Substrate treating apparatus
A substrate treating apparatus includes a batch-type processing unit configured to perform treatment on a plurality of substrates, a single-wafer-type processing unit configured to perform treatment on one substrate of the substrates at a time, a posture turning unit configured to turn and change the orientation of the substrates to be processed by the batch-type processing unit, while the substrates are wetted with deionized water, a first transport unit that transports the substrates, processed by the batch-type processing unit, to the posture turning unit, a second transport unit that transports the substrates turned horizontally by the posture turning unit to enable them to be subjected to treatment with the hand unit and a cleaning and drying unit configured to perform cleaning and drying treatment at the hand unit.
1 . A substrate treating apparatus that performs treatment on a substrate, the apparatus comprising:
a batch-type processing unit configured to perform treatment on a plurality of substrates in a vertical posture collectively;
a single-wafer-type processing unit configured to perform treatment on one substrate of the plurality of substrates in a horizontal posture;
a posture turning unit configured to hold the substrates on which the treatment is performed by the batch-type processing unit, and to turn a posture of the substrates from vertical to horizontal while the substrates get wet with deionized water;
a first transport unit configured to transport the substrates, on which the treatment is performed by the batch-type processing unit, to the posture turning unit;
a second transport unit comprising a hand configured to transport the substrates, turned to horizontal by the posture turning unit, to the single-wafer-type processing unit, and configured to transport the substrates, on which the treatment is performed by the single-wafer processing unit, with the hand out of the single-wafer-type processing unit; and
a cleaning and drying unit configured to perform cleaning and drying treatment on the hand of the second transport unit.
2 . The substrate treating apparatus according to claim 1 , wherein
the cleaning and drying unit performs the cleaning and drying treatment on the hand before the second transport unit transports the substrates, on which the treatment is performed by the single-wafer processing unit, out of the single-wafer-type processing unit.
3 . The substrate treating apparatus according to claim 2 , wherein
the cleaning and drying unit performs the cleaning and drying treatment on the hand after the substrates are transported from the posture turning unit to the single-wafer-type processing unit.
4 . The substrate treating apparatus according to claim 3 , wherein
the cleaning and drying unit is arranged above the posture turning unit.
5 . The substrate treating apparatus according to claim 4 , wherein
an interior of the cleaning and drying unit and an interior of the posture turning unit are in fluid communication with each other in a vertical direction.
6 . The substrate treating apparatus according to claim 2 , wherein
the cleaning and drying unit is arranged above the posture turning unit.
7 . The substrate treating apparatus according to claim 6 , wherein
an interior of the cleaning and drying unit and an interior of the posture turning unit are in fluid communication with each other in a vertical direction.
8 . The substrate treating apparatus according to claim 2 , wherein
the cleaning and drying unit includes a cleaning liquid nozzle configured to eject a cleaning liquid to the hand, and a drying mechanism configured to dry the hand.
9 . The substrate treating apparatus according to claim 1 , wherein
the cleaning and drying unit performs the cleaning and drying treatment on the hand after the substrates are transported from the posture turning unit to the single-wafer-type processing unit.
10 . The substrate treating apparatus according to claim 9 , wherein
the cleaning and drying unit is arranged above the posture turning unit.
11 . The substrate treating apparatus according to claim 10 , wherein
an interior of the cleaning and drying unit and an interior of the posture turning unit are in fluid communication with each other in a vertical direction.
12 . The substrate treating apparatus according to claim 9 , wherein
the cleaning and drying unit includes a cleaning liquid nozzle configured to eject a cleaning liquid to the hand, and a drying mechanism configured to dry the hand.
13 . The substrate treating apparatus according to claim 1 , wherein
the cleaning and drying unit is arranged above the posture turning unit.
14 . The substrate treating apparatus according to claim 13 , wherein
an interior of the cleaning and drying unit and an interior of the posture turning unit are in fluid communication with each other in a vertical direction.
15 . The substrate treating apparatus according to claim 14 , wherein
the cleaning and drying unit includes a cleaning liquid nozzle configured to eject a cleaning liquid to the hand, and a drying mechanism configured to dry the hand.
16 . The substrate treating apparatus according to claim 13 , wherein
the cleaning and drying unit includes a cleaning liquid nozzle configured to eject a cleaning liquid to the hand, and a drying mechanism configured to dry the hand.
17 . The substrate treating apparatus according to claim 1 , wherein
the cleaning and drying unit includes a cleaning liquid nozzle configured to eject a cleaning liquid to the hand, and a drying mechanism configured to dry the hand.
18 . The substrate treating apparatus according to claim 17 , wherein
the drying mechanism is a gas nozzle configured to supply gas to the hand.
19 . The substrate treating apparatus according to claim 1 , wherein
the single-wafer-type processing unit includes a spin chuck configured to support the substrate rotatably in a horizontal posture, a treatment liquid supplying mechanism configured to supply a treatment liquid to the substrate supported by the spin chuck, and a gas supplying mechanism configured to supply gas on the substrate supported by the spin chuck, and
the cleaning and drying unit performs cleaning and drying treatment to the hand with use of the treatment liquid supplying mechanism and the gas supplying mechanism of the single-wafer-type processing unit.
20 . The substrate treating apparatus according to claim 1 , further comprising:
a plurality of the cleaning and drying units arranged in different positions in plan view, wherein
one of the cleaning and drying units that is closest to the hand performs cleaning and drying treatment in accordance with a position of the second transport unit.