Electronic device with mesh pattern including protective pattern
An electronic device includes a display panel and an input sensor. The input sensor includes first and second insulating layers, a first sensor electrode including first sensor patterns and first connection patterns, and a second sensor electrode including second sensor patterns and second connection patterns. Each of the first sensor electrode and the second sensor electrode may include a mesh pattern. The mesh pattern includes a first layer, a second layer, a third layer, and a protective pattern covering the side surface of the second layer. An inner surface of the protective pattern directly contacts the side surface of the second layer. The tip part of the third layer and an outer surface of the protective pattern have an undercut shape in a cross-sectional view.
1 . An electronic device comprising:
a display panel; and
an input sensor including a first insulating layer directly contacting the display panel, a second insulating layer disposed on the first insulating layer, a first sensor electrode including a plurality of first sensor patterns and a plurality of first connection patterns connecting the plurality of first sensor patterns to each other, and a second sensor electrode including a plurality of second sensor patterns and a plurality of second connection patterns connecting the plurality of second sensor patterns to each other,
wherein the plurality of first connection patterns and the plurality of second connection patterns are arranged to be spaced apart from each other with the second insulating layer interposed between the plurality of first connection patterns and the plurality of second connection patterns,
wherein each of the first sensor electrode and the second sensor electrode includes a mesh pattern,
wherein the mesh pattern includes:
a first layer;
a second layer disposed on the first layer and having electrical conductivity,
a third layer disposed on the second layer, and having a tip part protruding beyond a side surface of the second layer in a cross-sectional view; and
a protective pattern covering the side surface of the second layer, and having an inner surface directly contacting the side surface of the second layer and an outer surface opposite to the inner surface, and
wherein the tip part and the outer surface of the protective pattern have an undercut shape in the cross-sectional view, the protective pattern exposing an entirety of a lowermost surface of the tip part.
2 . The electronic device of claim 1 , wherein the protective pattern has a reflectance that is less than a reflectance of the second layer.
3 . The electronic device of claim 1 , wherein the protective pattern includes:
a first protective pattern layer directly contacting the side surface of the second layer; and
a second protective pattern layer covering the first protective pattern layer, the second protective pattern layer including a material different from a material of the first protective pattern layer.
4 . The electronic device of claim 3 , wherein:
the first protective pattern layer includes molybdenum and tantalum; and
the second protective pattern layer includes silicon oxide, silicon nitride, silicon oxynitride, or amorphous silicon.
5 . The electronic device of claim 3 , wherein the first protective pattern layer has a minimum thickness value greater than or equal to about 300 Å.
6 . The electronic device of claim 1 , wherein the protective pattern has an uneven thickness along the side surface of the second layer.
7 . The electronic device of claim 1 , wherein:
the second layer has a tapered shape in the cross-sectional view, and
wherein a tapered angle of the second layer is in a range of about 60 degrees to about 90 degrees.
8 . The electronic device of claim 1 , wherein the first insulating layer includes silicon oxide or silicon nitride.
9 . The electronic device of claim 1 , wherein the plurality of first sensor patterns and the plurality of second sensor patterns are disposed on a same layer as the plurality of first connection patterns.
10 . The electronic device of claim 1 , wherein:
the plurality of first connection patterns are disposed on the second insulating layer; and
the plurality of second connection patterns are interposed between the first insulating layer and the second insulating layer.
11 . The electronic device of claim 1 , wherein the mesh pattern includes a plurality of mesh patterns,
wherein the plurality of mesh patterns include:
a first mesh pattern and a second mesh pattern spaced apart from each other in a plan view,
wherein the first mesh pattern and the second mesh pattern include edges defining a minimum distance between the first mesh pattern and the second mesh pattern, and
wherein a plurality of protective patterns are disposed on the edges.
12 . The electronic device of claim 1 , wherein:
the second layer includes aluminum (Al); and
wherein the third layer includes titanium (Ti).
13 . An electronic device comprising:
a display panel; and
an input sensor including a first insulating layer directly contacting the display panel, a second insulating layer disposed on the first insulating layer, a first sensor electrode including a plurality of first sensor patterns and a plurality of first connection patterns connecting the plurality of first sensor patterns to each other, and a second sensor electrode including a plurality of second sensor patterns and a plurality of second connection patterns connecting the plurality of second sensor patterns to each other,
wherein the plurality of first connection patterns and the plurality of second connection patterns are arranged to be spaced apart from each other with the second insulating layer interposed between the plurality of first connection patterns and the plurality of second connection patterns,
wherein each of the first sensor electrode and the second sensor electrode includes a mesh pattern,
wherein the mesh pattern includes:
a first layer;
a second layer disposed on the first layer and having electrical conductivity,
a third layer disposed on the second layer and including a material different from a material of the second layer; and
a protective pattern covering a side surface of the second layer, and having an inner surface directly contacting the side surface of the second layer and an outer surface opposite to the inner surface, and
wherein the protective pattern includes:
a first protective pattern layer directly contacting the side surface of the second layer and having a reflectance less than a reflectance of the second layer; and
a second protective pattern layer covering the first protective pattern layer and having an uppermost surface co-planar with an uppermost surface of the first protective pattern layer, the second protective pattern layer including a material different from a material of the first protective pattern layer.
14 . The electronic device of claim 13 , wherein the third layer has a tip part protruding beyond the side surface of the second layer in a cross-sectional view, and
wherein the tip part of the third layer and the outer surface of the protective pattern have an undercut shape in the cross-sectional view.
15 . The electronic device of claim 13 , wherein:
the second layer includes aluminum (Al); and
the third layer includes titanium (Ti).
16 . The electronic device of claim 13 , wherein:
the first protective pattern layer includes molybdenum and tantalum; and
the second protective pattern layer includes silicon oxide, silicon nitride, silicon oxynitride, or amorphous silicon.
17 . The electronic device of claim 13 , wherein the first protective pattern layer has a minimum width value greater than or equal to about 300 Å.