IP Library › Granted Patent US 12,730,200
Granted Patent B2
US 12,730,200 · App. 17/947,988 · Granted Sep 8, 2026

Lidar systems with planar multi-pixel sensing arrays

Inventors: Alexander Yukio Piggott (Mountain View, CA); Jason Watson (San Jose, CA); Lin Liu (Santa Clara, CA); Blaise Laurent Patrick Gassend (East Palo Alto, CA); Ralph Hamilton Shepard (San Jose, CA)
Assignee: Waymo LLC
G01S7/4914G01S7/4817G01S7/4911G01S7/4917G01S7/499G01S17/58
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Quick Facts
Patent No.
US 12,730,200
App. No.
17/947,988
Granted
Sep 8, 2026
Kind
B2
Abstract

The subject matter of this specification can be implemented in, among other things, systems and methods of optical sensing for pixel multiplexing and polarized beam steering. Described, among other things, is a system that includes a light source configured to generate a light and one or more optical devices, integrated on a photonic integrated circuit, configured to impart modulation to the generated light and deliver the modulated light to an interface coupling device. The interface coupling device can include a plurality of interface couplers (ICs), each IC configured to scatter the modulated light in a direction that makes at least 5 degrees with an optical axis of lens configured to transmit the light scattered by each IC along a respective direction of a plurality of directions.

Claims (47)

1 . An optical system comprising:

a light source configured to generate a light;

one or more optical devices, integrated in a photonic integrated circuit (PIC), configured to:

impart modulation to the generated light, and

deliver the modulated light to an interface coupling device; and

the interface coupling device, comprising:

a plurality of interface couplers (ICs) integrated on the PIC, wherein each IC is configured to scatter the modulated light in a direction that makes at least an angle of 5 degrees with an optical axis of a first lens; and

the first lens configured to transmit the light scattered by each IC along a respective direction of a plurality of directions.

2 . The optical system of claim 1 , wherein the plurality of ICs comprises at least a sub-plurality of ICs positioned around a curve within a plane of the PIC.

3 . The optical system of claim 1 , wherein the interface coupling device further comprises one or more optical elements configured to redirect the light scattered by the plurality of ICs.

4 . The optical system of claim 3 , wherein the one or more optical elements are located at a focal plane of the first lens.

5 . The optical system of claim 3 , wherein the one or more optical elements comprise a second lens configured to focus the light scattered by the plurality of ICs.

6 . The optical system of claim 5 , wherein the second lens is configured to focus the light scattered by the plurality of ICs at a point on the optical axis of the first lens.

7 . The optical system of claim 3 , wherein the one or more optical elements comprise a plurality of lenses, each lens of the plurality of lenses configured to redirect the light scattered by a respective IC of the plurality of ICs.

8 . The optical system of claim 3 , wherein the one or more optical elements comprise a plurality of prisms, each prism of the plurality of prism configured to redirect the light scattered by a respective IC of the plurality of ICs.

9 . The optical system of claim 3 , wherein the one or more optical elements comprise one or more diffraction gratings, wherein each diffraction grating is configured to redirect the light scattered by at least one of the plurality of ICs.

10 . The optical system of claim 1 , wherein each IC of the plurality of ICs comprises a diffraction grating.

11 . The optical system of claim 1 , wherein at least one IC of the plurality of ICs is configured to receive a light generated upon reflection of the transmitted light from an object, and wherein the optical system is further configured to determine, using the received light, at least one of a distance to the object or a speed of the object.

12 . An optical system comprising:

a light source configured to generate a light;

one or more optical devices, integrated in a photonic integrated circuit (PIC), configured to:

impart modulation to the generated light, and

deliver the modulated light to an interface coupling device; and

the interface coupling device, comprising:

a first interface coupler (IC), integrated in the PIC, configured to produce, from the modulated light, a transmitted (TX) light, wherein the TX light has a first polarization;

a second IC, integrated in the PIC, configured to receive a received (RX) light generated upon interaction of the TX light with an object, wherein the RX light has a second polarization; and

one or more polarization-sensitive diffraction optical elements (DOEs) configured to change direction of at least one of the TX light or the RX light.

