Thin film having single-crystal-level crystal orientation property, method for manufacturing same, and product using same
Proposed are a thin film having an excellent crystal orientation property, a method of manufacturing the same, and a semiconductor device, a battery device, a superconducting wire, and a superconducting article including the thin film. The technical gist of the present disclosure includes a thin film having a single-crystal-level crystal orientation property, which is formed by depositing a polycrystalline second material on an upper portion of a substrate including a polycrystalline first material and which has a crystal orientation property satisfying the following Relational Expression 1 at a grain boundary, a method of manufacturing the same, and a semiconductor device, a battery device, a superconducting wire, and a superconducting article including the thin film. 0°<FWHM 2 ≤3° [Relational Expression 1] (FWHM 2 is a full width at half maximum of a distribution curve of a misorientation angle at the grain boundary of the thin film).
1 . A thin film comprising:
a substrate comprising a polycrystalline first material and
a polycrystalline second material formed on an upper portion of the substrate,
wherein the thin film has a crystal orientation property satisfying a following Relational Expression 1 at a grain boundary:
0°<FWHM 2 ≤3°; [Relational Expression 1]
wherein FWHM 2 is a full width at half maximum of a distribution curve of a misorientation angle at the grain boundary of the thin film,
wherein a size of a crystal grain of the second material formed in the thin film is at least two times as large as a size of a crystal grain of the substrate.
2 . The thin film of claim 1 , wherein the second material is Fe, a Fe alloy, or a Fe-based compound.
3 . The thin film of claim 1 , wherein a crystal orientation property of the substrate and the crystal orientation property of the thin film satisfy a following Relational Expression 2:
5°<FWHM 1 −FWHM 2 ≤20°; [Relational Expression 2]
wherein FWHM 1 and FWHM 2 are a full width at half maximum of a distribution curve of a misorientation angle at a grain boundary of the substrate and at the grain boundary of the thin film, respectively.
4 . The thin film of claim 1 , wherein the first material is a crystalline solid.
5 . A semiconductor device comprising:
the thin film of claim 1 .
6 . A battery device comprising:
the thin film of claim 1 .
7 . A superconducting wire comprising:
a thin film layer which is formed by depositing the thin film of claim 1 on an upper portion of the substrate; and
a superconducting layer formed on an upper portion of the thin film layer.
8 . A superconducting article comprising:
the superconducting wire of claim 7 .