Load-bearing device, wafer transfer device, chamber device and wafer processing apparatus
View Patent ↗The present disclosure provides a load-bearing device telescopic relative to a reference object, a wafer transfer device, a chamber device which is configured to exchange wafers between different pressure environments, and a wafer processing apparatus, the load-bearing device including a base, a movable platform opposite to the base, an ejector rod which is configured to extend through a bearing secured to the base and is coupled to the movable platform, and a driving member which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base. The bearing device further includes a corrugated tube assembly, surrounding the ejector rod and includes a first corrugated tube sleeved on the ejector rod, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space.
1 . A load-bearing device, which is telescopic relative to a reference object, comprising:
a base;
a movable platform, opposite to the base;
an ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform; and
a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface.
2 . The load-bearing device according to claim 1 , wherein the second space communicates, through a gas channel formed to penetrate through the base, with a pressure environment at a side of the movable platform facing away from the base.
3 . The load-bearing device according to claim 1 , wherein the second space communicates, through a gas channel formed to penetrate through the base, with a gas pressure source whose internal gas pressure is adjustable.
4 . The load-bearing device according to claim 1 , wherein the area of the second surface is not greater than an area of the first surface.
5 . The load-bearing device according to claim 1 , wherein the external tube is an external corrugated tube sleeved over and surrounding the first corrugated tube.
6 . The load-bearing device according to claim 1 , wherein the corrugated tube assembly is made of a metallic material selected from a group consisting of the following: nickel, nickel alloy, stainless steel, titanium, titanium alloy, and a combination thereof.
7 . The load-bearing device according to claim 1 , wherein the driving member comprises a prime motor, which comprises one of following: a linear stepper motor with a trapezoidal lead-screw device, and at least one piezoelectric actuator.
8 . The load-bearing device according to claim 7 , wherein the driving member further comprises a displacement-amplifying mechanism, which is coupled between the prime motor and the ejector rod and driven by the prime motor, and is configured to output a displacement amount thereof, which is larger than a displacement amount of the prime motor, at an end thereof connecting with the ejector rod, along a first direction in which the ejector rod extends.
9 . The load-bearing device according to claim 8 , wherein the displacement-amplifying mechanism comprises at least one of following: a linkage mechanism, and a leverage mechanism.
10 . The load-bearing device according to claim 9 , wherein the linkage mechanism is provided with components symmetrically arranged, whose displacements cancel each other out in opposite directions in a plane orthogonal to the first direction, such that the displacement-amplifying mechanism has a degree of freedom of moving in the first direction at the end being unconstrained and other degrees of freedom thereof at the end being substantially constrained.
11 . The load-bearing device according to claim 10 ,
wherein the prime motor comprises two piezoelectric actuators arranged in a second direction orthogonal to the first direction, and
wherein the linkage mechanism comprises:
a connecting member, coupled to the ejector rod along the first direction;
a crossbar extending in the second direction and connected at a middle portion thereof with the connecting member; and
two motion reversing mechanisms which are arranged symmetrically on both sides in a lateral direction of the connecting member and are coupled with the two piezoelectric actuators in transmission relationship therewith in one-to-one correspondence, respectively, each of the motion reversing mechanisms comprising:
a pair of elongated deformable members, symmetrically arranged on both sides of a respective piezoelectric actuator in the first direction and respectively telescopic in the second direction by deforming at respective middle portions, wherein a middle portion of one elongated deformable member in the pair is coupled to the crossbar and a middle portion of the other elongated deformable member in the pair is fixed relative to the reference object; and
two connectors, the pair of elongated deformable members being respectively connected at respective proximal ends with respect to the connecting member to one end of the respective piezoelectric actuator via one of the two connectors, and respectively connected at respective distal ends with respect to the connecting member to the other opposite end of the respective piezoelectric actuator via another one of the two connectors.
12 . The load-bearing device according to claim 9 , wherein the linkage mechanism has components being arranged such that the displacement-amplifying mechanism has a degree of freedom of moving in the first direction at the end being unconstrained and other degrees of freedom thereof at the end being substantially constrained.
13 . The load-bearing device according to claim 12 , wherein the prime motor comprises the at least one piezoelectric actuator, the linkage mechanism is constructed in a form of a frame and comprises a fixed portion which is fixed with respect to the reference object and a movable portion which is displaceable in the first direction, as well as a coupling portion provided between the fixed portion and the movable portion, with one end of the at least one piezoelectric actuator being hinged in a pivotable manner to the fixed portion of the frame and the other opposite end of the at least one piezoelectric actuator being attached to the movable portion of the frame, the at least one piezoelectric actuator being provided at an angle between 2° and 45° with respect to a second direction orthogonal to the first direction.
14 . A wafer transfer device, comprising:
a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, the load-bearing device being telescopic relative to a reference object and comprising:
a base;
a movable platform, opposite to the base;
the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform; and
a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
a second carrier stage, which is also liftable vertically; and
an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
a rotary shaft which is vertically suspended; and
a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions.
15 . The wafer transfer device according to claim 14 ,
wherein each of the supporting portions comprises at least one plate-shaped supporting member perpendicular to the vertical axis, with a minimum distance between respective supporting members of the two supporting portions being larger than a minimum distance between edges of respective top surfaces of the first carrier stage and the second carrier stage, and with a maximum distance between the respective supporting members of the two supporting portions being smaller than a maximum distance between the edges of the respective top surfaces of the first carrier stage and the second carrier stage, and
wherein each of the supporting members is arranged to be not in contact with each of the first carrier stage and the second carrier stage when the rotary arm rotates around the vertical axis.
