Optical inspection device and optical inspection method
An optical inspection device includes an optical measurement unit, a first probe under the optical measurement unit and configured to supply a first voltage, a base frame under the optical measurement unit and spaced from the first probe, and a second probe on a surface of the base frame facing the first probe, configured to supply a second voltage different from the first voltage, and having a plate shape in a plan view.
1 . An optical inspection device comprising:
an optical measurement unit;
a first probe spaced from the optical measurement unit and configured to supply a first voltage;
a base frame under the optical measurement unit and spaced from the first probe; and
a second probe on a surface of the base frame proximate the first probe, the base frame being interposed between the optical measurement unit and the second probe, the second probe being configured to supply a second voltage different from the first voltage, and having a plate shape in a plan view.
2 . The optical inspection device of claim 1 , wherein the base frame is located closer to the optical measurement unit than the first probe is, the base frame comprising a transparent material.
3 . The optical inspection device of claim 2 , wherein the base frame comprises a transparent elastomer.
4 . The optical inspection device of claim 3 , further comprising a sensor unit configured to sense deformation of the base frame.
5 . The optical inspection device of claim 2 , wherein the base frame comprises a transparent glass substrate.
6 . The optical inspection device of claim 2 , wherein the second probe comprises a transparent conductive material.
7 . The optical inspection device of claim 6 , wherein the second probe comprises a plurality of sub-probes spaced from each other.
8 . The optical inspection device of claim 2 , further comprising:
a first probe driver configured to drive the first probe; and
a second probe driver configured to drive the second probe.
9 . The optical inspection device of claim 8 , further comprising:
a stage under the second probe and configured to have an object to be inspected placed on a surface facing the second probe; and
a distance measurement unit configured to measure a distance between the object to be inspected and the second probe.
10 . The optical inspection device of claim 9 , further comprising a temperature control unit under the stage.
11 . The optical inspection device of claim 9 , wherein the object to be inspected comprises a light emitting element structure comprising:
a base substrate;
a first semiconductor connection layer on the base substrate; and
a plurality of light emitting elements on the first semiconductor connection layer,
wherein the first probe is configured to contact the first semiconductor connection layer, and the second probe is configured to contact an end surface of at least one of the plurality of light emitting elements.
12 . The optical inspection device of claim 1 , wherein the second probe comprises a conductive elastomer.
13 . The optical inspection device of claim 12 , further comprising a sensor unit configured to measure a resistance of the second probe.
14 . An optical inspection method of a light emitting element structure using an optical measurement unit, the light emitting element structure comprising a base substrate, a first semiconductor connection layer on the base substrate, and a plurality of light emitting elements on the first semiconductor connection layer and spaced from each other, the method comprising:
bringing a first probe in contact with the first semiconductor connection layer and bringing a second probe in contact with an end surface of at least one of the plurality of light emitting elements;
transmitting electrical signals to the first probe and the second probe; and
inspecting light emitted from the at least one of the plurality of light emitting elements,
wherein the second probe is on a surface of a base frame proximate the first probe, the base frame being interposed between the optical measurement unit and the second probe.
15 . The optical inspection method of claim 14 , wherein each of the plurality of light emitting elements comprises:
a first semiconductor layer protruding from the first semiconductor connection layer;
a second semiconductor layer spaced from the first semiconductor layer; and
a light emitting layer interposed between the first semiconductor layer and the second semiconductor layer,
wherein the first semiconductor layer, the light emitting layer, and the second semiconductor layer are sequentially stacked in a direction perpendicular to a surface of the base substrate.
16 . The optical inspection method of claim 14 , wherein a first probe driver is configured to move the first probe to contact the first semiconductor connection layer, and a second probe driver is configured to move the second probe to contact the end surface of the at least one of the plurality of light emitting elements.
17 . The optical inspection method of claim 16 , wherein the bringing of the second probe into contact with the end surface of the at least one of the plurality of light emitting elements comprises:
moving the second probe using the second probe driver;
determining whether the second probe is in contact with the end surface of the at least one of the plurality of light emitting elements; and
stopping the movement of the second probe in case that it is determined that the second probe is in contact with the end surface of the at least one of the plurality of light emitting elements.
18 . The optical inspection method of claim 17 , wherein the determining of whether the second probe is in contact with the end surface of the at least one of the light emitting elements is performed using a distance measurement unit, and
wherein the distance measurement unit is configured to measure a distance between the second probe and the end surface of the at least one of the light emitting elements.
19 . The optical inspection method of claim 17 , wherein the second probe comprises a conductive elastomer, and
the determining of whether the second probe is in contact with the end surface of the at least one of the plurality of light emitting elements is performed using a sensor unit configured to sense pressure applied to the second probe.
20 . The optical inspection method of claim 16 , wherein the second probe has a plate shape in a plan view, and
wherein the bringing of the second probe to contact with the end surface of the at least one of the plurality of light emitting elements comprises placing the second probe to cover the end surface of the at least one of the plurality of light emitting elements.