IP Library Granted Patent US 12,635,564
Granted Patent B2
US 12,635,564 · App. 17/856,965 · Granted May 19, 2026

Liquid metal based first level interconnects

Inventors: Kyle J. Arrington (Gilbert, AZ); Karumbu Nathan Meyyappan (Portland, OR); Srikant Nekkanty (Chandler, AZ)
Assignee: Intel Corporation
H01L25/18H01L23/49811H01L23/5385H01L24/13H01L24/16H01L24/32H01L24/73H01L24/81H01L24/29H01L2224/13105H01L2224/13139H01L2224/13144H01L2224/13147H01L2224/13155H01L2224/13166H01L2224/13169H01L2224/13184H01L2224/16237H01L2224/2919H01L2224/32225H01L2224/73204H01L2224/81405H01L2224/81409H01L2224/81411H01L2224/81418H01L2924/01008H01L2924/0665
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Quick Facts
Patent No.
US 12,635,564
App. No.
17/856,965
Granted
May 19, 2026
Kind
B2
Abstract

In one embodiment, an integrated circuit assembly includes a substrate comprising electrical connectors on a top side of the substrate and an integrated circuit die coupled to the top side of the substrate. The integrated circuit die includes metal pillars extending from a bottom side of the die facing the top side of the substrate, and the metal pillars of the integrated circuit die are electrically connected to the electrical connectors of the substrate via a liquid metal (e.g., a Gallium-based alloy).

Claims (41)

1 . An integrated circuit assembly comprising:

a substrate comprising electrical connectors on a top side of the substrate; and

an integrated circuit die coupled to the top side of the substrate, the integrated circuit die comprising metal pillars extending from a bottom side of the die facing the top side of the substrate;

wherein the metal pillars of the integrated circuit die are electrically connected to the electrical connectors of the substrate via a liquid metal.

2 . The integrated circuit assembly of claim 1 , where the substrate comprises a plurality of wells defined on the top side of the substrate and the metal pillars of the integrated circuit die are disposed at least partially within the wells.

3 . The integrated circuit assembly of claim 1 , further comprising an underfill material between the substrate and the integrated circuit die.

4 . The integrated circuit assembly of claim 1 , wherein the electrical connectors of the substrate include a plurality of metal pillars extending from the top side of the substrate.

5 . The integrated circuit assembly of claim 4 , further comprising an interposer between the substrate and the integrated circuit die, the interposer defining a plurality of holes in which the metal pillars of the integrated circuit die and the metal pillars of the substrate are disposed.

6 . The integrated circuit assembly of claim 5 , further comprising an underfill material between the substrate and the interposer and an underfill material between the interposer and the integrated circuit die.

7 . The integrated circuit assembly of claim 1 , further comprising an adhesive material along an outer edge of the integrated circuit die to couple the integrated circuit die to the substrate.

8 . The integrated circuit assembly of claim 1 , wherein the integrated circuit die is a first integrated circuit die, the integrated circuit assembly further comprises a second integrated circuit die and bridge circuitry within the substrate to interconnect the first integrated circuit die and the second integrated circuit die.

9 . The integrated circuit assembly of claim 1 , wherein the metal pillars of the integrated circuit die comprise one or more of Copper, Nickel, Gallium, Oxygen, Silver, Platinum, Gold, Titanium, and Tungsten.

10 . The integrated circuit assembly of claim 1 , wherein the liquid metal is an alloy comprising Gallium and one or more of Indium, Tin, Zinc, and Oxygen.

11 . A multi-die integrated circuit assembly comprising:

a first integrated circuit die comprising electrical connectors on a top side of the integrated circuit die; and

a second integrated circuit die coupled to the top side of the first integrated circuit die, the second integrated circuit die comprising metal pillars extending from a bottom side of the second integrated circuit die facing the top side of the first integrated circuit die;

wherein the metal pillars of the second integrated circuit die are electrically connected to the electrical connectors of the first integrated circuit die via a liquid metal.

12 . The multi-die integrated circuit assembly of claim 11 , where the first integrated circuit die comprises a plurality of wells defined on the top side of the first integrated circuit die and the metal pillars of the second integrated circuit die are disposed at least partially within the wells.

