Scanning probe microscope

1 . A scanning probe microscope, comprising:

a probe which scans a sample;

a light source which irradiates the probe with excitation light via an objective lens; and

a detector which detects fluorescence generated at the probe,

wherein the scanning probe microscope further includes:

a reflective member arranged between the objective lens and the sample; and

a reflecting surface imaging device which images a reflecting surface of the reflective member.

2 . The scanning probe microscope according to claim 1 , further including a microwave antenna which irradiates the probe with microwaves,

wherein a first plane including a central axis of the probe and a central axis of the microwave antenna and a second plane including a central axis of the reflective member and a central axis of the reflecting surface imaging device intersect with each other.

3 . The scanning probe microscope according to claim 2 , wherein at least one of the first plane and the second plane includes an optical axis of the objective lens.

4 . The scanning probe microscope according to claim 3 , wherein an intersection between the first plane and the second plane coincides with the optical axis.

5 . The scanning probe microscope according to claim 1 , wherein the reflective member has a through hole through which an optical axis of the objective lens passes.

6 . The scanning probe microscope according to claim 1 , further including an imaging device driving unit which moves the reflecting surface imaging device parallel to an optical axis of the objective lens.

7 . The scanning probe microscope according to claim 1 , further including:

a microwave antenna which irradiates the probe with microwaves;

an antenna driving unit which controls a position of the microwave antenna; and

a probe driving unit which controls a position of the probe.

8 . The scanning probe microscope according to claim 1 , wherein the probe has a diamond or silicon carbide having a nitrogen-vacancy pair.