Semiconductor die package
A semiconductor die package includes a semiconductor transistor die having a contact pad on an upper main face. The semiconductor die package also includes an electrical conductor disposed on the contact pad and fabricated by laser-assisted structuring of a metallic material, and an encapsulant covering the semiconductor die and at least a portion of the electrical conductor.
1 . A semiconductor die package, comprising:
a semiconductor transistor die, the semiconductor transistor die comprising a contact pad on an upper main face;
an electrical conductor disposed on the contact pad, the electrical conductor comprising a laser irradiated metallic material that forms a uniform and coherent block; and
an encapsulant covering the semiconductor die and at least a portion of the electrical conductor.
2 . The semiconductor die package of claim 1 , further comprising:
a die carrier,
wherein the semiconductor die is disposed on the die carrier.
3 . The semiconductor die package of claim 1 , wherein
the electrical conductor is directly connected with the contact pad with no further layer in between.
4 . The semiconductor die package of claim 1 , wherein a barrier layer is disposed between the contact pad and the upper main face of the semiconductor die.
5 . The semiconductor die package of claim 4 , wherein the barrier layer comprises one of Ti, TiN, Ta, TaN, TiW, and W or a stack of any of Ti, TiN, Ta, TaN, TiW, and W.
6 . The semiconductor die package of claim 1 , wherein
the semiconductor die is one or more of a wide bandgap semiconductor die, a SiC die, or a GaN die.
7 . The semiconductor die package of claim 1 , wherein
the semiconductor transistor die is a power IGBT die, or a power MOSFET die, or a thyristor die.
8 . The semiconductor die package of claim 1 , wherein an upper surface of the electrical conductor is at least in part not covered by the encapsulant.
9 . The semiconductor die package of claim 8 , further comprising a heatsink applied to the upper surface of the metallic structure.
10 . The semiconductor die package of claim 1 , further comprising:
a further contact pad on the second main face of the semiconductor transistor die; and
an electrical conductor on the further contact pad and fabricated by laser-assisted structuring of metallic structures.
11 . The semiconductor die package of claim 1 , wherein a portion of the electrical conductor extends beyond a side face of the encapsulant.
12 . The semiconductor die package of claim 11 , wherein the portion of the electrical conductor that extends beyond the side face of the encapsulant is homogeneous with a portion of the electrical conductor within the encapsulant and fabricated by the same laser-assisted structuring of the metallic material.
13 . The semiconductor die package of claim 11 , wherein the portion of the electrical conductor that extends beyond the side face of the encapsulant is fabricated from a different metallic material than a portion of the electrical conductor within the encapsulant.
14 . The semiconductor die package of claim 1 , wherein the electrical conductor comprises a first portion formed directly on the contact pad, a second portion adjoining the second portion and having a clip-like structure, and a third portion forming an external contact.
15 . The semiconductor die package of claim 14 , wherein both the first portion and the second portion are fabricated by the laser-assisted structuring of the metallic material, and wherein the third portion is part of a leadframe.
16 . The semiconductor die package of claim 1 , wherein the electrical conductor comprises a first contiguous portion, a lattice portion on the first contiguous portion, and a further contiguous portion on the lattice portion, and wherein the metallic material does not fill the entire space in the lattice portion.
17 . The semiconductor die package of claim 16 , wherein the lattice portion comprises a crisscrossed pattern of strips or bars of the metallic material.
18 . The semiconductor die package of claim 1 , further comprising:
a first contact pad on a lower main face of the semiconductor transistor die; and
a backside electrical conductor disposed on the first contact pad, the backside electrical conductor comprising a laser irradiated metallic material that forms a uniform and coherent block.