Integrated detector device and method of manufacturing an integrated detector device
An integrated detector device for direct detection of X-ray photons includes a CMOS body including a substrate portion and a dielectric portion arranged on a main surface of the substrate portion, an integrated circuit in the CMOS body having implants at or above the main surface for forming charge collectors, and a metal structure in the dielectric portion that extends from the charge collectors to a contact surface of the dielectric portion facing away from the substrate portion. The device further includes an absorber portion arranged on the contact surface of the dielectric portion, the absorber portion including an absorber element that is in electrical contact with the metal structure, and an electrode structure that is in direct contact with the absorber element forming an electrical contact. The absorber element is configured to absorb X-ray photons and generate electrical charges based on the absorbed X-ray photons.
1 . An integrated detector device for direct detection of X-ray photons, the integrated detector device comprising:
a CMOS body comprising a substrate portion and a dielectric portion arranged on a main surface of the substrate portion;
an integrated circuit in the CMOS body having implants at or above the main surface for forming charge collectors;
a metal structure in the dielectric portion that extends from the charge collectors to a contact surface of the dielectric portion facing away from the substrate portion;
an absorber portion arranged on the contact surface of the dielectric portion, the absorber portion comprising an absorber element that is in electrical contact with the metal structure; and
an electrode structure that is in direct contact with the absorber element forming an electrical contact, wherein
the absorber element is configured to absorb X-ray photons and generate electrical charges based on the absorbed X-ray photons;
a material of the absorber element is a metal-halide perovskite, in particular, an inorganic metal-halide perovskite such as CsPbBr 3 , and
the metal structure is either a via structure or a metallization level present in the backend-of-line, and/or a material of the metal structure at the contact surface is a catalyst acting as a nucleation site of a material of the absorber element or its educts.
2 . The integrated detector device according to claim 1 , wherein the integrated detector device is a monolithic semiconductor device.
3 . The integrated detector device according to claim 1 , wherein a material of the metal structure at the contact surface is a catalyst with respect to a reaction educt of a material of the absorber element.
4 . The integrated detector device according to claim 1 , wherein the absorber element is in direct physical contact with the contact surface.
5 . The integrated detector device according to claim 1 , wherein the absorber portion further comprises a passivation that at least partially surrounds the absorber element and an electrode of the electrode structure is arranged on a surface of the passivation facing away from the contact surface.
6 . The integrated detector device according claim 1 , wherein
the contact surface comprises first bond pads and the absorber portion comprises a bonding surface having second bond pads that are in electrical contact with the absorber element; and
the first bond pads are bonded to the second bond pads via a direct bonding process.
7 . The integrated detector device according to claim 1 , wherein the integrated detector device is free of connecting elements such as solder bumps between the CMOS body and the absorber portion.
8 . The integrated detector device according to claim 1 , wherein the integrated detector device is free of CdTe and CdZnTe.
9 . A method of manufacturing an integrated detector device for direct detection of X-ray photons, the method comprising:
forming a CMOS body by arranging a dielectric portion on a main surface of a substrate portion;
forming an integrated circuit in the CMOS body having implants at or above the main surface for forming charge collectors;
forming a metal structure in the dielectric portion that extends from the charge collectors to a contact surface of the dielectric portion facing away from the substrate portion;
arranging an absorber portion on the contact surface of the dielectric portion by forming an absorber element that is in electrical contact with the metal structure;
providing an electrode structure that is in direct contact with the absorber element forming an electric contact, wherein
the absorber element is configured to absorb X-ray photons and generate electrical charges based on the absorbed X-ray photons; and
a material of the absorber element is a metal-halide perovskite, in particular an inorganic metal-halide perovskite such as CsPbBr 3 ; and
forming the metal structure comprises providing a via structure having a top via made of tungsten at the contact surface, and/or forming the absorber element comprises patterning, structuring and/or polishing of a material of the absorber element.
10 . The method according to claim 9 , wherein
arranging the absorber portion further comprises forming a passivation that at least partially surrounds the absorber element; and
providing the electrode structure comprises arranging an electrode on a surface of the passivation facing away from the contact surface.
11 . The method according to claim 9 , wherein arranging the absorber portion comprises growing, in particular selectively growing, a material of the absorber element on the contact surface, wherein a region of the metal structure at the contact surface acts as a nucleation site.
12 . The method according to claim 9 , wherein arranging the absorber portion comprises performing a direct bonding process between the absorber portion and the CMOS body.
13 . The method according to claim 9 , wherein the manufacturing method is a fully CMOS compatible process.
14 . The method according to claim 9 , wherein arranging the absorber portion comprises
depositing a dielectric layer on the contact surface;
patterning and structuring the dielectric layer to form a trench within the dielectric layer; and
depositing the absorber element within the trench.
15 . The method according to claim 9 , wherein a material of the metal structure at the contact surface is a catalyst acting as a nucleation site of a material of the absorber element or its educts.
16 . An integrated detector device for direct detection of X-ray photons, the integrated detector device comprising:
a CMOS body comprising a substrate portion and a dielectric portion arranged on a main surface of the substrate portion;
an integrated circuit in the CMOS body having implants at or above the main surface for forming charge collectors;
a metal structure in the dielectric portion that extends from the charge collectors to a contact surface of the dielectric portion facing away from the substrate portion;
an absorber portion arranged on the contact surface of the dielectric portion, the absorber portion comprising an absorber element that is in electrical contact with the metal structure; and
an electrode structure that is in direct contact with the absorber element forming an electrical contact, wherein
the absorber element is configured to absorb X-ray photons and generate electrical charges based on the absorbed X-ray photons,
a material of the absorber element is a metal-halide perovskite, in particular, an inorganic metal-halide perovskite such as CsPbBr 3 , and
the absorber portion further comprises a passivation that at least partially surrounds the absorber element and an electrode of the electrode structure is arranged on a surface of the passivation facing away from the contact surface.