Optical system, laser spot position determination process, and calibration process for deterministically shaping substrates using laser pulses
View Patent ↗Methods for determining laser pulse positions for shaping an optical element may comprise: determining a stress field for at least a portion of a substrate, wherein the stress field comprises at least three components of stress, wherein the stress field comprises a plurality of stress states for the at least a portion of the substrate; determining, based at least on the stress field and a calibration model, a spot density over the at least a portion of the substrate; determining, based on the spot density, a laser spot position allocation that arranges a number of laser pulses into a minimum number of lines that achieves the spot density; and causing, based on the laser spot position allocation, output of a machine program that coordinates a rotation stage, beam shaping, a translation stage, and a laser firing parameter for surface shaping of the at least a portion of the substrate.
1 . A method for determining laser pulse positions for shaping an optical element, the method comprising:
determining, based at least on a computational model and a target substrate deformation, a stress field for at least a portion of a substrate, wherein the stress field comprises at least three components of stress, wherein the stress field comprises a plurality of stress states for the at least a portion of the substrate;
determining, based at least on the stress field and a calibration model, a spot density over the at least a portion of the substrate;
determining, based on the spot density, a laser spot position allocation that arranges a number of laser pulses into a minimum number of lines that achieves the spot density; and
causing, based on the laser spot position allocation, output of a machine program that coordinates a rotation stage, beam shaping, a translation stage, and a laser firing parameter for surface shaping of the at least a portion of the substrate.
2 . The method of claim 1 , wherein the determining a stress field is based on one or more of surface measurement or substrate geometry.
3 . The method of claim 1 , wherein the calibration model comprises a plurality of calibration constants derived from the stress field.
4 . The method of claim 1 , determining, based at least on the stress field and a calibration model, a spot density over the at least a portion of the substrate comprises writing laser pulses in a plurality of patterns over a comparative sample made of the same material as the at least a portion of the substrate.
5 . The method of claim 1 , wherein the plurality of stress states comprises six stress states.
6 . The method of claim 1 , wherein the plurality of stress states comprises six integrated stress states generated per unit of areal pulse density.
7 . The method of claim 1 , wherein the laser firing parameter comprises one or more of energy, duration, spatial shape, or polarization.
8 . A system for implementing the method of claim 1 .
9 . The system of claim 8 , wherein the system comprises one or more of a laser source, a polarization stage, a beam orientation stage, an optical relay system, an objective lens, or an XYZ stage.
10 . A method for determining laser pulse positions for shaping an optical element, the method comprising:
determining, based at least on a computational model and a target substrate deformation, a stress field for at least a portion of a substrate, wherein the stress field comprises at least three components of stress, wherein the stress field comprises a plurality of stress states for the at least a portion of the substrate;
determining, based on the stress field, one or more calibration constants;
determining, based on at least on the one or more calibration constants, a spot density over the at least a portion of the substrate;
determining, based on the spot density, a laser spot position allocation that arranges a number of laser pulses into a minimum number of lines that achieves the spot density; and
causing, based on the laser spot position allocation, output of a machine program that coordinates a rotation stage, a translation stage, and a laser firing for surface shaping of the at least a portion of the substrate.
11 . The method of claim 10 , wherein the determining a stress field is based on one or more of surface measurement or substrate geometry.
12 . The method of claim 10 , determining, based on at least on the one or more calibration constants, a spot density over the at least a portion of the substrate comprises writing laser pulses in a plurality of patterns over a comparative sample made of the same material as the at least a portion of the substrate.
13 . A system for implementing the method of claim 10 .
14 . The system of claim 13 , wherein the system comprises one or more of a laser source, a polarization stage, a beam orientation stage, an optical relay system, an objective lens, or an XYZ stage.