13 . The optical system of claim 12 , wherein the one or more polarization-sensitive DOEs comprise a first DOE configured to change direction of at least one of the TX light or the RX light.

14 . The optical system of claim 13 , wherein the one or more polarization-sensitive DOEs comprise a second DOE configured to change direction of at least the other one of the TX light or the RX light.

15 . The optical system of claim 12 , wherein the interface coupling device further comprises:

a polarizing element configured to impart a polarization change to the TX light.

16 . The optical system of claim 15 , wherein the polarization change of the TX light is from a linear polarization to a circular polarization.

17 . A method comprising:

generating a light using a light source;

imparting modulation to the generated light;

delivering the modulated light to an interface coupling device comprising a plurality of interface couplers (ICs) integrated on a photonic integrated circuit (PIC);

scattering the modulated light, using the plurality of ICs, wherein each IC is configured to scatter the modulated light in a direction that makes at least an angle of 5 degrees with an optical axis of a first lens; and

transmitting through the first lens the light scattered by each IC along a respective direction of a plurality of directions.

18 . The method of claim 17 , further comprising:

redirecting, using one or more optical elements, the light scattered by the plurality of ICs.

19 . The method of claim 18 , wherein the one or more optical elements comprise at least one of:

a second lens,

a plurality of prisms, or

one or more diffraction gratings.

20 . The method of claim 17 , further comprising:

receiving, by at least one IC of the plurality of ICs, a light generated upon reflection of the transmitted light from an object; and

