IP Library Granted Patent US 12,637,752
Granted Patent B2
US 12,637,752 · App. 18/314,371 · Granted May 26, 2026

Mask assembly and method of manufacturing the mask assembly

Inventors: Seoyeon Kim (Yongin-si, KR); Mina Woo (Yongin-si, KR); Jongdae Lee (Yongin-si, KR); Hongkyun Ahn (Yongin-si, KR); Sangwoo Jo (Yongin-si, KR)
Assignee: SAMSUNG DISPLAY CO., LTD.
C23C14/042
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Quick Facts
Patent No.
US 12,637,752
App. No.
18/314,371
Granted
May 26, 2026
Kind
B2
Abstract

A mask assembly includes a mask frame having an opening area, and a mask sheet disposed on the mask frame to overlap the opening area, the mask sheet including a first area, and a second area surrounding the first area. The first area includes a first opening pattern that is a half-etched pattern, the second area includes a second opening pattern that is a penetrating pattern, and in a plan view, the first opening pattern and the second opening pattern are different from each other.

Claims (51)

1 . A mask assembly comprising:

a mask frame including an opening area; and

a mask sheet disposed on the mask frame to overlap the opening area, the mask sheet including:

a first area; and

a second area surrounding the first area on all sides, wherein

the first area includes a first opening pattern that is a half-etched pattern,

the second area includes a second opening pattern that is a penetrating pattern, and

in a plan view, the first opening pattern and the second opening pattern are different from each other.

2 . The mask assembly of claim 1 , wherein

the first opening pattern includes:

a plurality of first ribs extending in a first direction;

a plurality of second ribs extending in a second direction; and

a plurality of half openings defined by the plurality of first ribs and the plurality of second ribs,

the second opening pattern includes:

a plurality of third ribs extending in a third direction;

a plurality of fourth ribs extending in a fourth direction; and

a plurality of openings defined by the plurality of third ribs and the plurality of fourth ribs, and

the third direction is a direction intersecting with the first direction and the second direction.

3 . The mask assembly of claim 2 , wherein the fourth direction is a direction intersecting with the first direction and the second direction.

4 . The mask assembly of claim 2 , wherein an angle between the first direction in which the plurality of first ribs extend and the third direction in which the plurality of third ribs extend is 45°.

5 . The mask assembly of claim 2 , wherein a direction in which the plurality of half openings are aligned and a direction in which the plurality of openings are aligned are different from each other.

6 . The mask assembly of claim 5 , wherein

the plurality of half openings are aligned in the first direction and the second direction, and

the plurality of openings are aligned in the third direction and the fourth direction.

7 . The mask assembly of claim 2 , wherein

from among distances between centers of any two half-openings among the plurality of half openings, a distance between centers of two half openings adjacent to each other in at least one of the first direction and the second direction is a shortest distance, and

from among distances between centers of any two openings among the plurality of openings, a distance between centers of two openings adjacent to each other in at least one of the third direction and the fourth direction is a shortest distance.

8 . The mask assembly of claim 2 , wherein, in a plan view, shapes of the plurality of half openings and shapes of the plurality of openings are different from each other.

9 . The mask assembly of claim 8 , wherein the shapes of the plurality of half openings are circular.

10 . The mask assembly of claim 2 , wherein, in a plan view, sizes of the plurality of half openings and sizes of the plurality of openings are different from each other.

11 . The mask assembly of claim 2 , wherein, in a plan view, a number of first ribs per unit area and a number of third ribs per unit area are different from each other.

12 . The mask assembly of claim 11 , wherein, in a plan view, a number of second ribs per unit area and a number of fourth ribs per unit area are different from each other.

13 . A method of manufacturing a mask assembly, the method comprising:

preparing a mask sheet including:

a first area; and

a second area surrounding the first area on all sides;

forming a first opening pattern, which is a half-etched pattern, in the first area;

forming a second opening pattern, which is a penetrating pattern, in the second area; and

tensioning the mask sheet and fixing the mask sheet onto a mask frame,

wherein, in a plan view, the first opening pattern and the second opening pattern are different from each other.

14 . The method of claim 13 , wherein

the forming of the first opening pattern includes forming a plurality of first ribs extending in a first direction, a plurality of second ribs extending in a second direction, and a plurality of half openings defined by the plurality of first ribs and the plurality of second ribs,

the forming of the second opening pattern includes forming a plurality of third ribs extending in a third direction, a plurality of fourth ribs extending in a fourth direction, and a plurality of openings defined by the plurality of third ribs and the plurality of fourth ribs, and

the third direction is a direction intersecting with the first direction and the second direction.

15 . The method of claim 14 , wherein a direction in which the mask sheet is tensioned and a direction in which the plurality of first ribs extend are same.

16 . The method of claim 14 , wherein a direction in which the mask sheet is tensioned is perpendicular to a direction in which the plurality of second ribs extend.

17 . The method of claim 14 , wherein a direction in which the mask sheet is tensioned intersects with a direction in which the plurality of third ribs extend.

18 . The method of claim 17 , wherein an angle between the direction in which the mask sheet is tensioned and the direction in which the plurality of third ribs extend is 45°.

19 . The method of claim 14 , wherein a direction in which the plurality of half openings are aligned and a direction in which the plurality of openings are aligned are different from each other.

20 . The method of claim 14 , wherein, in a plan view, shapes of the plurality of half openings and shapes of the plurality of openings are different from each other.

21 . The method of claim 14 , wherein, in a plan view, a number of first ribs per unit area and a number of third ribs per unit area are different from each other.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2023
From: KIM, SEOYEON; WOO, MINA; LEE, JONGDAE; AHN, HONGKYUN; JO, SANGWOO
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 063581/0469 →
Priority Claims (1)
KR 10-2022-0086549 · Jul 13, 2022 · national
Continuity (1)
Related Publication 20240018641A1 · Jan 18, 2024
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