IP Library Granted Patent US 12,689,356
Granted Patent B2
US 12,689,356 · App. 18/747,555 · Granted Jul 21, 2026

Acoustic resonator filter structure with tunable shunt coupled resonator filter

Inventor: Nadim Khlat (Cugnaux, FR)
Assignee: Qorvo US, Inc.
H03H9/568H03H9/205
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Quick Facts
Patent No.
US 12,689,356
App. No.
18/747,555
Filed
Jun 19, 2024
Granted
Jul 21, 2026
Kind
B2
Art Unit
2836
USPC
333/187
Abstract

An acoustic resonator filter structure with a tunable shunt coupled resonator filter (CRF) is provided. Herein, the acoustic resonator filter structure is a stacked structure that includes a series resonator filter die and a tunable shunt CRF die. By stacking the series resonator filter die and the tunable shunt CRF die according to various embodiments, it is possible to reduce a footprint of the acoustic resonator filter structure, thus making it possible to incorporate multiple acoustic resonator filter structures in an acoustic ladder filter network.

Claims (41)

1 . An acoustic resonator filter structure comprising:

a series resonator filter die configured to resonate at a series resonance frequency to pass a signal from an input node to an output node; and

a tunable shunt coupled resonator filter (CRF) die configured to resonate at a tunable parallel resonance frequency to block the signal between the input node and the output node, the tunable shunt CRF die comprises:

a ferroelectric input shunt resonator coupled to the input node and configured to resonate at the tunable parallel resonance frequency;

a ferroelectric output shunt resonator coupled to the output node and configured to resonate at the tunable parallel resonance frequency; and

a coupling layer configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator to thereby modify the tunable parallel resonance frequency.

2 . The acoustic resonator filter structure of claim 1 , wherein the series resonator filter die is disposed atop the tunable shunt CRF die.

3 . The acoustic resonator filter structure of claim 2 , wherein the series resonator filter die comprises:

a ferroelectric series resonator configured to resonate at the series resonance frequency; and

a pair of reflectors provided above and below the ferroelectric series resonator.

4 . The acoustic resonator filter structure of claim 2 , wherein the coupling layer is coupled to a tuning circuit and configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator in response to receiving a tuning voltage from the tuning circuit.

5 . The acoustic resonator filter structure of claim 1 , wherein the series resonator filter die is disposed underneath the tunable shunt CRF die.

6 . The acoustic resonator filter structure of claim 5 , wherein the series resonator filter die comprises:

a ferroelectric series resonator configured to resonate at the series resonance frequency; and

a pair of reflectors provided above and below the ferroelectric series resonator.

7 . The acoustic resonator filter structure of claim 5 , wherein the coupling layer is coupled to a tuning circuit and configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator in response to receiving a tuning voltage from the tuning circuit.

8 . An acoustic ladder filter network comprising a plurality of acoustic resonator filter structures each comprising:

a series resonator filter die configured to resonate at a series resonance frequency to pass a signal from an input node to an output node; and

a tunable shunt coupled resonator filter (CRF) die configured to resonate at a tunable parallel resonance frequency to block the signal between the input node and the output node;

wherein each pair of the plurality of acoustic resonator filter structures is separated by a conventional resonator filter.

9 . A wireless device comprising at least one acoustic resonator filter structure, the at least one acoustic resonator filter structure comprises:

a series resonator filter die configured to resonate at a series resonance frequency to pass a signal from an input node to an output node; and

a tunable shunt coupled resonator filter (CRF) die configured to resonate at a tunable parallel resonance frequency to block the signal between the input node and the output node, the tunable shunt CRF die comprises:

a ferroelectric input shunt resonator coupled to the input node and configured to resonate at the tunable parallel resonance frequency;

a ferroelectric output shunt resonator coupled to the output node and configured to resonate at the tunable parallel resonance frequency; and

a coupling layer configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator to thereby modify the tunable parallel resonance frequency.

10 . The wireless device of claim 9 , wherein:

the series resonator filter die is disposed atop the tunable shunt CRF die;

the series resonator filter die comprises:

a ferroelectric series resonator configured to resonate at the series resonance frequency; and

a pair of reflectors provided above and below the ferroelectric series resonator.

11 . The wireless device of claim 10 , wherein the coupling layer is coupled to a tuning circuit and configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator in response to receiving a tuning voltage from the tuning circuit.

12 . The wireless device of claim 9 , wherein the series resonator filter die is disposed underneath the tunable shunt CRF die.

13 . The wireless device of claim 12 , wherein the series resonator filter die comprises:

a ferroelectric series resonator configured to resonate at the series resonance frequency; and

a pair of reflectors provided above and below the ferroelectric series resonator.

14 . The wireless device of claim 12 , wherein the coupling layer is coupled to a tuning circuit and configured to be polarized relative to the ferroelectric input shunt resonator and the ferroelectric output shunt resonator in response to receiving a tuning voltage from the tuning circuit.

15 . A method for configuring an acoustic ladder filter network comprising:

configuring a series resonator filter die in each of a plurality of acoustic resonator filter structures to resonate at a series resonance frequency to pass a signal from an input node to an output node;

configuring a tunable shunt coupled resonator filter (CRF) die in each of the plurality of acoustic resonator filter structures to resonate at a tunable parallel resonance frequency to block the signal between the input node and the output node; and

separating each pair of the plurality of acoustic resonator filter structures by a conventional resonator filter.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2024
From: KHLAT, NADIM
To: QORVO US, INC.
Reel/Frame 067767/0696 →
Continuity (2)
Provisional Application 63513941 · Jul 17, 2023
Related Publication 20250030404A1 · Jan 23, 2025
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