determining, using the received light, at least one of a distance to the object or a speed of the object.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2022
From: PIGGOTT, ALEXANDER YUKIO; WATSON, JASON; LIU, LIN; GASSEND, BLAISE LAURENT PATRICK; SHEPARD, RALPH HAMILTON
To: WAYMO LLC
Reel/Frame 061246/0464 →
Continuity (1)
Related Publication 20240094360A1 · Mar 21, 2024
References Cited (44)
US 8112223B2 · Jordan et al. · 2012 [cited by applicant]
US 9513497B2 · Guzzon et al. · 2016 [cited by applicant]
US 9851470B2 · Henderson · 2017 [cited by applicant]
US 10436906B2 · Droz · 2019 [cited by applicant]
US 10686523B1 · Gleason et al. · 2020 [cited by applicant]
US 11112503B2 · Fried · 2021 [cited by examiner]
US 12061249B1 · Loui et al. · 2024 [cited by applicant]
US 20020159128A1 · Green · 2002 [cited by applicant]
US 20100001744A1 · Hirayama et al. · 2010 [cited by applicant]
US 20140254972A1 · Fujino et al. · 2014 [cited by applicant]
US 20180128974A1 · Iida et al. · 2018 [cited by applicant]
US 20180372951A1 · Hashiya et al. · 2018 [cited by applicant]
US 20190391243A1 · Nicolaescu · 2019 [cited by applicant]
US 20200249351A1 · Chen et al. · 2020 [cited by applicant]
US 20200256958A1 · Piggott · 2020 [cited by applicant]
US 20200284883A1 · Ferreira · 2020 [cited by examiner]
US 20210382142A1 · Rogers et al. · 2021 [cited by applicant]
US 20210405290A1 · Hayenga et al. · 2021 [cited by applicant]
US 20230027271A1 · Jin et al. · 2023 [cited by applicant]
US 20250013081A1 · Menard et al. · 2025 [cited by applicant]
Aalto et al., “Open-Access 3-μm SOI Waveguide Platform for Dense Photonic Integrated Circuits”, in IEEE Journal of Selected Topics in Quantum Electronics, vol. 25, No. 5, pp. 1-9 (2019). [cited by applicant]
Chung et al., “Low-power thermo-optic silicon modulator for large-scale photonic integrated systems”, Opt. Express 27, 13430-13459 (2019). [cited by applicant]
Cook, et al., “Polysilicon Grating Switches for LiDAR”, Journal of Microelectromechanical Systems, vol. 29, No. 5, pp. 1008-1013 (2020). [cited by applicant]
Dickson et al., “Holographic polarization-separation elements”, Appl. Opt. 33, 5378-5385 (1994). [cited by applicant]
Gajda et al., “Design rules for p-i-n diode carriers sweeping in nano-rib waveguides on SOI”, Opt. Express 19, 9915-9922 (2011). [cited by applicant]
Inoue et al., “Demonstration of a new optical scanner using silicon photonics integrated circuit”, Opt. Express 27, 2499-2508 (2019). [cited by applicant]
Lalanne et al., “A transmission polarizing beam splitter grating”, Journal of Optics A: Pure and Applied Optics, vol. 1, No. 2 (1999). [cited by applicant]
Lee et al., “Silicon Photonic Switch Fabrics: Technology and Architecture”, Journal of Lightwave Technology, vol. 37, No. 1, pp. 6-20 (2019). [cited by applicant]
Li et al., “Lens-based integrated 2D beam-steering device with defocusing approach and broadband pulse operation for Lidar application”, Opt. Express 27, 32970-32983 (2019). [cited by applicant]
Marchetti, et al., “Coupling strategies for silicon photonics integrated chips [Invited]”, Photon. Res. 7, 201-239 (2019). [cited by applicant]
Masood et al., “Comparison of heater architectures for thermal control of silicon photonic circuits”, 10th International Conference on Group IV Photonics, (2013). [cited by applicant]
Michaels A., EMOpt (2020), https://emopt.readthedocs.io/en/latest/tutorial_2D_grating_coupler.html. [cited by applicant]
Mu et al., “Edge Couplers in Silicon Photonic Integrated Circuits: A Review”, Applied Sciences, 2020, vol. 10, 29 pages. [cited by applicant]
Oh et al., “Achromatic diffraction from polarization gratings with high efficiency”, Opt. Lett. 33, 2287-2289 (2008). [cited by applicant]
Piggott, A., “Understanding the physics of coherent LiDAR”, arXiv:2011.05313 (2020). [cited by applicant]
Rogers et al., “A universal 3D imaging sensor on a silicon photonics platform”, Nature 590, 256-261 (2021). [cited by applicant]
Rong et al., “An all-silicon Raman laser”, Nature 433, 292-294 (2005). [cited by applicant]
Tu et al., “State of the Art and Perspectives on Silicon Photonic Switches”, Micromachines 2019, 10, 51. [cited by applicant]
Turner-Foster et al., “Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides”, Opt. Express 18, 3582-3591 (2010). [cited by applicant]
Aeye iDAR “iDAR is Smarther than LiDAR”, aeye.ai/idar/, retrieved Oct. 20, 2020, 11 pages. [cited by applicant]
Aurora “FMCW Lidar: The Self-Driving Game-Changer” medium.com/aurora-blog/fmcw-lidar-the-self-driving-game-changer-194fd311fd0e9, Apr. 9, 2020, retreived on Oct. 20, 2020, 6 pages. [cited by applicant]
GreenCarCongress.com “Aeva Announces Aeries 4D FMCW Lidar-on-chip for Autonomous Driving; Recent Porsche Investment”, greecarcongress.com/2019/12/20191212.aeva.html, Dec. 12, 2019, 11 pages. [cited by applicant]
Lekavich, J., “Basics of Acousto-Optic Devices”, Lasers & Applications Apr. 1986, pp. 59-64. [cited by applicant]
Zhu H., et al., “On-Chip Optical Power Monitor Using Periodically Interleaved P-N Junctions Integrated on a Silicon Waveguide,” IEEE Journal of Selected Topics in Quantum Electronics, Jul./Aug. 2014, vol. 20(4), 8 Pages. [cited by applicant]