Sintering device and method

1 . A sintering device ( 10 ) for simultaneously connecting component parts of several electronic assemblies ( 22 ) arranged adjacent to one another by means of pressure sintering, with an upper tool ( 12 ) and a lower tool ( 14 ), comprising several first press plungers ( 16 ) assignable to the upper tool ( 12 ), and at least one second press plungers ( 18 ) assigned to the lower tool ( 14 ), between which the assemblies ( 22 ) are received, wherein each of the first press plungers ( 16 ) and/or each of the at least one second press plungers ( 18 ) is assigned a drive device ( 28 , 28 . 1 , 28 . 2 ) configured to exert a press force on one of the assemblies ( 22 ) by an axial movement of the assigned first press plunger ( 16 ) and/or of the assigned second press plunger ( 18 ) along an effective direction of the press force (P), wherein the first press plungers ( 16 ) are placed onto the assemblies ( 22 ) before the start of the pressing operation, and press the assemblies ( 22 ) against the at least one second press plunger ( 18 ) during the application of the press force.

2 . The sintering device ( 10 ) according to claim 1 , wherein the first press plungers ( 16 ) are braced against a pressure plate ( 20 ) of the upper tool ( 14 ), wherein the at least one drive device ( 28 , 28 . 2 ) of the lower tool ( 14 ) applies the press force (P) in an effective direction via the at least one second press plunger ( 18 ) in the direction of the upper tool ( 12 ), or that the at least one second press plunger ( 18 ) is braced against a pressure plate ( 20 ) of the lower tool ( 14 ) or is formed from said plate, wherein the at least one drive device ( 28 , 28 . 1 ) of the upper tool ( 12 ) applies the press force (P) in the effective direction of the lower tool ( 14 ).

3 . The sintering device ( 10 ) according to claim 1 , wherein a drive device ( 28 , 28 . 1 ) of the upper tool ( 12 ) is assigned to the several first press plungers ( 16 ) and a drive device ( 28 , 28 . 2 ) of the lower tool ( 14 ) to the several second press plungers ( 18 ), wherein each electronic assembly ( 22 ) is subjectable on both sides to the drive devices ( 28 , 28 . 1 , 28 . 2 ) of the upper tool ( 12 ) and of the lower tool ( 14 ) due to opposing effective directions of the press forces (P).

4 . The sintering device ( 10 ) according to claim 1 , wherein each drive device ( 28 , 28 . 1 , 28 . 2 ) is controllable individually in respect of a movement distance and/or an exerted press force (P), hydraulically, by electric motor, piezoelectrically or magnetostrictively.

5 . The sintering device ( 10 ) according to claim 1 , wherein each of the second press plungers ( 18 ) is connected to the assigned drive device ( 28 , 28 . 2 ) and/or has a respective heating and/or cooling device.

6 . The sintering device ( 10 ) according to claim 1 , wherein a carrier frame ( 30 ) insertable into the sintering device ( 10 ) is provided, in which at least the component parts of the assemblies ( 22 ), together with the placed first press plungers, are held in guided manner in the lateral direction, wherein the carrier frame ( 30 ) has penetrations ( 52 ), assigned to the assemblies ( 22 ), through which the second press plungers ( 18 ) can come into mechanical and thermal contact with the assemblies ( 22 , wherein the carrier frame ( 30 ) has a higher thermal expansion coefficient than an upper part of the assemblies ( 22 ).

7 . The sintering device ( 10 ) according to claim 6 , wherein at least one guide frame ( 32 ) is detachably arranged on the carrier frame ( 30 ), and is configured to guide the first press plungers ( 16 ) in the lateral direction relative to the assemblies ( 22 ).

8 . The sintering device ( 10 ) according to claim 1 , wherein each of the first and/or second press plungers ( 18 ) has a plunger element ( 42 ), axially movable along an effective direction of the press force (P), and a contact surface ( 48 ) contactable with a component part of the assembly ( 22 ), wherein the contact surface ( 48 ) is mounted tiltably about at least one spatial axis relative to the plunger element ( 42 ).

9 . The sintering device ( 10 ) according to claim 1 , wherein several first press plungers ( 16 ) arranged adjacent to another are assigned to a respective second press plunger ( 18 ), or several second press plungers ( 18 ) arranged adjacent to another are assigned to a respective first press plunger ( 16 ).

10 . A method for simultaneously connecting component parts of several electronic assemblies ( 22 ) arranged adjacent to one another by means of pressure sintering in a sintering device ( 10 ) according to claim 1 , wherein the sintering device ( 10 ) comprises several first press plungers ( 16 ) and at least one second press plungers ( 18 ), between which the assemblies ( 22 ) are received, and wherein each of the first press plungers ( 16 ) and/or the at least second press plunger ( 18 ) is movable for exerting a press force onto one of the assemblies ( 22 ) by means of an assigned drive device ( 28 , 28 . 1 , 28 . 2 ) axially along an effective direction of the press force (P), with the steps

placing the first press plungers ( 16 ) onto the assemblies ( 22 ),

inserting the assemblies ( 22 ) together with the first press plungers into the sintering device ( 10 ), into a position aligned with the second press plunger(s) ( 18 ),

performing the sintering operation by means of actuating the drive devices ( 28 , 28 . 1 , 28 . 2 ), in order to move the first press plungers ( 16 ) and/or the at least second press plunger ( 18 ), in order to generate the pressure, from a rest position into a working position in which the assemblies ( 22 ) are jointly pressed between the first press plungers ( 18 ) and the at least second press plunger ( 18 ) which is arranged opposite the first press plungers ( 16 ) for application of a counterforce.

11 . The method according to claim 10 , wherein at least the step of performing the sintering operation comprises heating and/or cooling of the first press plunger ( 16 ) and/or of the at least second press plunger ( 18 ), wherein the first press plunger ( 16 ) maintains a lower temperature level than the second press plunger ( 18 ).

12 . The method according to claim 10 , wherein the drive devices ( 28 , 28 . 1 , 28 . 2 ) for movement of the first press plungers ( 16 ) and/or the second press plungers ( 18 ) into the working position are actuated with a time delay.

13 . The method according to claim 12 , wherein the drive devices ( 28 , 28 . 1 , 28 . 2 ) are actuated with a time delay such that initially at least one drive device ( 28 , 28 . 1 , 28 . 2 ) arranged in a central area is actuated and drive devices ( 28 , 28 . 1 , 28 . 2 ) further outwards are actuated after a time interval.