Fabricating method for test element group
A fabricating method for a test element group is provided. The fabricating method for a test element group includes fabricating test areas generated in a scribe lane area, wherein fabricating of the test areas includes forming a plurality of fins protruding in a first direction on a substrate, covering at least some of the plurality of fins with a masking material, and performing selective epitaxial growth by injecting a gas onto the plurality of fins. The gas is not injected onto the at least some of the plurality of fins that are covered with the masking material, such that the epitaxial growth does not occur on the fins covered with the masking material.
1 . A fabricating method for a test element group, the fabricating method comprising:
fabricating test areas generated in a scribe lane area, wherein the fabricating of the test areas includes:
forming, on a substrate, a first region and second regions disposed on sides of the first region,
forming a first fin and a second fin in the first region, and forming third fins in the second regions,
covering the second regions with a masking material,
injecting a gas onto the substrate with the second regions covered with the masking material to respectively form a first source/drain area and a second source/drain area on the first fin and the second fin,
wherein the gas is not injected onto the third fins and a source/drain area is not formed on the third fins during the fabrications of the test element group, and
wherein, in the first region, the first source/drain area is in contact with the second source/drain area.
2 . The fabricating method as claimed in claim 1 , wherein forming the first source/drain area and the second source/drain area comprises performing selective epitaxial growth (SEG).
3 . The fabricating method as claimed in claim 1 , wherein the gas includes a silicon source gas, a germanium source gas, an etching gas, and a carrier gas.
4 . The fabricating method as claimed in claim 1 , wherein the fabricating of the test areas further includes removing the masking material after the gas is injected.
5 . The fabricating method as claimed in claim 4 , wherein the fabricating of the test areas further includes, after the removing of the masking material,
generating a first insulating layer surrounding each of the first fin, the second fin, and the third fins,
forming a second insulating layer surrounding each of the first source/drain area and the second source/drain area on the first insulating layer,
generating contacts on each of the first source/drain area and the second source/drain area,
forming a third insulating layer surrounding the contact on the second insulating layer, and
generating a metal lines electrically connected to the contact.
6 . The fabricating method as claimed in claim 1 , wherein a source/drain defect detection test is performed based on the first source/drain area and the second source/drain area.
7 . The fabricating method as claimed in claim 1 , wherein the covering of the masking material is performed through a photo process.
8 . A fabricating method for a test element group, the fabricating method comprising:
generating a plurality of chip areas on a substrate;
generating a scribe lane area that divides the plurality of chip areas; and
generating test areas in the scribe lane area,
wherein the fabricating of the test areas includes:
forming, on the substrate, a first region and second regions disposed on sides of the first region,
forming a first fin and a second fin on the first region, and forming third fins on the second regions,
covering the second regions with a masking material, and
injecting a gas onto the substrate after covering the second regions to respectively form a first source/drain area and a second source/drain area on the first fin and the second fin,
wherein the gas is not injected onto the third fins so that a source/drain area is not formed on the third fins during fabrication of the test element group, and
wherein, on the first region, the first source/drain area is in contact with the second source/drain area.
9 . The fabricating method as claimed in claim 8 wherein forming the first source/drain area and the second source/drain area comprises performing selective epitaxial growth (SEG).
10 . The fabricating method as claimed in claim 8 , wherein the gas includes a silicon source gas, a germanium source gas, an etching gas, and a carrier gas.
11 . The fabricating method as claimed in claim 8 , wherein the fabricating of the test areas further includes removing the masking material after the gas is injected.
12 . The fabricating method as claimed in claim 11 , wherein the fabricating of the test areas further includes, after the removing of the masking material:
generating a first insulating layer surrounding each of the first fin, the second fin, and the third fins,
forming a second insulating layer surrounding each of the first source/drain area and the second source/drain area,
generating contacts on each of the first source/drain area and the second source/drain area,
forming a third insulating layer surrounding the contacts on the second insulating layer, and
generating a metal line electrically connected to the contacts.
13 . The fabricating method as claimed in claim 8 , wherein a source/drain defect detection test is performed based the first source/drain area and the second source/drain area.
14 . The fabricating method as claimed in claim 8 , wherein the covering of the masking material is performed through a photo process.
15 . A fabricating method for a test element group, the fabricating method comprising:
generating a plurality of chip areas on a substrate;
generating a scribe lane area that divides the plurality of chip areas; and
generating test areas in the scribe lane area,
wherein the fabricating of the test areas includes:
dividing the test areas in which integrated circuits included in the plurality of chip areas are fabricated into a test group area and a masking area,
covering the masking area with a masking material,
injecting a gas onto the test areas such that a plurality of source/drain areas are generated through epitaxial growth only within the test group area, and
the plurality of source/drain areas are in contact with each other.
16 . The fabricating method as claimed in claim 15 , wherein the number of the test group areas is plural.
17 . The fabricating method as claimed in claim 15 , wherein the test group area has a rectangular shape.
18 . The fabricating method as claimed in claim 15 , wherein the test group area has a shape including a curve.
19 . The fabricating method as claimed in claim 15 , wherein source/drain areas of the plurality of source/drain areas are not formed in the masking area.
20 . The fabricating method as claimed in claim 19 , wherein a fin protruding in a first direction on the substrate is formed in the masking area.