Analysis device
An analysis device includes a substrate including a first surface, and a second surface positioned at a side opposite to the first surface; a light source part located at the first surface of the substrate, the light source part including a quantum cascade laser; a light detector located at the first surface of the substrate; and a wiring part located at the first surface of the substrate, the wiring part being electrically connected with the light source part and the light detector.
1 . An analysis device, comprising:
a substrate including
a first surface, and
a second surface positioned at a side opposite to the first surface;
a light source part located at the first surface of the substrate, the light source part including a quantum cascade laser;
a light detector located at the first surface of the substrate; and
a wiring part located at the first surface of the substrate, the wiring part being electrically connected with the light source part and the light detector,
wherein the substrate is transmissive to a laser light emitted by the quantum cascade laser,
a laser light emitted by the quantum cascade laser travels through the substrate toward the second surface and is emitted outside the substrate from the second surface, and
the light detector receives a reflected light of the laser light incident on the second surface of the substrate from the outside.
2 . The device according to claim 1 , wherein the quantum cascade laser is surface-emitting and includes a photonic crystal layer.
3 . The device according to claim 1 , wherein the light detector includes a quantum cascade detector.
4 . The device according to claim 1 , wherein the light detector includes a metal antenna.
5 . The device according to claim 1 , wherein
the light source part includes a first quantum cascade laser and a second quantum cascade laser, and
the first quantum cascade laser and the second quantum cascade laser have different oscillation wavelengths.
6 . The device according to claim 1 , wherein the substrate includes Si, InP, or GaAs.
7 . The device according to claim 1 , wherein the substrate includes a lens portion at the second surface.
8 . An analysis device, comprising:
a substrate including
a first surface, and
a second surface positioned at a side opposite to the first surface;
a quantum cascade element located at the first surface of the substrate, the quantum cascade element being used as a light source part and a light detector; and
a wiring part located at the first surface of the substrate, the wiring part being electrically connected with the quantum cascade element,
wherein the substrate is transmissive to a laser light emitted by the quantum cascade element,
a laser light emitted by the quantum cascade element travels through the substrate toward the second surface and is emitted outside the substrate from the second surface, and
the quantum cascade element receives a reflected light of the laser light incident on the second surface of the substrate from the outside.
9 . The device according to claim 8 , wherein the quantum cascade element is surface-emitting/receiving and includes a photonic crystal layer.
10 . The device according to claim 8 , wherein the substrate includes Si, InP, or GaAs.
11 . The device according to claim 8 , wherein the substrate includes a lens portion at the second surface.