Piezoelectric film capable of preventing short circuit caused by electrode protruding from piezoelectric layer, and method of producing piezoelectric film
An object of the present invention is to provide a piezoelectric film capable of preventing a short circuit caused by electrodes protruding from a piezoelectric layer in the piezoelectric film having electrode layers and protective layers on both surfaces of the piezoelectric layer, and a method of producing the piezoelectric film. The object can be achieved by the piezoelectric film that includes a laminated film including a piezoelectric layer, an electrode layer provided on each of both surfaces of the piezoelectric layer, and a protective layer covering the electrode layer, and an insulating end surface coating layer which covers at least a part of an end surface of the laminated film.
1 . A piezoelectric film comprising:
a laminated film which includes a piezoelectric layer, an electrode layer provided on each of both surfaces of the piezoelectric layer, and a protective layer covering the electrode layer; and
an insulating end surface coating layer which covers, on an end surface of the laminated film, from at least a part of the piezoelectric layer to at least a part of the protective layer.
2 . The piezoelectric film according to claim 1 ,
wherein the end surface coating layer covers the entire end surface of the laminated film.
3 . The piezoelectric film according to claim 2 , further comprising:
a conductive connection member which penetrates the protective layer and is connected to the electrode layer; and
a lead-out electrode which is electrically connected directly or indirectly to the conductive connection member and extends to an outside of the laminated film in a plane direction.
4 . The piezoelectric film according to claim 3 , further comprising:
an insulating electrode insulation member which is provided between the lead-out electrode and the laminated film and protrudes from an end portion of the laminated film.
5 . The piezoelectric film according to claim 2 , further comprising:
an insulating interlayer insulation member which is provided on at least a part of an end portion of the laminated film in at least one of a space between the piezoelectric layer and one electrode layer or a space between the piezoelectric layer and the other electrode layer.
6 . The piezoelectric film according to claim 5 ,
wherein at least a part of the interlayer insulation member protrudes from the end portion of the laminated film.
7 . The piezoelectric film according to claim 5 ,
wherein the interlayer insulation member is provided on the end portion of the laminated film on a side where the electrode is led out from the laminated film.
8 . The piezoelectric film according to claim 5 ,
wherein the interlayer insulation member is provided on the entire end portion of the laminated film.
9 . The piezoelectric film according to claim 2 ,
wherein the piezoelectric layer is a polymer-based piezoelectric composite material that contains piezoelectric particles in a matrix containing a polymer material.
10 . The piezoelectric film according to claim 1 , further comprising:
a conductive connection member which penetrates the protective layer and is connected to the electrode layer; and
a lead-out electrode which is electrically connected directly or indirectly to the conductive connection member and extends to an outside of the laminated film in a plane direction.
11 . The piezoelectric film according to claim 10 , further comprising:
an insulating electrode insulation member which is provided between the lead-out electrode and the laminated film and protrudes from an end portion of the laminated film.
12 . The piezoelectric film according to claim 1 , further comprising:
an insulating interlayer insulation member which is provided on at least a part of an end portion of the laminated film in at least one of a space between the piezoelectric layer and one electrode layer or a space between the piezoelectric layer and the other electrode layer.
13 . The piezoelectric film according to claim 12 ,
wherein at least a part of the interlayer insulation member protrudes from the end portion of the laminated film.
14 . The piezoelectric film according to claim 12 ,
wherein the interlayer insulation member is provided on the end portion of the laminated film on a side where the electrode is led out from the laminated film.
15 . The piezoelectric film according to claim 12 ,
wherein the interlayer insulation member is provided on the entire end portion of the laminated film.
16 . The piezoelectric film according to claim 1 ,
wherein the piezoelectric layer is a polymer-based piezoelectric composite material that contains piezoelectric particles in a matrix containing a polymer material.