Wafer lift pin guide
Embodiments of the present disclosure generally relate to a lift pin guide. The lift pin guide includes a cylindrical main section, a flange, a cylindrical recess, a cylindrical extension, and a bore. The flange is disposed at a first end of the cylindrical main section and has a diameter greater than a diameter of the cylindrical main section. The cylindrical recess is formed in a first surface of the flange, the first surface of the flange being opposite the cylindrical main section, and the cylindrical recess having an outer diameter less than the diameter of the cylindrical main section. The cylindrical extension protrudes beyond the first surface of the flange, the cylindrical extension being concentric with the cylindrical main section. The bore is formed through the cylindrical main section and the cylindrical extension.
1 . A lift pin guide, comprising:
a cylindrical main section;
a flange disposed at a first end of the cylindrical main section and having a diameter greater than a diameter of the cylindrical main section;
a cylindrical recess formed in a first surface of the flange, the first surface of the flange opposite the cylindrical main section, the cylindrical recess having an outer diameter less than the diameter of the cylindrical main section;
a cylindrical extension protruding beyond the first surface of the flange, the cylindrical extension concentric with the cylindrical main section; and
a bore formed through the cylindrical main section and the cylindrical extension.
2 . The lift pin guide of claim 1 , wherein the lift pin guide is composed of aluminum nitride.
3 . The lift pin guide of claim 1 , wherein the bore includes a frustum at one end thereof, the frustum located within the cylindrical main section, and wherein the frustum has a slope from about 30 to about 60 degrees.
4 . The lift pin guide of claim 1 , wherein the lift pin guide is substantially symmetrical along a vertical axis.
5 . The lift pin guide of claim 1 , wherein a thickness of the flange is greater than a depth of the cylindrical recess.
6 . A lift pin guide assembly, comprising:
a spring; and
a lift pin guide, comprising:
a cylindrical main section;
a flange disposed at a first end of the cylindrical main section and having a diameter greater than a diameter of the cylindrical main section;
a cylindrical recess formed in a first surface of the flange, the first surface of the flange opposite the cylindrical main section, the cylindrical recess having an outer diameter less than the diameter of the cylindrical main section;
a cylindrical extension protruding beyond the first surface of the flange the cylindrical extension concentric with the cylindrical main section; and
a bore formed through the cylindrical main section and the cylindrical extension.
7 . The lift pin guide assembly of claim 6 , wherein the cylindrical main section has a length greater than a length of the cylindrical extension.
8 . The lift pin guide assembly of claim 6 , wherein a first frustum is located within the cylindrical main section at one end of the bore.
9 . The lift pin guide assembly of claim 8 , further comprising a second frustum located at least partially within the cylindrical extension.
10 . The lift pin guide assembly of claim 6 , wherein a distal end of the cylindrical extension is substantially planar.
11 . The lift pin guide assembly of claim 8 , wherein the first frustum has a slope from about 30 to about 60 degrees.
12 . The lift pin guide assembly of claim 6 , wherein the lift pin guide is substantially symmetrical along a vertical axis.
13 . The lift pin guide assembly of claim 6 , wherein a thickness of the flange is greater than a depth of the cylindrical recess.
14 . The lift pin guide assembly of claim 6 , wherein the lift pin guide is composed of a metal or a ceramic.
15 . The lift pin guide assembly of claim 6 , wherein the lift pin guide is composed of aluminum nitride.
16 . The lift pin guide assembly of claim 6 , wherein the spring is composed of a metal alloy.
17 . A lift pin guide assembly, comprising:
a lift pin;
a spring; and
a lift pin guide, comprising:
a ceramic body, comprising
a cylindrical main section;
a flange disposed at a first end of the cylindrical main section and having a diameter greater than a diameter of the cylindrical main section;
a cylindrical extension protruding beyond a first surface of the flange, the first surface of the flange opposite the cylindrical main section, and the cylindrical extension concentric with the cylindrical main section; and
a bore formed through the cylindrical main section and the cylindrical extension.
18 . The lift pin guide assembly of claim 17 , wherein the lift pin is made of quartz.
19 . The lift pin guide assembly of claim 17 , further comprising a cylindrical recess formed in the first surface of the flange.
20 . The lift pin guide assembly of claim 17 , further comprising a frustum within the bore.