2 .
3 . A manufacturing method of a thermistor sintered body according to claim 1 , the manufacturing method comprising:
a first step of dropping a raw material liquid onto a surface of a rotatably supported substrate;
a second step of rotating the substrate with the dropped raw material liquid and spreading the raw material liquid;
a third step of forming the sintered body having the composition of NiMn 2 O 4 on the surface of the substrate by heating and holding the raw material liquid and the substrate on which the raw material liquid has been placed;
and a fourth step of separating the sintered body from the substrate.
4 . The manufacturing method of the thermistor sintered body according to claim 3 , wherein the third step is performed after repeating the first step and the second step a plurality of times.
5 . The manufacturing method of the thermistor sintered body according to claim 3 , wherein in the fourth step, the sintered body is separated from the substrate based on a difference in linear expansion coefficient between the sintered body and the substrate.
6 . The manufacturing method of the thermistor sintered body according to claim 3 , wherein in the fourth step, the sintered body is separated from the substrate by selectively dissolving the substrate.
7 . The manufacturing method of the thermistor sintered body according to claim 3 , wherein a thermistor joined body, in which the sintered body is formed on the surface of the substrate, is cut and divided in a grid pattern when viewed from above in order to generate a plurality of thermistor divided bodies; and
wherein the sintered body is separated from the substrate by selectively dissolving a boundary portion in each of the plurality of generated thermistor divided bodies, the boundary portion being located between the sintered body and the substrate.
8 . The manufacturing method of the thermistor sintered body according to claim 5 , wherein a trace of a material forming the substrate remains on a separation surface, which is a surface of the sintered body from which the substrate is separated.
9 . The manufacturing method of the thermistor sintered body according to claim 3 further comprising:
recovering the sintered body separated from the substrate by magnetic force.
10 . The thermistor sintered body according to claim 2 , wherein 20% to 90% of Mn in the NiMn 2 O 4 is substituted with Fe.
11 . A manufacturing method of a thermistor sintered body according to claim 2 , the manufacturing method comprising:
a first step of dropping a raw material liquid onto a surface of a rotatably supported substrate;
a second step of rotating the substrate with the dropped raw material liquid and spreading the raw material liquid;
a third step of forming the sintered body having the composition of NiMn 2 O 4 on the surface of the substrate by heating and holding the raw material liquid and the substrate on which the raw material liquid has been placed; and
a fourth step of separating the sintered body from the substrate.
12 . The manufacturing method of the thermistor sintered body according to claim 4 , wherein in the fourth step, the sintered body is separated from the substrate based on a difference in linear expansion coefficient between the sintered body and the substrate.
13 . The manufacturing method of the thermistor sintered body according to claim 4 , wherein in the fourth step, the sintered body is separated from the substrate by selectively dissolving the substrate.
14 . The manufacturing method of the thermistor sintered body according to claim 4 ,
wherein a thermistor joined body, in which the sintered body is formed on the surface of the substrate, is cut and divided in a grid pattern when viewed from above in order to generate a plurality of thermistor divided bodies; and
wherein the sintered body is separated from the substrate by selectively dissolving a boundary portion in each of the plurality of generated thermistor divided bodies, the boundary portion being located between the sintered body and the substrate.
15 . The manufacturing method of the thermistor sintered body according to claim 6 , wherein a trace of a material forming the substrate remains on a separation surface, which is a surface of the sintered body from which the substrate is separated.
16 . The manufacturing method of the thermistor sintered body according to claim 7 , wherein a trace of a material forming the substrate remains on a separation surface, which is a surface of the sintered body from which the substrate is separated.
17 . The manufacturing method of the thermistor sintered body according to claim 5 further comprising recovering the sintered body separated from the substrate by magnetic force.
18 . The manufacturing method of the thermistor sintered body according to claim 6 further comprising recovering the sintered body separated from the substrate by magnetic force.