IP Library › Granted Patent US 12,650,352
Granted Patent B2
US 12,650,352 · App. 18/555,591 · Granted Jun 9, 2026

Optical fiber pressure sensor using thermal pressure sensing

Inventors: Jean-Charles Beugnot (Boulot, FR); Jacques Chretien (Champagney, FR); Adrien Godet (Pirey, FR); Kien Phan Huy (Besancon, FR); Jérôme Salvi (Bonnevent Velloreille, FR)
Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE; UNIVERSITÉ MARIE ET LOUIS PASTEUR
G01L11/025G01L11/002G01L21/00
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Quick Facts
Patent No.
US 12,650,352
App. No.
18/555,591
Granted
Jun 9, 2026
Kind
B2
Abstract

A pressure-measuring device including an optical fibre with a thinned portion, a laser, called the heating laser, arranged to emit an optical wave, called the heating wave, into the thinned portion, a measuring means including a sensor that is arranged to measure a backscattered optical wave that is generated by an optical wave, called the interrogation wave, and that originates in the thinned portion of the optical fibre, and a processing unit arranged and/or programmed to measure a pressure of a fluid, preferably a gas, encircling the thinned portion, on the basis of the measurement of the backscattered wave.

Claims (33)

1 . A device for measuring pressure comprising:

an optical fiber comprising a thinned part formed by a reduced transverse cross-sectional area of the optical fiber which functions to transfer heat from the reduced transverse cross-sectional area to a surrounding fluid,

a first laser configured to emit an optical wave into the thinned part in order to cause an increase in temperature in the thinned part of the optical fiber,

a sensor configured to measure a backscattered optical wave coming from a fluid surrounding the thinned part of the optical fiber, and

a processing unit configured to trace back a pressure measurement via a determination of a temperature variation related to the backscattered optical wave.

2 . The device according to claim 1 , wherein the optical fiber does not comprise a Bragg grating and/or wherein the thinned part of the optical fiber does not comprise a metal surface treatment.

3 . The device according to claim 1 , wherein the sensor comprises a spectrometer.

4 . The device according to claim 1 , wherein the thinned part comprises a transverse cross-section of less than 50 micrometers, and the thinned part extends along a longitudinal direction of less than 150 millimeters.

5 . The device according to claim 1 , wherein the first laser has an emission wavelength less than or equal to 1650 nanometers.

6 . The device according to claim 1 , further comprising:

a coupler configured to:

divide the wave emitted by the first laser into a heating wave and an interrogation wave,

allow passage of the heating wave and the interrogation wave to the optical fiber in a first direction, and

allow passage of the backscattered wave from the thinned part to the sensor in a second direction.

7 . The device according to claim 6 , wherein the heating wave comprises a power of at least twice the power of the interrogation wave.

8 . The device according to claim 1 , wherein the sensor comprises:

a second laser configured to emit a second optical wave, into the optical fiber, the second optical wave having a wavelength shift relative to the optical wave less than or equal to 10 nanometers.

9 . The device according to claim 8 , further comprising:

a circulator configured to:

allow, in a first direction, passage of the heating wave from the laser and passage of the measurement wave from the second laser into the optical fiber, and

allow, in a second direction, passage of the backscattered wave from the thinned part to the sensor.

10 . The device according to claim 8 , wherein the sensor comprises a reflectometer.

11 . The device according to claim 1 , wherein the backscattered wave comprises a Rayleigh wave or a Raman wave or a Brillouin wave.

12 . The device according to claim 1 , wherein the processing unit is configured to deduce a vacuum pressure less than or equal to 0.9 bar.

13 . The device according to claim 1 , further comprising:

a second optical fiber comprising a second thinned part, the second optical fiber being connected in series to a free end of the optical fiber.

14 . A vacuum pressure measurement system, comprising:

a gauge placed in an enclosure in which a fluid circulates, said gauge comprising:

an optical fiber comprising a thinned part formed by a reduced transverse cross-sectional area of the optical fiber which functions to transfer heat from the reduced transverse cross-sectional area to a surrounding fluid;

a first laser configured to emit an optical wave into the thinned part in order to cause an increase in temperature in the thinned part of the optical fiber;

a sensor configured to measure a backscattered optical wave coming from a fluid surrounding the thinned part of the optical fiber; and

a processing unit configured to trace back a pressure measurement via a determination of a temperature variation related to the backscattered optical wave.

15 . A pressure measurement method comprising: emitting, using a first laser, an optical wave in a thinned heat transfer part of an optical fiber to cause an increase in temperature in the thinned heat transfer part of the optical fiber, the thinned part being formed by a reduced transverse cross-sectional area of the optical fiber which functions to transfer heat from the reduced transverse cross-sectional area to a surrounding fluid, measuring, using a sensor, a backscattered optical wave coming from a fluid surrounding the thinned heat transfer part of the optical fiber, and measuring tracing back, using a processing unit, a pressure measurement via a determination of a fluid surrounding the thinned part from the measurement of temperature variation related to the backscattered optical wave.

Assignments (2)
EMPLOYMENT AGREEMENT Recorded Feb 12, 2026
From: UNIVERSITÉ DE FRANCHE-COMTÉ
To: UNIVERSITÉ MARIE ET LOUIS PASTEUR
Reel/Frame 074935/0698 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 16, 2023
From: BEUGNOT, JEAN-CHARLES; CHRETIEN, JACQUES; GODET, ADRIEN; PHAN HUY, KIEN; SALVI, JÉRÔME
To: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE; UNIVERSITE DE FRANCHE-COMTE
Reel/Frame 065232/0917 →
Priority Claims (1)
FR 2104180 · Apr 21, 2021 · national
Continuity (1)
Related Publication 20240133759A1 · Apr 25, 2024
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