Granted Patent B2

US 12,631,396 · App. 18/120,981 · Granted May 19, 2026

Inventors: Hae-Won Choi (Daejeon, KR); Jae Seong Lee (Hwaseong-si, KR); Hong Chan Cho (Goyang-si, KR)

Assignee: SEMES CO., LTD.

F26B25/066F26B5/005

Abstract

Claims (90)

1 . A substrate treating apparatus comprising:

a first chamber having a supply port for supplying a treating fluid;

a second chamber coupled to the first chamber, wherein the first chamber and the second chamber are coupled with each other to define a treating space;

a support member configured to support a substrate in the treating space; and

a baffle unit installed in the first chamber to face the supply port of the first chamber, and

wherein the baffle unit includes:

a first baffle assembly including a first baffle having first holes through which the treating fluid flows; and

a second baffle assembly installed at a position farther from the supply port of the first chamber than the first baffle assembly, and including a second baffle having second holes through which the treating fluid flows.

2 . The substrate treating apparatus of claim 1 ,

wherein a diameter of the first baffle is smaller than a diameter of the second baffle.

3 . The substrate treating apparatus of claim 2 ,

wherein the first baffle and the second baffle are installed spaced apart from each other to define a buffer space therebetween.

4 . The substrate treating apparatus of claim 1 ,

wherein at least a portion of the second holes do not overlap the first holes in an ejecting direction of the treating fluid from the supply port.

5 . The substrate treating apparatus of claim 1 ,

wherein the first baffle assembly comprises:

a base plate spaced apart from a lower surface of the first chamber;

a fixing means connecting the base plate to the first chamber; and

a plurality of baffles placed on the base plate, and

wherein the plurality of baffles include the first baffle.

6 . The substrate treating apparatus of claim 5 ,

wherein the plurality of baffles are stacked on each other, and

wherein the base plate includes at least one support protrusion protruding from an inner surface of the base plate, and

wherein at least one baffle of the plurality of baffles includes at least one mounting groove into which the at least one support protrusion of the base plate is inserted.

7 . The substrate treating apparatus of claim 1 ,

wherein the first baffle assembly comprises:

a fixing ring fixed to the first chamber; and

a plurality of baffles placed on the fixing ring, and

wherein the plurality of baffles include the first baffle.

8 . The substrate treating apparatus of claim 1 ,

wherein the second baffle assembly comprises:

a gap ring installed between the first chamber and the second baffle, and

wherein the second baffle is fastened to the gap ring.

9 . The substrate treating apparatus of claim 1 ,

wherein an inner diameter of each of the first holes is different from an inner diameter of each of the second holes.

10 . The substrate treating apparatus of claim 9 ,

wherein the inner diameter of each of the first holes is larger than the inner diameter of each of the second holes.

11 . The substrate treating apparatus of claim 1 ,

wherein the first holes include a hole with a diameter selected from a range of about 1 mm to about 5 mm, and

wherein the second holes include a hole with a diameter selected from a range of about 0.5 mm to about 1 mm.

12 . The substrate treating apparatus of claim 1 ,

wherein the first chamber includes:

an accommodation space in which the first baffle assembly is installed; and

a buffer space between a lower surface of the first baffle assembly and an upper surface of the second baffle.

13 . The substrate treating apparatus of claim 12 ,

wherein the first chamber further includes:

a first lower surface defining the accommodation space and having a first inclined angle with respect to a horizontal plane; and

a second lower surface defining the buffer space and having a second inclined angle with respect to the horizontal plane, and wherein the first inclined angle is greater than the second inclined angle.

14 . The substrate treating apparatus of claim 12 ,

wherein a depth of the accommodation space is deeper than a depth of the buffer space.

15 . A drying apparatus for used in drying a substrate with a treating fluid remaining thereon, the drying apparatus comprising:

a top chamber having a supply port for supplying the treating fluid;

a bottom chamber coupled to the top chamber, wherein the top chamber and the bottom chamber are coupled with each other to define a treating space;

a lifting/lowering unit configured to lift/lower any one of the top chamber and the bottom chamber;

a fluid supply unit configured to supply the treating fluid to the supply port;

a support member for supporting the substrate in the treating space; and

a baffle unit installed in the top chamber to face the supply port of the top chamber, and

wherein the baffle unit includes:

a first baffle having first holes through which the treating fluid flows; and

a second baffle spaced apart from and below the first baffle and having second holes through which the treating fluid flows, and

wherein the first baffle and the second baffle define a buffer space for diffusing the treating fluid supplied by the fluid supply unit.

16 . The drying apparatus of claim 15 ,

wherein an inner diameter of each of the first holes is larger than an inner diameter of each of the second holes.

17 . The drying apparatus of claim 15 ,

wherein a diameter of the first baffle is larger than a diameter of the second baffle.

18 . The drying apparatus of claim 15 ,

wherein the top chamber includes:

an accommodation space in which the first baffle is installed, the accommodation space being positioned more adjacent to the supply port than the buffer space, and a depth of the accommodation space being deeper than a depth of the buffer space;

a first lower surface defining the accommodation space and having a first inclined angle with respect to a horizontal plane; and

a second lower surface defining the buffer space and having a second inclined angle with respect to the horizontal plane, and wherein the first inclined angle is greater than the second inclined angle.

19 . The drying apparatus of claim 18 ,

wherein a diameter of the buffer space is larger than a diameter of the accommodation space in a horizonal direction.

20 . A substrate treating apparatus comprising:

a liquid treating apparatus for liquid treating a substrate with a treating liquid; and

a drying apparatus for dry treating the substrate which has been treated at the liquid treating apparatus with a treating fluid in a supercritical state, and

wherein the drying apparatus comprises:

a top chamber having a supply port for supplying the treating fluid;

a bottom chamber in combination with the top chamber defining a treating space;

a clamping unit configured to clamp the top chamber and the bottom chamber when forming the treating space by combining the top chamber and the bottom chamber;

a lifting/lowering unit configured to lift/lower the bottom chamber to change a distance between the top chamber and the bottom chamber;

a fluid supply unit configured to supply the treating fluid to the supply port;

a support member installed in the top chamber and supporting the substrate to face the supply port; and

a baffle unit installed in the top chamber to face the support member, and

wherein the top chamber is provided with:

an accommodation space; and

a buffer space below the accommodation space, and

wherein the baffle unit comprises:

first baffles stacked on each other and installed in the accommodation space, each baffle having first holes; and

a second baffle installed spaced apart from the first baffles and separating the buffer space and the treating space, and the second baffle having second holes and

wherein a diameter of the second baffle is larger than a diameter of one of the first baffles.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (26)