Pressure sensor device having an oscillator including a membrane deformable to ambient differential pressure
A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.
1 . A pressure sensor device comprising:
a base including a joint portion to mount the base; and
an oscillator to oscillate with respect to the base; wherein
the oscillator includes a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode; and
the membrane does not overlap the base in a plan view in a direction orthogonal or substantially orthogonal to the membrane.
2 . The pressure sensor device according to claim 1 , wherein an isolation groove that isolates the base and the oscillator from each other and an elastic coupling portion that elastically couples the base and the oscillator to each other are provided between the base and the oscillator.
3 . The pressure sensor device according to claim 2 , wherein the isolation groove is C-shaped.
4 . The pressure sensor device according to claim 1 , wherein the base is located outside the oscillator.
5 . The pressure sensor device according to claim 1 , wherein the oscillator is located outside the base.
6 . The pressure sensor device according to claim 1 , wherein the oscillator includes a first layer located on a same plane as the base, a second layer fixed to the first layer with a gap therebetween, the second layer including the membrane, and a third layer facing the second layer.
7 . The pressure sensor device according to claim 1 , wherein the oscillator includes a plurality of membranes connected in parallel to each other, the membrane being one of the plurality of membranes.
8 . The pressure sensor device according to claim 1 , wherein the oscillator includes an integrated circuit to process an electric signal generated by deformation of the membrane.
9 . The pressure sensor device according to claim 8 , wherein
the oscillator includes a plurality of via terminals through which electricity is supplied to the integrated circuit and the signal output from the integrated circuit is transmitted;
the base includes a same number of joint portions as the via terminals, the joint portion being one of the joint portions; and
the via terminals and the joint portions are electrically connected to each other by a plurality of conductors.
10 . The pressure sensor device according to claim 8 , wherein the oscillator includes a die on which the integrated circuit is mounted.
11 . The pressure sensor device according to claim 1 , wherein the oscillator includes a capacitor including a facing electrode spaced apart from the membrane to detect a change in an electrostatic capacitance of the capacitor.
12 . The pressure sensor device according to claim 11 , wherein
the oscillator includes a first layer located on a same plane as the base, a second layer fixed to the first layer with a gap therebetween, the second layer including the membrane, and a third layer facing the second layer; and
the facing electrode is provided on the third layer.
13 . The pressure sensor device according to claim 1 , wherein the base includes a plurality of the joint portions.
14 . The pressure sensor device according to claim 1 , wherein the joint portion is defined by a solder ball.
15 . The pressure sensor device according to claim 1 , wherein the oscillator is adjacent to the base.
16 . The pressure sensor device according to claim 1 , further comprising:
a second base; wherein
the oscillator is located between the base and the second base.
17 . The pressure sensor device according to claim 16 , wherein the base and the second base are at two locations along a diagonal of the oscillator.
18 . The pressure sensor device according to claim 16 , wherein the base and the second base are respectively located on left and right sides of the oscillator.