Acid for reactive development of metal oxide resists
A method of reactive developing a metal oxide resist includes providing a gaseous weak acid to a surface of a patterned metal oxide resist including an exposed portion and an unexposed portion, the gaseous weak acid having an acidity (pK a ) greater than −2 and less than about 20, and reactive developing the patterned metal oxide resist using a selective acid-base reaction between the gaseous weak acid and the patterned metal oxide resist to form volatile products. The gaseous weak acid acts as the acid and either the exposed portion or the unexposed portion acts as the base.
1 . A method of reactive developing a metal oxide resist (MOR) during a semiconductor manufacturing process, the method comprising:
providing a gaseous weak acid to a surface of a patterned MOR comprising an exposed portion and an unexposed portion, the gaseous weak acid having an acidity (pK a ) greater than −2 and less than about 20, the gaseous weak acid comprising a compound selected from the group consisting of
an alcohol having an organic group comprising a saturated carbon bonded to a hydroxyl group,
an amine having a nitrogen bonded to an organic group and hydrogen, and
a Lewis acid comprising boron and at least one organic substituent from the group consisting of
an alkyl group having the formula C n H 2n+1 with n>1,
an alkoxide group having an alkyl bonded to an oxygen, and
an amide group having a nitrogen bonded to one or two organic substituents; and
reactive developing the patterned MOR using a selective acid-base reaction between the gaseous weak acid and the patterned MOR to form volatile products, the gaseous weak acid acting as the acid and either the exposed portion or the unexposed portion acting as the base.
2 . The method of claim 1 , wherein the compound is an aromatic alcohol having the formula ArO—H with Ar being an aromatic compound.
3 . The method of claim 1 , wherein the compound is the Lewis acid and comprises a boron-hydrogen bond and at least one alkyl group substituent.
4 . The method of claim 1 , wherein reactive developing the patterned MOR comprises reactive developing the patterned MOR in a processing chamber at a pressure greater than about 1 mTorr.
5 . The method of claim 1 , wherein reactive developing the patterned MOR is a thermal process performed in a processing chamber with no plasma generated in the processing chamber.
6 . The method of claim 1 , further comprising:
baking the patterned MOR in a processing chamber, wherein reactive developing the patterned MOR is performed in the same processing chamber.
7 . A method of reactive developing a metal oxide resist (MOR) during a semiconductor manufacturing process, the method comprising:
providing a gaseous developer to a surface of a patterned MOR comprising an exposed portion and an unexposed portion, the gaseous developer comprising an at least partially substituted form of a compound selected from the group consisting of
an alcohol having an organic group comprising a saturated carbon bonded to a hydroxyl group,
an aromatic alcohol having the formula ArO—H with Ar being an aromatic compound, and
an amine having a nitrogen bonded to an organic group and hydrogen; and
reactive developing the patterned MOR using a selective acid-base reaction between the gaseous developer and the patterned MOR to form volatile products, the gaseous developer acting as the acid and either the exposed portion or the unexposed portion acting as the base.
8 . The method of claim 7 , wherein the compound is substituted with a more electronegative substituent.
9 . The method of claim 8 , wherein the more electronegative substituent is a halogen.
10 . The method of claim 7 , wherein the compound is the alcohol at least partially substituted with at least one halogen substituent.
11 . The method of claim 1 , wherein the compound is an at least partially substituted simple alcohol with at least one halogen substituent.
12 . The method of claim 11 , wherein the compound is a fluorinated alcohol.
13 . The method of claim 9 , wherein the compound is an at least partially substituted simple alcohol.
14 . The method of claim 13 , wherein the compound is a fluorinated alcohol.
15 . A method of reactive developing a metal oxide resist (MOR) comprising:
providing a gaseous alcohol having an organic group comprising a saturated carbon bonded to a hydroxyl group to a surface of a patterned MOR comprising an exposed portion and an unexposed portion; and
reactive developing the patterned MOR using a selective acid-base reaction between the gaseous alcohol and the patterned MOR to form volatile products, the gaseous alcohol acting as the acid and either the exposed portion or the unexposed portion acting as the base.
16 . The method of claim 15 , wherein the gaseous alcohol is a simple alcohol.
17 . The method of claim 16 , wherein the simple alcohol is at least partially substituted with at least one halogen substituent.
18 . The method of claim 17 , wherein the simple alcohol is a fluorinated ethanol.
19 . The method of claim 17 , wherein the simple alcohol is a fluorinated propanol.
20 . The method of claim 15 , wherein the gaseous alcohol is an aromatic alcohol having the formula ArO—H with Ar being an aromatic compound.