Method for manufacturing semiconductor light emitting device
The present disclosure relates to a method for manufacturing a semiconductor light emitting device through non-wire bonding, the method comprising the steps of: preparing a semiconductor light emitting die and a support substrate; attaching the semiconductor light emitting die to the support substrate while a second electrical path is exposed, the semiconductor light emitting die being attached such that a conductive bonding structure covering the entire second semiconductor region is tightly bonded to a bonding layer; removing the substrate; and electrically connecting the second electrical path to the remaining semiconductor region among a first semiconductor region and the second semiconductor region through electrical connection through deposition.
1 . A method of manufacturing a semiconductor light-emitting element through non-wire bonding, the method comprising:
providing a semiconductor light-emitting die which is individualized from a wafer state and includes a substrate, a plurality of semiconductor regions (including a first semiconductor region having first conductivity, an active region configured to generate light through recombination of electrons and holes, and a second semiconductor region having second conductivity different from the first conductivity), and a conductive bonding structure electrically connected to one of the first semiconductor region and the second semiconductor region and formed on an entirety of the second semiconductor region;
providing a support substrate which has an upper surface and a lower surface and includes a first electrical path and a second electrical path leading from the upper surface to the lower surface and has a bonding layer configured on the upper surface of the support substrate so as to cover the first electrical path except for the second electrical path;
attaching the semiconductor light-emitting die to the support substrate in a state in which the second electrical path is exposed on the upper surface of the support substrate such that the conductive bonding structure covering the entirety of the second semiconductor region is tightly bonded to the bonding layer;
removing the substrate;
electrically connecting the second electrical path to the other one of the first semiconductor region and the second semiconductor region through deposition using an electrical connection;
prior to the electrically connecting the second electrical path to the other one of the first semiconductor region and the second semiconductor region through deposition, forming a first passivation layer configured to cover the bonding layer through the insulating layer from above the plurality of semiconductor regions; and
prior to the forming of the first passivation layer, performing oxygen (O2) plasma treatment on the bonding layer or performing annealing treatment thereon in an oxygen (O2) atmosphere,
wherein the semiconductor light-emitting die includes an insulating layer, which is exposed after the substrate is removed, between the second semiconductor region and the second conductive layer,
wherein the conductive bonding structure includes a first conductive layer in ohmic contact with the second semiconductor region and a second conductive layer bonded to the bonding layer.
2 . The method of claim 1 , wherein the conductive bonding structure includes:
a third conductive layer in ohmic contact with the first semiconductor region.
3 . The method of claim 1 , wherein the first passivation layer is formed by performing spin coating on a flowable oxide (FOx) material including a SiO2 material.
4 . The method of claim 2 , wherein the first passivation layer is formed by performing spin coating on a flowable oxide (FOx) material including a SiO2 material.