Container for accommodating substrate with effective hermetic sealing
The invention discloses a container for accommodating a substrate. The container includes a base having at least one first supporting surface and a lid having at least one second supporting surface to engage with the first supporting surface of the base, so as to define an accommodating space for the substrate. The first supporting surface of the base and the second supporting surface of the lid have the same slope with a respective flatness of 0.04 mm or less, so that an effective hermetic seal between the first supporting surface and the second supporting surface is formed when the two surfaces contact each other.
1 . A container for accommodating a substrate, comprising:
a base having a top horizontal surface and at least one first supporting surface surrounding the top horizontal surface; and
a lid covering the top horizontal surface and engaging with the first at least one supporting surface to thereby define an accommodating space for accommodating the substrate, the lid having at least one filtering channel and at least one second supporting surface surrounding the accommodating space, wherein the at least one second supporting surface is configured to match with the at least one first supporting surface, the first supporting surface of the base and the at least one second supporting surface of the lid have a consistent slope relative to that of the top horizontal surface, the first supporting surface of the base and the second supporting surface of the lid both have a flatness less than 0.04 mm to thereby form an effective seal when the at least one first supporting surface contacts with the at least one second supporting surface contact, and when the accommodating space is vacuumed with a gas backfill process applied to an outer space of the container to cause an air flow entering to enter into the container, a gap formed between the at least one first supporting surface and the at least one second supporting surface is set such that at least 90% of the air flow passes through the filter channel to enter the accommodating space of the container.
2 . The container as claimed in claim 1 , wherein a pressure difference is created between the accommodating space and an outer space of the container due to the flatness defined by the at least one first supporting surface and the at least one second supporting surface.
3 . The container as claimed in claim 2 , wherein the pressure difference is above 100 Pa.
4 . The container as claimed in claim 1 , wherein when the accommodating space is vacuumed, and during the gas backfill process to the outer space of the container, the effective seal formed by the flatness of the at least one first supporting surface and the at least one second supporting surface causes the air flow entering to enter the container, the flatness is set such that less than 10% of the air flow passes through the gap between the at least one first supporting surface and the at least one second supporting surface to enter the accommodating space of the container.
5 . The container as claimed in claim 1 , wherein the at least one first supporting surface of the base has a surface roughness (Sa) and the at least one second supporting surface of the lid has a surface roughness, both of said surface roughness of the at least one first supporting surface and the at least one second supporting surface are of a range from 13 to 100 nm.
6 . The container as claimed in claim 1 , wherein the base has at least two supporting surfaces encircling the top horizontal surface, the at least one first supporting surfaces and the at least one second supporting surface have a consistent slope relatively to the top horizontal surface, and the at least one first supporting surfaces have a largest flatness that is below 0.04 mm.
7 . The container as claimed in claim 6 , wherein the base has a groove defined by and between the first supporting surfaces encircling the top horizontal surface.
8 . The container as claimed in claim 1 , wherein the at least one first supporting surface contacts with the at least one second supporting surface to form at least one contact interface therebetween to encircle the top horizontal surface.
9 . The container as claimed in claim 8 , wherein the contact interface has the gap, and the gap is less than 0.08 mm.
10 . The container as claimed in claim 8 , wherein the contact interface has a plane that is not at a level identical to or parallel to that of the horizontal surface.
11 . The container as claimed in claim 8 , wherein the base has at least two first supporting surfaces encircling the top horizontal surface, the at least one first supporting surfaces contact with the at least one second supporting surface to form at least two contact interfaces encircling the top horizontal surface.
12 . The container as claimed in claim 11 , wherein the base has at least one groove defined between the two contact interfaces and encircling the top horizontal surface.
13 . The container as claimed in claim 8 , wherein the at least one contact interface has a plane that is not at a level identical to or parallel to that of the top horizontal surface.
14 . A container for accommodating a substrate, comprising:
a base having a top horizontal surface; and
a lid having at least one filter channel and a storage space, wherein the lid contacts with the base, the storage space and the top horizontal surface define an accommodating space for accommodating the substrate, at least one contact interface is defined when a bottom surface of the lid directly contacts with a top surface of the base to encircle the top horizontal surface and thereby seal the accommodating space, the at least one contact interface has a gap less than 0.08 mm, and when the accommodating space is vacuumed with a gas backfill process applied to an outer space of the container to cause an air flow entering to enter into the container, the gap is set such that at least 90% of the air flow passes through the filter channel to enter the accommodating space of the container.
15 . The container as claimed in claim 14 , wherein the top surface of the base defining the at least one contact interface and the bottom surface of the lid defining the at least one contact interface have a flatness less than 0.04 mm.
