Granted Patent B2

US 12,572,079 · App. 18/054,315 · Granted Mar 10, 2026

Inventors: Christoph M. Greiner (Eugene, OR); Dmitri Iazikov (Eugene, OR)

Assignee: II-VI DELAWARE, INC.

G03F7/70158G03F7/0041G03F7/095G03F7/2002

Abstract

Claims (22)

1 . A method of fabricating an optical device, the method comprising:

applying a resist layer to a device layer for the optical device;

producing a set of first features in the resist layer using a first mask, the first features arranged in a period in a patterned grid and having one or more first characteristic dimensions;

producing at least one set of additional features in the patterned grid in the resist layer using at least one additional mask offset at a fraction of the period in at least one planar dimension from the first features, the additional features having one or more additional characteristic dimensions; and

producing the patterned grid of the first features and the additional features in the device layer,

wherein the patterned grid comprises a triangular grid; and wherein producing the at least one set of the additional features in the patterned grid in the resist layer using the at least one additional mask offset at the fraction of the period in the at least one planar dimension from the first features comprises:

producing three sets of the additional features for the triangular grid in the resist layer using three of the at least one additional mask, each of the three additional masks offset at the fraction of the period in one of three of the planar dimensions from the first features.

2 . The method of claim 1 , wherein the device layer is a substrate or is a dielectric layer disposed on a substrate.

3 . The method of claim 1 , wherein the resist layer is a photoresist layer.

4 . The method of claim 1 , wherein producing the patterned grid of the features in the device layer comprises defining the patterned grid in the device layer using reactive ion etching.

5 . The method of claim 1 , wherein each of the one or more first characteristic dimensions in a given set are the same as one another.

6 . The method of claim 1 , wherein each of the one or more first characteristic dimensions in each set are different from one another.

7 . The method of claim 1 , further comprising designing the optical device to impart a differential phase delay in a range 0 to 2π or multiple of 2π radians by selecting a thickness of the device layer and selecting a range of the one or more first characteristic dimensions and a range of the one or more additional characteristic dimensions for an electromagnetic wave propagating through the optical device.

8 . The method of claim 1 , further comprising:

disposing a dielectric layer on top of a substrate;

applying the resist layer on top of the dielectric layer;

primarily exposing the resist layer through the first mask;

secondarily exposing the resist layer through the at least one additional mask, such that the resist is exposed in areas not exposed during the primarily exposure of the resist layer, wherein the second mask increases a resolution of exposed areas of the resist layer;

removing areas of the resist layer not exposed;

removing areas of the dielectric layer not covered by the resist layer; and

removing the remaining resist layer.

9 . The method of claim 8 , further comprising: tertiary exposing the resist layer through a third photomask, such that the resist layer is exposed in areas not exposed during the primarily and secondarily exposure of the resist layer, wherein the third photomask increases the resolution of the exposed areas of the resist layer.

Assignments (2)

Continuity (2)

References Cited (14)