Memory device having an array of vertical transistors with associated lines and method for forming the same
A three-dimensional memory device having vertical transistors and a method for forming the same are disclosed. In an example, the memory device includes an array of memory cells each including a vertical transistor. Along a first direction, one of the vertical transistors is arranged between two of separation structures in a plan view. Each of the separation structures includes a protrusion, and the separation structure and a corresponding protrusion are integral. The memory device also includes a plurality of bit lines that include at least one conductive layer. The at least one conductive layer is arranged between two protrusions of the two separation structures and on the one of vertical transistors to couple one of the bit lines with the one of the vertical transistors.
1 . A memory device, comprising:
an array of memory cells each comprising a vertical transistor, wherein along a first direction, one of the vertical transistors is arranged between two of separation structures in a plan view, each of the separation structures comprising a protrusion, and the separation structure and a corresponding protrusion being integral; and
a plurality of bit lines comprising at least one conductive layer, wherein:
two protrusions of the two separation structures extend from an end surface of the one of the vertical transistors to form a recess between the two protrusions of the two separation structures along the first direction; and
the at least one conductive layer is configured to fill the recess between the two protrusions of the two separation structures and is arranged on the end surface of the one of the vertical transistors to couple one of the bit lines with the one of the vertical transistors.
2 . The memory device of claim 1 , wherein:
the plan view is based on a first plane along the first direction; and
a projection of the at least one conductive layer, arranged between the two protrusions, on a second plane substantially has no overlapping with a projection of each of the two separation structures on the second plane, the second plane being perpendicular to the first plane.
3 . The memory device of claim 1 , further comprising:
a plurality of word lines extending in the first direction and configured to connect gates of the vertical transistors, a depth of one of the word lines being smaller than a depth of one of the separation structures.
4 . The memory device of claim 1 , wherein:
a capacitor is arranged in one or more inter-layer dielectric (ILD) layers at an opposite side of the bit lines.
5 . The memory device of claim 4 , wherein:
the array of memory cells is arranged in a main memory area; and
the memory device further comprises a capacitor contact arranged in a peripheral area outside the main memory area and electrically connected with the capacitor in the main memory area, the capacitor contact extending in a third direction along which the vertical transistors extend and comprising a joint portion, and sidewalls of the capacitor contact comprising a staggered profile at the joint portion.
6 . The memory device of claim 1 , wherein:
a surface of the at least one conductive layer of the bit lines is substantially flush with a surface of the two protrusions of the two separation structures.
7 . The memory device of claim 1 , wherein the at least one conductive layer comprises:
a contact layer arranged between the two protrusions and in contact with the one of the vertical transistors; and
a metal layer arranged between the two protrusions and on the contact layer.
8 . The memory device of claim 1 , wherein:
the at least one conductive layer comprises an interconnect layer arranged between the two protrusions and in contact with the one of the vertical transistors, the interconnect layer being arranged in a main memory area; and
a sacrificial layer is arranged in a peripheral area outside the main memory area, a surface of the interconnect layer in the main memory area is substantially flush with a surface of the sacrificial layer in the peripheral area.
9 . The memory device of claim 8 , wherein the bit lines further comprise a metal layer disposed in one or more inter-layer dielectric (ILD) layers and arranged on and in contact with the interconnect layer.
10 . The memory device of claim 9 , wherein the metal layer comprises a metal dot disposed on the interconnect layer.
11 . The memory device of claim 9 , wherein:
the interconnect layer is disconnected in a second direction perpendicular to the first direction; and
the metal layer comprises a metal wire connecting the interconnect layer.
