Tape sticking system, tape sticking method, tape peeling system, and tape peeling method
The present invention relates to a tape sticking system for sticking a protective tape for protecting a peripheral portion of a substrate, such as a wafer. The tape sticking apparatus ( 10 ) includes a substrate holder ( 21 ) for sticking, a side roller ( 43 ), a first roller ( 46 ), a second roller ( 47 ), a roller-driving motor ( 49 ) coupled to the second roller ( 47 ), and a nipping mechanism ( 60 ) for nipping the peripheral portion of the substrate (W) with the first roller ( 46 ) and the second roller ( 47 ). The tape sticking apparatus ( 10 ) is configured to cause the second roller ( 47 ) to be rotated by use of the roller-driving motor ( 49 ) while nipping the peripheral portion of the substrate, held to the substrate holder ( 21 ) for sticking, with the first roller ( 46 ) and the second roller ( 47 ), to thereby rotate the substrate.
1 . A tape sticking system, comprising:
a tape sticking apparatus configured to stick a protective tape on a peripheral portion of a substrate,
wherein the tape sticking apparatus includes:
a substrate holder for sticking configured to rotatably hold the substrate;
a side roller configured to press the protective tape against a peripheral side surface of the substrate;
a first roller configured to bend the protective tape along a longitudinal direction thereof, and stick a bent portion of the protective tape onto a first surface of the peripheral portion of the substrate;
a second roller configured to bend the protective tape along a longitudinal direction thereof, and stick a bent portion of the protective tape onto a second surface of the peripheral portion of the substrate;
a roller-driving motor coupled to the second roller, and
a nipping mechanism configured to cause the first roller and the second roller to nip the peripheral portion of the substrate, and
wherein the tape sticking apparatus is configured to cause the second roller to be rotated by use of the roller-driving motor while nipping the peripheral portion of the substrate, held to the substrate holder for sticking, with the first roller and the second roller, to thereby rotate the substrate.
2 . The tape sticking system according to claim 1 , wherein the second roller is arranged below the first roller.
3 . The tape sticking system according to claim 1 , wherein the first roller and the second roller have a tapered shape with a gradually decreasing cross-sectional area toward a tip, respectively, and
the first roller and the second roller are arranged so that the tips are inclined toward a surface of the substrate.
4 . The tape sticking system according to claim 1 , wherein the first roller and the second roller are made of rubber.
5 . The tape sticking system according to claim 1 , wherein the tape sticking apparatus further comprises a tape heating apparatus configured to heat the protective tape stuck on the peripheral portion of the substrate.
6 . The tape sticking system according to claim 1 , further comprising a transfer robot configured to transfer the substrate to the tape sticking apparatus,
wherein the transfer robot includes a Bernoulli hand configured to hold the substrate using Bernoulli's theorem.
7 . The tape sticking system according to claim 1 , wherein the tape sticking apparatus comprises a plurality of tape sticking apparatus, and
the plurality of tape sticking apparatus are arranged side by side in a vertical direction or in a horizontal direction.
8 . The tape sticking system according to claim 1 , further comprising a tape peeling apparatus configured to peel the protective tape from the peripheral portion of the substrate,
wherein the tape peeling apparatus includes;
a substrate holder for peeling configure to hold and rotate the substrate, and
a UV irradiation module configured to irradiate ultraviolet rays to the protective tape stuck on the peripheral portion of the substrate.
9 . The tape sticking system according to claim 8 , wherein the tape peeling apparatus is arranged below the tape sticking apparatus.
10 . The tape sticking system according to claim 9 , wherein the tape peeling apparatus comprises a plurality of tape peeling apparatuses, and
the plurality of tape peeling apparatuses are arranged side by side horizontally.
11 . A tape sticking method of sticking a protective tape on a peripheral portion of a substrate, comprising:
holding the substrate rotatably by use of a substrate holder for sticking;
pressing the protective tape against a peripheral side surface of the substrate;
causing a second roller to be rotated by use of a roller-driving motor coupled to a second motor while nipping the peripheral portion of the substrate with a first roller and the second roller, to thereby rotate the substrate;
bending the protective tape along a longitudinal direction thereof by use of the first roller, and then sticking a bent portion of the protective tape onto a first surface of the peripheral portion of the substrate; and
bending the protective tape along the longitudinal direction thereof, and then sticking a bent portion of the protective tape onto a second surface of the peripheral portion of the substrate.
12 . The tape sticking method according to claim 11 , further comprising: heating the protective tape stuck on the peripheral portion of the substrate.
13 . The tape attaching method according to claim 11 , further comprising: irradiating ultraviolet rays to the protective tape stuck on the peripheral portion; and
peeling the protective tape from the peripheral portion of the substrate while rotating the substrate.
14 . A tape peeling system, comprising:
a tape peeling apparatus configured to peel a protective tape from a peripheral portion of a substrate,
wherein the tape peeling apparatus includes:
a substrate holder for peeling configured to hold and rotate the substrate;
a tape peeling unit configured to peel the protective tape from the rotating substrate; and
a UV irradiation module configured to irradiate ultraviolet rays to the protective tape stuck on the peripheral portion of the substrate.
15 . The tape peeling system according to claim 14 , wherein the UV irradiation module further comprises:
a UV irradiation unit configured to irradiate ultraviolet rays
a substrate holder for UV irradiation configured to hold the substrate; and
a cup-shaped light-shielding cover coupled to the UV irradiation unit, and
wherein the light-shielding cover is formed to be able to cover the substrate in its entirety.
16 . The tape peeling system according to claim 15 , wherein the substrate holder for UV irradiation includes:
a substrate holding device configure to hold and rotate the substrate; and
an elevating mechanism configured to move the substrate holding device up and down, and
wherein the light-shielding cover is disposed above the substrate holding device, and opens downward.
17 . The tape peeling system according to claim 14 , further comprising a transfer robot configured to transfer the substrate to the tape peeling apparatus,
wherein the transfer robot includes a Bernoulli hand configured to hold the substrate using Bernoulli's theorem.
18 . A tape peeling method of peeling off a protective tape from a peripheral portion of a substrate, comprising:
irradiating ultraviolet rays to the protective tape stuck on the peripheral portion; and
peeling the protective tape from the peripheral portion of the substrate while rotating the substrate.
19 . The tape peeling method according to claim 18 , wherein irradiating ultraviolet rays to the protective tape stuck on the peripheral portion comprises irradiating ultraviolet rays to the protective tape stuck on the peripheral portion while covering the substrate in its entirety with the light-shielding cover.
20 . The tape peeling method according to claim 19 , wherein irradiating ultraviolet rays to the protective tape stuck on the peripheral portion while covering the substrate in its entirety with the light-shielding cover includes irradiating ultraviolet rays to the protective tape while rotating the substrate.