Robot
A robot includes a robot arm and a hand. The hand includes a first hand and a second hand arranged on or above the first hand. At least one of the first hand and the second hand has an airtight hollow hand space.
1 . A robot comprising:
a robot arm; and
a hand arranged in a distal end part of the robot arm, wherein
the hand includes a first hand, and a second hand arranged on or above the first hand and operating independently of the first hand,
the first hand includes an airtight hollow first hand space,
a first sensor is arranged in the first hand space,
the robot is used in a vacuum atmosphere,
the first hand space is airtight in an atmospheric pressure state, and
the first sensor includes a first part arranged inside the airtight first hand space and a second part arranged outside the airtight first hand space.
2 . The robot according to claim 1 , wherein
the second hand includes an airtight hollow second hand space.
3 . The robot according to claim 2 further comprising a second sensor arranged in the second hand space.
4 . The robot according to claim 1 , wherein the first sensor includes at least one of a distance sensor and a vision sensor.
5 . The robot according to claim 1 further comprising
a shaft element supporting the first hand, the second hand, and the robot arm, wherein
the robot arm includes an airtight hollow arm space; and
the shaft element includes a through hole connecting the first hand space to the arm space.
6 . The robot according to claim 5 ,
wherein
a wire extending from the first sensor is arranged to extend from the first hand space through the through hole of the shaft element to the arm space.
7 . The robot according to claim 5 , wherein
the second hand includes an airtight hollow second hand space; and
the through hole of the shaft element includes
a first through hole connecting the arm space to the second hand space, and
a second through hole connecting the first through hole to the first hand space.
8 . The robot according to claim 7 further comprising:
a first space seal arranged between the first hand and the shaft element to airtightly seal the first hand space;
a second space seal arranged between the second hand and the shaft element to airtightly seal the second hand space; and
an arm seal arranged between the robot arm and the shaft element to airtightly seal the arm space.
9 . The robot according to claim 5 further comprising:
a first bearing arranged between the robot arm and the shaft element; and
a second bearing arranged between the first hand and the shaft element.
10 . The robot according to claim 1 , wherein
the first hand includes
a housing body including an opening,
a lid closing the opening of the housing body, and
a lid seal sealing the housing body and the lid; and
the housing body, the lid and the lid seal make the first hand space airtight.
11 . The robot according to claim 1 , wherein the first hand is a substrate-holding hand for holding a substrate.
12 . The robot according to claim 2 , wherein
the second hand space is airtight in an atmospheric pressure state.