16 . The wafer transfer device according to claim 15 , wherein, the wafer transfer device is configured such that:
the respective top surfaces of the first carrier stage and the second carrier stage are flush with each other, when the rotary arm is rotated to a first position where the longitudinal axis of the rotary arm is perpendicular to a first plane defined collectively by respective axes of the first carrier stage and the second carrier stage;
the longitudinal axis is coplanar with the first plane, and the first carrier stage and the second carrier stage are lowered such that the respective top surfaces of the first carrier stage and the second carrier stage are located lower than respective upper portions of the two supporting portions, when the rotary arm is rotated to a second position by rotating 90 degrees from the first position; and
the longitudinal axis is coplanar with the first plane defined collectively by the respective axes of the first carrier stage and the second carrier stage, and the first carrier stage and the second carrier stage are elevated such that the respective top surfaces of the first carrier stage and the second carrier stage are located higher than the respective upper portions of the two supporting portions, when the rotary arm is rotated to a third position by rotating 180 degrees from the second position.
17 . The wafer transfer device according to claim 16 ,
wherein, the two supporting portions are of planar construction, respectively, and are constructed to be two curved plate-shaped supporting members extending to two sides of the body opposite to each other, respectively, in a supporting plane perpendicular to the vertical axis, each of the plate-shaped supporting members being provided with an upper surface perpendicular to the vertical axis.
18 . A chamber device configured to exchange a first wafer and a second wafer between different pressure environments, the chamber device comprising:
a first housing, defining an interior vacuum chamber delimited therein as a first pressure environment and defining an outside of the first housing as a second pressure environment, the first housing being further provided with an opening communicating between the first pressure environment and the second pressure environment; and
a wafer transfer device, which is provided inside the vacuum chamber and comprises:
a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, with the first carrier stage being arranged to at least partially overlap with the opening, the load-bearing device being telescopic relative to a reference object and comprising:
a base;
a movable platform, opposite to the base;
the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform; and
a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
a second carrier stage, which is also liftable vertically; and
an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
a rotary shaft which is vertically suspended; and
a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions;
wherein the transfer device further comprises a valve plate, which is co-axially provided on the first carrier stage and is configured to be elevated or lowered with the first carrier stage so as to close or open the opening.
19 . A wafer processing apparatus, comprising:
a first housing, defining an interior vacuum chamber, in which a wafer processing device or a wafer detection device is installed;
a wafer transfer device, comprising:
a load-bearing device being arranged to function as a first carrier stage which is liftable vertically by arranging a first direction along which an ejector rod extends in a vertical direction, the load-bearing device being telescopic relative to a reference object and comprising:
a base;
a movable platform, opposite to the base;
the ejector rod, which is configured to extend through a bearing secured to the base and is coupled to the movable platform; and
a driving member, which is fixed relative to the reference object and is configured to push against the ejector rod and in turn to drive the ejector rod to displace relative to the base,
wherein the load-bearing device further comprises a corrugated tube assembly, which is arranged to surround the ejector rod and comprises a first corrugated tube sleeved on the ejector rod, an upper edge and a lower edge of the first corrugated tube being bonded to a first surface of the movable platform facing towards the base and an upper surface of the base in a sealed manner respectively, the ejector rod and the first corrugated tube cooperating with each other to define collectively a first space which is located below the first surface of the movable platform and communicates to an atmospheric environment through a gap between the ejector rod and the bearing,
wherein the corrugated tube assembly further comprises an external tube wrapped outside the first corrugated tube,
wherein an upper edge and a lower edge of the external tube are bonded to the first surface of the movable platform and the upper surface of the base in a sealed manner respectively, and the base, the movable platform, the first corrugated tube, and the external tube cooperate with one another to define collectively a second space located below the first surface of the movable platform, and
wherein the movable platform is further provided with a second surface facing away from the base, both the first surface and the second surface being planar and perpendicular to an axis of the ejector rod, with an area of a portion of the first surface delimited between the first corrugated tube and the external tube being smaller than an area of the second surface;
a second carrier stage, which is also liftable vertically; and
an arm assembly, provided between the first carrier stage and the second carrier stage and comprising:
a rotary shaft which is vertically suspended; and
a rotary arm, comprising a rod-shaped body which is rotatably mounted at a lower end of the rotary shaft around a vertical axis of the rotary shaft and extends along a longitudinal axis orthogonal to the vertical axis,
wherein the rotary shaft further comprises two supporting portions, which are formed respectively at both ends opposite to each other of the body, and are configured to rotate around the vertical axis so as to perform a wafer transfer action from a top of one of the first carrier stage and the second carrier stage to a top of the other of the first carrier stage and the second carrier stage, by a supporting effect applied by the two supporting portions; and
a second housing, which is adjacent to the first housing and defines a transition chamber,
wherein, the first housing is formed with an opening communicating to the second housing, and the first carrier stage of the wafer transfer device is arranged to at least partially overlap with the opening;
the wafer transfer device further comprises a valve plate, which is co-axially provided on the first carrier stage and is configured to be elevated or lowered with the first carrier stage so as to close or open the opening; and
the transition chamber communicates with the vacuum chamber via the opening at one side thereof, and also communicates with the atmospheric environment via a second valve at the other side thereof.