Method of pattern layout of a photomask for pattern transfer
In the layout of a photomask for pattern transfer, main patterns for transferring an image to a photosensitive film are positioned; auxiliary patterns, which do not substantially transfer an image to a photosensitive film are temporarily positioned; an auxiliary pattern is selected so an end partially overlaps an end of the main pattern and makes contact with the main pattern; and adjusting the position of the auxiliary pattern selected so that the end of the auxiliary pattern selected completely overlaps the end of the main pattern. Inspection of the photomask for mask defects is simplified while achieving an increase in resolution of a photomask for pattern transfer.
1. A method of pattern layout of a photomask for pattern transfer, used in a manufacturing process for a semiconductor device for transferring an image to a photosensitive film, the method comprising:
positioning patterns having belt shapes in a photomask layout for transferring an image to a photosensitive film;
temporarily positioning auxiliary patterns that do not substantially transfer an image to the photosensitive film in the photomask layout according to rules based on layout of the patterns having belt shapes;
selecting from the auxiliary patterns an auxiliary pattern having an end partially overlapping an end of one of the patterns having belt shapes and making contact with the pattern having the belt shape; and
adjusting the position of the auxiliary pattern selected so that the end of the auxiliary pattern selected completely overlaps the end of the pattern having a belt shape and making the contact.
2. A method of pattern layout of a photomask for pattern transfer, used in a manufacturing process for a semiconductor device for transferring an image to a photosensitive film, the method comprising:
positioning patterns having belt shapes in a photomask layout for transferring an image to a photosensitive film:
temporarily positioning auxiliary patterns that do not substantially transfer an image to the photosensitive film in the photomask layout according to rules based on layout of the patterns having belt shapes;
selecting from the auxiliary patterns a first auxiliary pattern having an end partially overlapping an end of a second auxiliary pattern and making contact with the second auxiliary pattern; and
adjusting position of the first auxiliary pattern so that the end of the second auxiliary pattern completely overlaps the end of the first auxiliary pattern.
3. The method of pattern layout according to claim 2 , further comprising adjusting width of the first auxiliary pattern so that the width is the same as the width of the second auxiliary pattern.