Multimass MEMS gyroscope featuring orthogonal arrangement
The present invention provides a multimass MEMS gyroscope featuring an orthogonal arrangement, which comprises an anchor point unit, a sensing unit and a driving unit; the anchor point unit comprises a central anchor point subunit located at the center of a rectangle and four corner anchor points located at the four corners of the rectangle respectively; the sensing unit comprises four detection mass blocks each of which has a frame structure and is elastically connected between the central anchor point subunit and the corresponding corner anchor point, receding spaces being formed between the detection mass blocks, and four detection decoupling parts; and the driving unit comprises four driving mass blocks, and driving decoupling parts. The gyroscope can improve the arrangement area of transducers and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the gyroscope.
1 . A multimass MEMS gyroscope featuring an orthogonal arrangement, comprising an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit elastically connected to the anchor point unit and the sensing unit, wherein
the anchor point unit comprises a central anchor point subunit located at a center of a rectangle and four corner anchor points located at four corners of the rectangle respectively;
the sensing unit comprises four detection mass blocks each of which has a frame structure and is elastically connected between the central anchor point subunit and the corner anchor point closer to the detection mass block, receding spaces being formed between the detection mass blocks, and four detection decoupling parts located in the frame structures of the detection mass blocks respectively and elastically connected to the detection mass blocks correspondingly; and
the driving unit comprises four driving mass blocks respectively located in the receding spaces, and driving decoupling parts elastically connected to the driving mass blocks respectively, the driving mass blocks being located in the rectangle and elastically connected to the adjacent detection mass blocks;
wherein the central anchor point subunit comprises a coupling ring located at the center of the rectangle and a central anchor point arranged around the coupling ring;
wherein the driving decoupling parts comprise four first driving decoupling parts respectively located outside the driving mass blocks, and the rectangle is enclosed by the four first driving decoupling parts;
wherein four center lines of the rectangle are formed by the lines connecting the center of the four first driving decoupling parts to the center of the rectangle and the four driving mass blocks are adjacent to the center of the four first driving decoupling parts respectively.
2 . The multimass MEMS gyroscope according to claim 1 , wherein the driving decoupling parts further comprise second driving decoupling parts located between the driving mass blocks and the coupling ring, the first driving decoupling parts are located outside the rectangle, and a four first transducer is are arranged respectively on a side of each of the first drive decoupling member opposite to the central anchor point.
3 . The multimass MEMS gyroscope according to claim 2 , wherein an outer wall of the coupling ring extends toward the four driving mass blocks in the direction of the four center lines of the rectangle to form four first flexible beams respectively connected to the second driving decoupling parts, the driving mass blocks extend toward the central anchor point in the direction of the four center lines of the rectangle to form second flexible beams connected to the second driving decoupling parts correspondingly, and two ends of each of the second driving decoupling part extend in a direction perpendicular to the first flexible beams and the second flexible beams to form first elastic beams connected to the central anchor point.
4 . The multimass MEMS gyroscope according to claim 2 , wherein an outer wall of a side, closer to the central anchor point, of each of the first driving decoupling part extends towards the central anchor point to form a first guide beam, and an end, closer to the central anchor point, of the first guide beam is connected to the driving mass block.
5 . The multimass MEMS gyroscope according to claim 2 , wherein two ends of each of the first driving decoupling part extend toward the central anchor point to form third elastic beams connected to the adjacent corner anchor points.
6 . The multimass MEMS gyroscope according to claim 5 , wherein the anchor point unit further comprises decoupling anchor points located inside the frame structures of the detection mass blocks and arranged adjacent to the detection decoupling parts, an outer wall of each of the detection decoupling part extends in a direction perpendicular to a corresponding diagonal of the rectangle to form a fourth elastic beam connected to the decoupling anchor point, and the outer wall of each of the detection decoupling part extends in the direction of the corresponding diagonal of the rectangle to form a fifth elastic beam connected to an inner wall of the corresponding detection mass block.
7 . The multimass MEMS gyroscope according to claim 2 , wherein the detection decoupling part has a frame structure in which a second transducer is embedded, and the driving mass block has a frame structure in which an orthogonal suppression electrode is embedded.
8 . The multimass MEMS gyroscope according to claim 1 , wherein the coupling ring extends toward the four detection mass blocks to form four second connecting beams respectively connected to the four detection mass blocks, and each of the second connecting beam comprises a third flexible beam connecting the detection mass block with the coupling ring in a diagonal direction of the rectangle, and a second elastic beam extending from an end, closer to the coupling ring, of the third flexible beam in a circumferential direction of the coupling ring and connected to an inner wall of the coupling ring.
9 . The multimass MEMS gyroscope according to claim 1 , wherein coupling structures are connected between the driving mass blocks and the adjacent detection mass blocks to realize elastic connection.