12 . A memory system, comprising:
a memory device configured to store data and comprising:
a first semiconductor structure comprising peripheral circuits; and
a second semiconductor structure bonded to the first semiconductor structure and comprising:
an array of memory cells each comprising a vertical transistor, wherein along a first direction, one of the vertical transistors is arranged between two of separation structures in a plan view, each of the separation structures comprising a protrusion, and the separation structure and a corresponding protrusion being integral; and
a plurality of bit lines comprising at least one conductive layer, wherein:
two protrusions of the two separation structures extend from an end surface of the one of the vertical transistors to form a recess between the two protrusions of the two separation structures along the first direction; and
the at least one conductive layer is configured to fill the recess between the two protrusions of the two separation structures and is arranged on the end surface of the one of the vertical transistors to couple one of the bit lines with the one of the vertical transistors, the memory cells being coupled to the peripheral circuits through the bit lines; and
a memory controller coupled to the memory device and configured to control the memory cells through the peripheral circuits.
13 . A method of forming a memory device, comprising:
forming a plurality of separation structures;
forming an array of memory cells each comprising a vertical transistor, wherein along a first direction perpendicular to a second direction along which the separation structures extend, one of the vertical transistors is arranged between two of the separation structures in a plan view;
forming a plurality of protrusions each on one of the separation structures; and
forming a plurality of bit lines comprising at least one conductive layer, wherein:
two protrusions of the two separation structures extend from an end surface of the one of the vertical transistors to form a recess between the two protrusions of the two separation structures along the first direction; and
the at least one conductive layer is configured to fill the recess between the two protrusions of the two separation structures and is arranged on the end surface of the one of the vertical transistors to couple one of the bit lines with the one of the vertical transistors.
14 . The method of claim 13 , further comprising:
forming a capacitor contact in a peripheral area outside a main memory area and electrically connected with a capacitor in the main memory area, the capacitor being connected with the one of the vertical transistors at an opposite side of the bit lines, wherein the capacitor contact extends in a third direction along which the vertical transistors extend and comprises a joint portion, sidewalls of the capacitor contact comprising a staggered profile at the joint portion.
15 . The method of claim 14 , wherein forming the plurality of separation structures comprises:
preparing a transfer substrate comprising a cut layer in a silicon substrate and a device layer comprising an oxide pad layer on the silicon substrate, and a sacrificial layer on the oxide pad layer;
splitting a device layer off from the transfer substrate along the cut layer;
bonding a front side of the device layer to a carrier substrate to form a third semiconductor structure;
removing a portion of the third semiconductor structure to form a plurality of fourth trenches along the second direction; and
filling a third dielectric material into each of the plurality of fourth trenches to form the separation structures.
16 . The method of claim 14 , wherein forming the plurality of separation structures comprises:
preparing a transfer substrate comprising a silicon substrate, a cut layer in the silicon substrate, and an oxide pad layer on the silicon substrate;
forming a sacrificial layer on the oxide pad layer;
removing a portion of the oxide pad layer and the sacrificial layer in a device layer of the transfer substrate to form a plurality of third trenches along the second direction;
filling a second dielectric material into each of the plurality of third trenches to form the separation structures;
splitting the device layer from the transfer substrate along the cut layer;
bonding a front side of the device layer to a carrier substrate to form a first semiconductor structure; and
removing a back side of the device layer to expose the separation structures.
17 . The method of claim 16 , wherein:
the portion of the oxide pad layer and the sacrificial layer as removed is a first portion of the oxide pad layer and the sacrificial layer;
the array of memory cells is arranged in a main memory area; and
a second portion of the oxide pad layer and the sacrificial layer remains in a peripheral area outside the main memory area.
18 . The method of claim 13 , wherein forming the plurality of separation structures comprises:
preparing a substrate comprising a device layer, a handle layer, and a buried oxide (BOX) layer between the device layer and the handle layer;
removing, at least through the BOX layer, a first portion of the device layer and the handle layer to form a plurality of first trenches along the second direction; and
filling a first dielectric material into each of the plurality of first trenches to form the separation structures in the substrate.
19 . The method of claim 18 , further comprising:
removing a second portion of the device layer to form a plurality of second trenches along the first direction, wherein:
forming the memory cells comprises forming the vertical transistors corresponding to the second trenches; and
the method further comprises forming a plurality of word lines each corresponding to one of the second trenches and configured to connect gates of the vertical transistors in a row of the array of memory cells.
20 . The method of claim 19 , wherein a depth of one of the second trenches is less than a depth of one of the first trenches.