Semiconductor devices
A semiconductor device includes a bit line on a substrate, a gate electrode on the bit line, a gate insulation pattern on a sidewall of the gate electrode, a channel that contacts an upper surface of the bit line and a sidewall of the gate insulation pattern, an oxide semiconductor pattern that contacts an upper sidewall of the channel, and a contact plug that contacts an upper surface of the channel and an upper surface of the oxide semiconductor pattern. The channel includes an amorphous oxide semiconductor material. The oxide semiconductor pattern includes a crystalline oxide semiconductor material.
1 . A semiconductor device comprising:
a bit line on a substrate;
a gate electrode on the bit line;
a gate insulation pattern on a sidewall of the gate electrode;
a channel that contacts an upper surface of the bit line and a sidewall of the gate insulation pattern, the channel including an amorphous oxide semiconductor material;
an oxide semiconductor pattern that contacts an upper sidewall of the channel, the oxide semiconductor pattern including a crystalline oxide semiconductor material; and
a contact plug that contacts a top surface of the channel and an upper surface of the oxide semiconductor pattern.
2 . The semiconductor device according to claim 1 , wherein a sidewall of the contact plug and a sidewall of the oxide semiconductor pattern are aligned with each other in a vertical direction substantially perpendicular to an upper surface of the substrate.
3 . The semiconductor device according to claim 1 , wherein the upper surface of the channel is substantially coplanar with the upper surface of the oxide semiconductor pattern.
4 . The semiconductor device according to claim 1 , wherein a distance of a top surface of the gate insulation pattern from an upper surface of the substrate is greater than a distance of a top surface of the channel from the upper surface of the substrate.
5 . The semiconductor device according to claim 4 , wherein the gate insulation pattern is between the gate electrode and the channel.
6 . The semiconductor device according to claim 1 , wherein the gate insulation pattern is on a lower surface of the gate electrode.
7 . The semiconductor device according to claim 1 , further comprising an insulation pattern between the gate electrode and the contact plug, wherein the insulation pattern separates the gate electrode and the contact plug from each other.
8 . The semiconductor device according to claim 7 , wherein the insulation pattern is on another sidewall of the gate electrode, another sidewall of the gate insulation pattern and an upper surface of a portion of the channel that contacts the upper surface of the bit line.
9 . The semiconductor device according to claim 7 , wherein the insulation pattern is on another sidewall of the gate electrode and an upper surface of a portion of the gate insulation pattern that contacts a portion of an upper surface of the channel.
10 . The semiconductor device according to claim 1 , further comprising a capacitor on the contact plug.
11 . A semiconductor device comprising:
a bit line on a substrate;
a gate electrode on the bit line;
a gate insulation pattern on a sidewall of the gate electrode;
a channel that contacts an upper surface of the bit line and a sidewall of the gate insulation pattern;
an oxide semiconductor pattern that contacts an upper portion of a sidewall of the channel; and
a contact plug that contacts a top surface of the channel and an upper surface of the oxide semiconductor pattern,
wherein a sidewall of the contact plug and a sidewall of the oxide semiconductor pattern are aligned with each other in a vertical direction substantially perpendicular to an upper surface of the substrate.
12 . The semiconductor device according to claim 11 , wherein the bit line extends in a first direction substantially parallel to the upper surface of the substrate, and
wherein, in the first direction, a sidewall of the contact plug is aligned with a sidewall of the oxide semiconductor pattern.
13 . The semiconductor device according to claim 11 , wherein in a first direction substantially parallel to the upper surface of the substrate:
the gate insulation pattern is on a sidewall of the gate electrode,
the channel contacts a sidewall of the gate insulation pattern, and
the oxide semiconductor pattern contacts an upper portion of a sidewall of the channel.
14 . The semiconductor device according to claim 11 , further comprising an insulation pattern between the gate electrode and the contact plug, wherein the insulation pattern separates the gate electrode and the contact plug from each other,
wherein the insulation pattern contacts another sidewall of the gate electrode in a first direction substantially parallel to the upper surface of the substrate.
15 . The semiconductor device of claim 11 , wherein the channel includes an amorphous oxide semiconductor material, and the oxide semiconductor pattern includes a crystalline oxide semiconductor material.
16 . A semiconductor device comprising:
bit lines on a substrate, wherein the bit lines each extend in a first direction substantially parallel to an upper surface of the substrate, and wherein the bit lines are spaced apart from each other in a second direction that is substantially parallel to the upper surface of the substrate and intersects the first direction;
gate electrodes that extend in the second direction on the bit lines, wherein the gate electrodes are spaced apart from each other in the first direction;
a gate insulation pattern on a sidewall of each of the gate electrodes;
a channel that contacts an upper surface of each of the bit lines and a sidewall of the gate insulation pattern, wherein the channel includes an amorphous oxide semiconductor material;
an oxide semiconductor pattern that contacts an upper portion of a sidewall of the channel, wherein the oxide semiconductor pattern includes a crystalline oxide semiconductor material;
a contact plug that contacts a top surface of the channel and an upper surface of the oxide semiconductor pattern; and
a capacitor on the contact plug.
17 . The semiconductor device according to claim 16 , wherein a sidewall of the contact plug in the first direction and a sidewall of the oxide semiconductor pattern in the first direction are aligned in a vertical direction substantially perpendicular to the upper surface of the substrate.
18 . The semiconductor device according to claim 16 , wherein the top surface of the channel is substantially coplanar with the upper surface of the oxide semiconductor pattern.
19 . The semiconductor device according to claim 16 , wherein a distance of an upper surface of the gate insulation pattern from an upper surface of the substrate is greater than a distance of an upper surface of the channel from the upper surface of the substrate.
20 . The semiconductor device according to claim 16 , further comprising an insulation pattern between each of the gate electrodes and the contact plug, wherein the insulation pattern separates each of the gate electrodes and the contact plug from each other.