13 . The multi-die integrated circuit assembly of claim 11 , further comprising an underfill material between the first integrated circuit die and the second integrated circuit die.

14 . The multi-die integrated circuit assembly of claim 11 , wherein the electrical connectors of the first integrated circuit die include a plurality of metal pillars extending from the top side of the first integrated circuit die.

15 . The multi-die integrated circuit assembly of claim 14 , further comprising an interposer between the first integrated circuit die and the second integrated circuit die, the interposer defining a plurality of holes in which the metal pillars of the first integrated circuit die and the metal pillars of the second integrated circuit die are disposed.

16 . The multi-die integrated circuit assembly of claim 15 , further comprising an underfill material between the first integrated circuit die and the interposer and an underfill material between the interposer and the second integrated circuit die.

17 . The multi-die integrated circuit assembly of claim 11 , further comprising a substrate, wherein the first integrated circuit die is coupled to a top side of the substrate.

18 . The multi-die integrated circuit assembly of claim 17 , wherein the first integrated circuit die comprises metal pillars extending from a bottom side of the first integrated circuit die, the metal pillars of the first integrated circuit die electrically connected to the substrate via a liquid metal.

19 . The multi-die integrated circuit assembly of claim 18 , further comprising an interposer between the substrate and the first integrated circuit die, the interposer defining a plurality of holes in which the metal pillars of the first integrated circuit die are disposed.

20 . The multi-die integrated circuit assembly of claim 11 , wherein the metal pillars of the integrated circuit die comprise one or more of Copper, Nickel, Gallium, Oxygen, Silver, Platinum, Gold, Titanium, and Tungsten.

21 . The multi-die integrated circuit assembly of claim 11 , wherein the liquid metal is an alloy comprising Gallium and one or more of Indium, Tin, Zinc, and Oxygen.

22 . A system comprising:

a main circuit board;

an integrated circuit assembly coupled to the main circuit board and comprising:

a substrate comprising electrical connectors on a top side of the substrate; and

an integrated circuit die coupled to the top side of the substrate, the integrated circuit die comprising metal pillars extending from a bottom side of the die facing the top side of the substrate;

wherein the metal pillars of the integrated circuit die are electrically connected to the electrical connectors of the substrate via a liquid metal.

23 . The system of claim 22 , wherein:

the integrated circuit die is a first integrated circuit die and the integrated circuit assembly further comprises a second integrated circuit die coupled to the substrate;

the substrate comprises bridge circuitry to interconnect the first integrated circuit die and the second integrated circuit die; and

the second integrated circuit die comprises metal pillars that are electrically connected to electrical connectors of the substrate via a liquid metal.

24 . The system of claim 22 , the integrated circuit die is a first integrated circuit die and the integrated circuit assembly further comprises a second integrated circuit die coupled to a top side of the first integrated circuit die opposite the substrate, wherein the second integrated circuit die comprises metal pillars that are electrically connected to electrical connectors on the top side of the first integrated circuit die via a liquid metal.

25 . The system of claim 22 , wherein:

the metal pillars of the integrated circuit die comprise one or more of Copper, Nickel, Gallium, Oxygen, Silver, Platinum, Gold, Titanium, and Tungsten; and

the liquid metal is an alloy comprising Gallium and one or more of Indium, Tin, Zinc, and Oxygen.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2022
From: ARRINGTON, KYLE J.; MEYYAPPAN, KARUMBU NATHAN; NEKKANTY, SRIKANT
To: INTEL CORPORATION
Reel/Frame 060580/0312 →
Continuity (1)
Related Publication 20240006400A1 · Jan 4, 2024
References Cited (6)
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US 12244083B2 · Harako · 2025 [cited by examiner]
US 20230197594A1 · Meyyappan · 2023 [cited by examiner]
US 20230197622A1 · Meyyappan · 2023 [cited by examiner]
US 20230299024A1 · Wu · 2023 [cited by examiner]
US 20230395480A1 · Chuah · 2023 [cited by examiner]