IP Library Granted Patent US 12,638,098
Granted Patent B2
US 12,638,098 · App. 18/372,526 · Granted May 26, 2026

Proportional fluid flow valve and methods of operating thereof

Inventor: Srikanth Krishnamurthy (Bangalore, IN)
Assignee: Applied Materials, Inc.
F16K31/402F16K7/16F16K31/007F16K31/122F16K37/00
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Quick Facts
Patent No.
US 12,638,098
App. No.
18/372,526
Granted
May 26, 2026
Kind
B2
Abstract

Certain embodiments of the present disclosure relate to a fluid flow valve. The valve includes a housing configured to receive a flow of fluid. The valve further includes a diaphragm to actuate between a closed position and a plurality of open positions. The valve further includes a first valve portion configured to flow a first amount of fluid responsive to the diaphragm actuating to one or more first open positions of the plurality of open positions. The valve further includes a second valve portion in parallel with the first valve portion and configured to flow a second amount of fluid responsive to the diaphragm actuating to one or more second open positions of the plurality of open positions.

Claims (38)

1 . A fluid flow valve, comprising:

a housing configured to receive a flow of fluid;

a diaphragm configured to actuate between a closed position and a plurality of open positions;

a first valve portion configured to flow a first amount of fluid responsive to the diaphragm actuating to one or more first open positions of the plurality of open positions; and

multiple second valve portions radially surrounding the first valve portion and configured to flow a second amount of fluid in parallel with the first valve portion responsive to the diaphragm actuating to one or more second open positions of the plurality of open positions.

2 . The fluid flow valve of claim 1 , wherein the first valve portion comprises one or more first poppets coupled to the diaphragm and the multiple second valve portions comprise multiple second poppets coupled to the diaphragm.

3 . The fluid flow valve of claim 2 , wherein responsive to the diaphragm actuating to one of the one or more first open positions the one or more first poppets open to allow fluid to flow through the first valve portion and the multiple second poppets remain closed.

4 . The fluid flow valve of claim 1 , further comprising a strain gauge bonded to the diaphragm and configured to measure displacement of the diaphragm.

5 . The fluid flow valve of claim 1 , further comprising an actuator configured to actuate the diaphragm based on an input signal.

6 . The fluid flow valve of claim 5 , wherein the actuator is selected from a group consisting of an electric solenoid actuator, a voice coil actuator, a ferrofluidic actuator, and a piezoelectric actuator.

7 . The fluid flow valve of claim 5 , further comprising a transfer mechanism configured to convert first motion of the actuator in a first direction to second motion of the diaphragm in an opposite second direction.

8 . The fluid flow valve of claim 1 , wherein the multiple second valve portions comprise a radial portion substantially surrounding the first valve portion within the housing.

9 . The fluid flow valve of claim 1 , wherein the first amount of fluid is less than the second amount of fluid.

10 . A fluid flow system, comprising:

a valve comprising:

a housing configured to receive a flow of fluid;

a diaphragm configured to actuate between a closed position and a plurality of open positions;

a first valve portion;

multiple second valve portions radially surrounding the first valve portion; and

a processing device configured to:

cause the first valve portion to flow a first amount of fluid by causing the diaphragm to actuate to one or more first open positions of the plurality of open positions; and

cause the multiple second valve portions to flow a second amount of fluid in parallel with the first valve portion by causing the diaphragm to actuate to one or more second open positions of the plurality of open positions.

11 . The fluid flow system of claim 10 , wherein the first valve portion comprises one or more first poppets coupled to the diaphragm and the multiple second valve portions comprise multiple second poppets coupled to the diaphragm.

12 . The fluid flow system of claim 11 , wherein responsive to the processing device causing the diaphragm to actuate to one of the one or more first open positions the one or more first poppets open to allow fluid to flow through the first valve portion and the multiple second poppets remain closed.

13 . The fluid flow system of claim 10 , further comprising:

a strain gauge bonded to the diaphragm and configured to measure displacement of the diaphragm.

14 . The fluid flow system of claim 13 , wherein the processing device is further configured to receive displacement data from the strain gauge, wherein the processing device causes the diaphragm to actuate based at least in part on the displacement data.

15 . The fluid flow system of claim 10 , wherein the processing device is further configured to receive flow data associated with flow of fluid from one or more flow sensors, wherein the processing device causes the diaphragm to actuate based at least in part on the flow data and a target fluid flow rate.

16 . The fluid flow system of claim 10 , further comprising an actuator configured to actuate the diaphragm based on an input signal from the processing device.

17 . The fluid flow system of claim 16 , further comprising a transfer mechanism configured to convert first motion of the actuator in a first direction to second motion of the diaphragm in an opposite second direction.

18 . The fluid flow system of claim 10 , wherein the first amount of fluid is less than the second amount of fluid.

19 . A method, comprising:

receiving target flow data associated with a flow of fluid through a valve having a first valve portion and multiple second valve portions radially surrounding the first valve portion;

causing a diaphragm to actuate to one or more first open positions to flow a first amount of fluid through the first valve portion based at least in part on the target flow data; and

causing the diaphragm to actuate to one or more second open positions to flow a greater second amount of fluid through at least the multiple second valve portions in parallel with the first valve portion based at least in part on the target flow data.

20 . The method of claim 19 , further comprising:

receiving displacement data from a strain gauge bonded to the diaphragm; and

causing the diaphragm to actuate further based on the displacement data.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2024
From: KRISHNAMURTHY, SRIKANTH
To: APPLIED MATERIALS, INC.
Reel/Frame 066083/0043 →
Continuity (1)
Related Publication 20250102074A1 · Mar 27, 2025
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