Processing system and transfer method
A processing system includes: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module; and a controller. The controller performs processes of: (a) controlling transfer robot to transfer consumable member installed in the chamber to the storage module; (b) detecting position of the consumable member transferred to the storage module by the position detection sensor; and (c) controlling transfer robot to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).
1 . A processing system comprising:
a chamber in which a consumable member is installed;
a storage configured to store the consumable member;
a position detection sensor configured to detect a reference position of the consumable member, the reference position including position information corresponding to positioning of the consumable member in the chamber in which the consumable member was positioned prior to transfer of the consumable member toward the storage;
a vacuum transferer having a transfer robot configured to transfer the consumable member between the chamber and the storage; and
a controller having a processor and a memory with a computer readable program stored therein that upon execution of the computer readable program by the processor configures the controller to perform processes of:
(a) controlling the transfer robot to transfer the consumable member installed in the chamber toward the storage,
(b) detecting the reference position of the consumable member transferred towards the storage by the position detection sensor, generating correspondence information that matches the reference position to identification information of the chamber, and storing the correspondence information, and
(c) controlling the transfer robot to transfer a new consumable member different from the consumable member from to the chamber at a position adjusted based on the correspondence information.
2 . The processing system of claim 1 , wherein the controller is configured to perform the process (a) after the consumable member is installed in the chamber and before processing is performed inside the chamber.
3 . The processing system of claim 1 , wherein the storage is detachable from the vacuum transferer.
4 . The processing system of claim 3 , wherein the controller is configured to perform the process (a) after the storage is connected to the vacuum transferer and before processing is performed inside the chamber.
5 . The processing system of claim 1 , wherein
the storage has an exhaust port for depressurizing an inside of the storage, and
the controller is configured to further perform a process of (d) depressurizing the inside of the storage through the exhaust port so that the inside of the storage has a pressure lower than that of an inside of the vacuum transferer and communicating the inside of the storage with the inside of the vacuum transferer.
6 . The processing system of claim 1 , wherein the position detection sensor detects a horizontal position of the consumable member.
7 . The processing system of claim 1 , wherein
the storage stores a plurality of the consumable members at intervals in a vertical direction, and
the controller is configured to further perform a process of (e) storing the consumable member used inside the chamber below the new consumable member stored inside the storage before the process (c).
8 . The processing system of claim 1 , wherein
the consumable member has an annular shape, and
the position detection sensor comprises:
an inner circumference sensor that detects an inner circumference reference position of the consumable member; and
an outer circumference sensor that detects an outer circumference reference position of the consumable member.
9 . The processing system of claim 1 , wherein the consumable member includes an edge ring installed inside the chamber and mounted on an upper surface of a mounting table on which a substrate is mounted so as to surround the substrate.
10 . The processing system of claim 1 , wherein the storage is connected to the vacuum transferer.
11 . The processing system of claim 1 , wherein the position detection sensor is installed in the storage.
12 . A processing system comprising:
a chamber in which a consumable member is installed;
a storage configured to store the consumable member;
a position detection sensor configured to detect a reference position of the consumable member, the reference position including position information corresponding to positioning of the consumable member in the chamber in which the consumable member was positioned prior to transfer of the consumable member toward the storage;
a vacuum transferer having a transfer robot configured to transfer the consumable member between the chamber and the storage; and
a controller having a processor and a memory with a computer readable program stored therein that upon execution of the computer readable program by the processor configures the controller to perform processes of:
(a) controlling the transfer robot to transfer the consumable member installed in the chamber toward the storage;
(b) detecting the reference position of the consumable member transferred toward the storage by the position detection sensor; and
(c) controlling the transfer robot to transfer a new consumable member different from the consumable member to the chamber at a position adjusted based on the reference position of the consumable member detected in the process (b).
13 . A method of transferring a consumable member in a processing system including a chamber in which a consumable member is installed, a storage configured to store the consumable member, a position detection sensor located in the storage and configured to detect a reference position of the consumable member, the reference position including position information corresponding to positioning of the consumable member in the chamber in which the consumable member was positioned prior to transfer of the consumable member to the storage, and a vacuum transferer connected to the chamber and the storage, the vacuum transferer having a transfer robot configured to transfer the consumable member between the chamber and the storage, the method comprising processes of:
(a) transferring the consumable member installed in the chamber to the storage by the transfer robot;
(b) detecting the reference position of the consumable member transferred to the storage by the position detection sensor; and
(c) transferring a new consumable member different from the consumable member from the storage to the chamber by the transfer robot at a position adjusted based on the reference position of the consumable member detected in the process (b).
14 . The processing system according to claim 1 , wherein the position detection sensor is configured to detect a center position of the consumable member to provide at least part of the reference position.
15 . The processing system according to claim 14 , wherein the position detection sensor is configured to detect a circumference of the consumable member to provide at least part of the reference position.
16 . The processing system according to claim 1 , wherein the storage includes:
a plurality of storage locations which store used or unused consumable members; and
a stage, separate from the plurality of storage locations, and
wherein the position detection sensor is positioned and configured to detect the reference position with the consumable member mounted on the stage.
17 . The processing system according to claim 16 , wherein the position detection sensor is configured to detect at least one of a center position of the consumable member mounted on the stage and a circumferential position of the consumable member mounted on the stage to provide at least part of the reference position.
18 . The processing system according to claim 17 , wherein the stage is configured to move rotationally and/or horizontally to different positions as the position detection sensor collects information of the reference position.
19 . The processing system according to claim 16 , wherein the position detection sensor is configured to detect the reference position with respect to a plan view of the consumable member.
20 . The processing system according to claim 19 , wherein the system further includes:
a number detection sensor, separate from the position detection sensor, which detects a number of used and/or unused consumable members in the plurality of storage locations.