Silicon-based optical component and method of forming the same
An optical component is provided. The optical component includes a silicon-based body including a bottom wall, a first side wall, a second side wall, and a micro lens structure. The first side wall is located on a first side of the silicon-based body and perpendicular to the bottom wall. The second side wall is located on a second side of the silicon-based body opposite to the first side, and forms an acute angle with the bottom wall. The micro lens structure is formed on the first side wall. The optical component further includes a protection layer formed over the first side wall and the micro lens structure.
1 . An optical component, comprising:
a silicon-based body, comprising:
a bottom wall;
a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall;
a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall; and
a micro lens structure formed on the first side wall; and
a protection layer formed over the first side wall and the micro lens structure,
wherein in a direction parallel to the first side wall, a width of the protection layer is equal to a width of the first side wall.
2 . The optical component as claimed in claim 1 , wherein the protection layer is an oxide layer.
3 . The optical component as claimed in claim 1 , wherein the silicon-based body is integrally formed as one piece.
4 . The optical component as claimed in claim 1 , wherein the acute angle between the second side wall and the bottom wall is in a range between 30 degrees and 60 degrees.
5 . The optical component as claimed in claim 1 , wherein the micro lens structure comprises a plurality of micro lenses arranged in the direction parallel to the first side wall, and a height of the second side wall in the direction is greater than a total height of the micro lens in the direction.
6 . The optical component as claimed in claim 1 , wherein the micro lens structure comprises a plurality of micro lenses arranged in an array of multiple rows and columns when viewed from a direction perpendicular to the first side wall.
7 . The optical component as claimed in claim 1 , further comprising an anti-reflection coating formed at an interface between the first side wall and the micro lens structure of the silicon-based body and the protection layer, wherein in the direction parallel to the first side wall, a width of the anti-reflection coating is equal to the width of the first side wall, and equal to the width of the protection layer.
8 . The optical component as claimed in claim 7 , further comprising a light reflective coating formed over the second side wall.
9 . The optical component as claimed in claim 7 , further comprising a second anti-reflection coating formed over the bottom wall.
10 . The optical component as claimed in claim 1 , wherein a sum of a width of the bottom wall and a thickness of the micro lens structure in a direction parallel to the bottom wall is about 770 μm.
11 . An optical component, comprising:
a silicon-based body, comprising:
a bottom wall;
a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall;
a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall;
a top wall connecting the first side wall and the second side wall, wherein the top wall is parallel to the bottom wall; and
a micro lens structure formed on the first side wall; and
a dielectric layer formed over the first side wall and the micro lens structure, wherein the micro lens structure is embedded within the dielectric layer, and the dielectric layer has a planar surface that is parallel to the first side wall, and
wherein the dielectric layer further has a first side surface and a second side surface located on opposite sides of the planar surface, the first side surface is flush with the top wall of the silicon-based body, and the second side surface is flush with the bottom wall of the silicon-based body.
12 . The optical component as claimed in claim 11 , wherein the silicon-based body further comprises:
a third side wall connecting the bottom wall and the second side wall, wherein the third side wall is parallel to the first side wall.
13 . The optical component as claimed in claim 11 , further comprising:
an anti-reflection coating formed at an interface between the first side wall and the micro lens structure of the silicon-based body and the dielectric layer; and
a light reflective coating formed over the second side wall.
14 . An optical component, comprising:
a silicon-based body, comprising:
a bottom wall;
a top wall opposite to the bottom wall;
a first side wall located on a first side of the silicon-based body and perpendicular to the bottom wall and the top wall, wherein the first side wall connects the top wall and the bottom wall;
a second side wall located on a second side of the silicon-based body opposite to the first side and forming an acute angle with the bottom wall; and
a micro lens structure formed on the first side wall; and
a protection layer formed over the first side wall and the micro lens structure,
wherein in a direction parallel to the first side wall, a width of the protection layer is equal to a width of the first side wall.
15 . The optical component as claimed in claim 14 , wherein the top wall is parallel to the bottom wall.
16 . The optical component as claimed in claim 15 , wherein the top wall connects the first side wall and the second side wall.
17 . The optical component as claimed in claim 14 , further comprising a third side wall connecting the bottom wall and the second side wall, wherein the third side wall is parallel to the first side wall.
18 . The optical component as claimed in claim 14 , further comprising a light reflective coating formed over the second side wall.
19 . The optical component as claimed in claim 14 , wherein the micro lens structure comprises a plurality of micro lenses protruding from the first side wall, and each micro lens of the plurality of micro lenses has a radius of curvature between about 80 μm and about 300 μm.
20 . The optical component as claimed in claim 14 , wherein the first side wall has an upper edge and a lower edge, with the upper edge contacting the top wall and the lower edge contacting the bottom wall, and
wherein in the direction parallel to the first side wall, a distance between the upper edge and the lower edge is equal to the width of the protection layer.