16 . The container as claimed in claim 14 , wherein the at least one contact interface has a plane that is not at a level identical to or parallel to that of the top horizontal surface.
17 . The container as claimed in claim 14 , wherein the lid contacts with the base to define at least two contact interfaces, and the base has at least one groove encircling the top horizontal surface and spacing the at least one contact interfaces and the top horizontal surface.
18 . The container as claimed in claim 17 , wherein one of the at least two contact interfaces has a plane that is not at a level identical to or parallel to that of the top horizontal surface.
19 . The container as claimed in claim 14 , wherein a pressure difference is able to be created between the accommodating space and the outer space of the container due to an effective seal formed by the at least one contact interface.
20 . The container as claimed in claim 19 , wherein the pressure difference is above 100 Pa.
21 . The container as claimed in claim 14 , wherein when the accommodating space is vacuumed, and during the gas backfill process applied to the outer space of the container, an effective seal formed by the at least one contact interface causes the air flow entering to enter the container, the gap is set such that less than 10% of the air flow passes through the gap of the at least one contact interface to the accommodating space of the container.
22 . The container as claimed in claim 14 , wherein the top surface of the base defining the at least one contact interface and the bottom surface of the lid defining the at least one contact interface have a surface roughness (Sa) that is of a range from 13 to 100 nm.
23 . A container for accommodating a substrate, comprising:
a base having a top horizontal surface and at least one first supporting surface encircling the top horizontal surface; and
a lid having at least one filter channel, a bottom surface and a flange encircling the bottom surface, the flange having at least one second supporting surface encircling the bottom surface, the at least one second supporting surface at least in part contacting with the at least one first supporting surface of the base such that the bottom surface, the flange and the top horizontal surface define an accommodating space for accommodating the substrate, wherein the at least one first supporting surface and the at least one second supporting surface have a flatness less than 0.04 mm, and a gap is formed between the at least one first supporting surface and the second support surface, which causes an effective seal in the accommodating space, and when the accommodating space is vacuumed with a gas backfill process applied to an outer space of the container to cause an air flow entering to enter into the container, the gap is set such that at least 90% of the air flow passes through the filter channel to enter the accommodating space of the container.
24 . The container as claimed in claim 23 , wherein a pressure difference is created between the accommodating space and the outer space of the container due to the effective seal formed by the flatness of the at least one first supporting surface and the flatness of the at least one second supporting surface.
25 . The container as claimed in claim 24 , wherein the pressure difference is above 100 Pa.
26 . The container as claimed in claim 25 , wherein when the accommodating space is vacuumed, and during the gas backfill process to the outer space of the container, the effective seal formed by the flatness of the at least one first supporting surface and the flatness of the at least one second supporting surface causes the air flow entering to enter the container, the flatness is set such that less than 10% of the air flow passes through the gap between the at least one first supporting surface and the at least one second supporting surface to enter the accommodation space of the container.
27 . The container as claimed in claim 23 , wherein the at least one first supporting surface of the base and the least one second supporting surface of the lid have a surface roughness (Sa) that is of a range from 13 to 100 nm.
28 . The container as claimed in claim 23 , wherein the at least one first supporting surface and the at least one second supporting surface have a consistent slope relatively to that of the top horizontal surface.
29 . The container as claimed in claim 23 , wherein the base has at least two first supporting surfaces encircling the top horizontal surface, and the at least one first supporting surfaces have the flatness that is less than 0.04 mm.
30 . The container as claimed in claim 29 , wherein the base has a groove defined between the at least two first supporting surfaces and encircling the top horizontal surface.
31 . The container as claimed in claim 29 , wherein at least one of the at least one first supporting surfaces has a plane that is not at a level identical to or parallel to that of the top horizontal surface.
32 . The container as claimed in claim 23 , wherein the at least one first supporting surface contacts with the at least one second supporting surface to form at least one contact interface encircling the top horizontal surface.
33 . The container as claimed in claim 32 , wherein the gap is less than 0.08 mm.
34 . A container for accommodating a substrate, comprising:
a base having a top horizontal surface and a first supporting surface surrounding the top horizontal surface; and
a lid having at least one filter channel, a storage space and a second supporting surface surrounding the storage space;
wherein the first supporting surface of the base and the second supporting surface of the lid both have a flatness less than 0.04 mm;
wherein the lid contacts with the base so that the storage space of the lid and the top horizontal surface of the base define an accommodating space for accommodating the substrate, and at least one contact interface is formed between the first supporting surface and the second supporting surface to encircle the top horizontal surface to thereby seal the accommodating space, wherein the contact interface has a gap which is able to maintain a pressure difference between the accommodating space and an outer space of the container when the filter channel is closed, where the pressure difference is above 100 Pa.