Vibrator device
A vibrator device has a base, a semiconductor element having an oscillation circuit, and a vibrator having an excitation electrode sequentially stacked and includes a first wire electrically coupling between the excitation electrode and the semiconductor element, a second wire electrically coupling between a second external terminal as an external output terminal placed on the base and the semiconductor element, and a shield wire placed between at least a part of the first wire and at least a part of the second wire.
1 . A vibrator device having a base, a semiconductor element having an oscillation circuit, and a vibrator having an excitation electrode sequentially stacked, comprising:
a first wire electrically coupling between the excitation electrode and the semiconductor element;
a second wire electrically coupling between an external output terminal placed on the base and the semiconductor element; and
a shield wire placed between at least a part of the first wire and at least a part of the second wire.
2 . The vibrator device according to claim 1 , wherein
the shield wire is placed on the base.
3 . The vibrator device according to claim 2 , wherein
the shield wire is placed on a surface facing the semiconductor element in the base.
4 . The vibrator device according to claim 2 , wherein
the base is a multilayer substrate, and
the shield wire is placed between layers of the multilayer substrate.
5 . The vibrator device according to claim 4 , wherein
the shield wire placed between the layers is placed in a first direction and a second direction crossing the first direction in a plan view with respect to the second wire placed between the layers.
6 . The vibrator device according to claim 5 , wherein
the shield wire placed between the layers extends to a side surface of the base.
7 . The vibrator device according to claim 4 , further comprising a via electrically coupled to the shield wire placed between the layers.
8 . The vibrator device according to claim 1 , wherein
the semiconductor element has a constant potential layer held at a constant potential, and
the shield wire is the constant potential layer of the semiconductor element.
9 . The vibrator device according to claim 1 , wherein
the vibrator has a lid and a base member forming a housing space housing a vibrator element between the lid and itself, and
the shield wire is the lid of the vibrator.
10 . The vibrator device according to claim 9 , wherein
the lid is electrically coupled to the semiconductor element via a conductive adhesive.