System and method for reducing pellicle rupture
A reinforcement system includes a framed pellicle, which includes a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the framed pellicle and the pellicle frame.
1 . A reinforcement system comprising:
a framed pellicle comprising:
a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame;
an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame; and
electronic circuitry disposed on or in the pellicle frame and connected to the edge reinforcement by a wire connection configured to monitor electrical continuity in the edge reinforcement and detect a rupture in the framed pellicle, wherein the wire connection is disposed, at least partially, on or in the edge reinforcement.
2 . The reinforcement system of claim 1 , wherein the edge reinforcement is positioned on a top side of the framed pellicle such that it contacts the peripheral part of the pellicle and the center part of the pellicle.
3 . The reinforcement system of claim 1 , wherein a thickness of the edge reinforcement is greater than 5 times a thickness of the pellicle.
4 . The reinforcement system of claim 1 , wherein the edge reinforcement further comprises four corner reinforcements, the four corner reinforcements having an interior curved section.
5 . The reinforcement system of claim 4 , wherein the edge reinforcement at the four corner reinforcements is thicker than sections of the edge reinforcement between the four corner reinforcements.
6 . The reinforcement system of claim 1 , wherein the edge reinforcement further comprises a conductive material selected from the group consisting of a doped polysilicon, a doped single crystal silicon, a metal, a semiconductor, a metal alloy, or combinations thereof.
7 . The reinforcement system of claim 6 , further comprising a piezoelectric element between metal electrodes that are configured to be in contact with the edge reinforcement and connected to the electronic circuitry.
8 . The reinforcement system of claim 6 , further comprising a serpentine line structure positioned in the edge reinforcement, wherein the serpentine line structure is configured to detect deflection of the pellicle.
9 . The reinforcement system of claim 6 , further comprising a capacitive strain gauge positioned in the edge reinforcement, wherein the capacitive strain gauge is configured to detect deflection of the pellicle.
10 . The reinforcement system of claim 6 , further comprising an accelerometer connected to the framed pellicle, wherein the accelerometer is configured to detect motion.
11 . The reinforcement system of claim 6 , further comprising a clock configured to record the time of the rupture in the electrical continuity.
12 . A deflection monitoring method comprising:
providing a framed pellicle comprising:
a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and
an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame;
connecting electronic circuitry to the edge reinforcement by a wire connection;
providing a deflection measure means on the edge reinforcement and connecting the deflection measure means to the electronic circuitry;
periodically measuring a voltage generated by the deflection measure means; and
detecting a pellicle deflection in the edge reinforcement by a measured increased voltage above a predetermined threshold.
13 . The method of claim 12 , further comprising providing an external device that is configured to activate the monitoring of the electrical continuity in the edge reinforcement.
14 . The method of claim 12 , further comprising an accelerometer that is configured to determine whether the pellicle is in motion and adjusting an interval at which the voltage is measured to the determined motion.
15 . The method of claim 12 , wherein the deflection measure means on the edge reinforcement comprise a piezoelectric element, a serpentine line structure, a capacitive strain gauge and/or combinations thereof.
16 . The method of claim 12 , further comprising communicating the detection of the pellicle deflection to an external computer.
17 . A rupture determination method comprising:
providing a framed pellicle comprising:
a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to the pellicle frame; and
an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame;
connecting electronic circuitry to the edge reinforcement by a wire connection, wherein the electronic circuitry is disposed on or in the pellicle frame, wherein the wire connection is disposed, at least partially, on or in the edge reinforcement;
monitoring an electrical continuity in the edge reinforcement by the electronic circuitry; and
detecting a pellicle rupture in the edge reinforcement by detection of an interrupted electronic circuit.
18 . The method of claim 17 , further comprising communicating the pellicle rupture to an external device.
19 . The method of claim 18 , further comprising providing a clock and communicating the time of the pellicle rupture to the external device.