Fabrication of MEMS devices with spin-on glass
View Patent ↗A method of making an etched structure in the fabrication of a MEMS device involves depositing a bulk layer, typically of polysilicon, prone to surface roughness. At least one layer of photo-insensitive spin-on planarizing material, such as silicate-based spin-on glass, is formed on the bulk layer to reduce surface roughness. This is patterned with a photoresist layer. A deep etch is then performed through the photoresist layer into the bulk layer. This technique results in much more precise etch structures.
1. A method of marking an etched structure in the fabrication of a MEMS device, comprising the steps of:
depositing a bulk layer forming part of said MEMS device, said bulk layer being prone to surface roughness;
forming at least one layer of spin-on planarizing material on said bulk layer;
depositing a photoresist layer on said planarizing material;
exposing said photoresist layer to define a pattern of exposed regions; and
performing a deep etch into said bulk layer through said photoresist layer and said planarizing material in said exposed regions to farm deep-etched patterns in said bulk layer.
2. A method as claimed in claim 1 , wherein said planarizing material is selected from the group consisting of: silsesquioxane, polyimide, a spin-on antireflective layer; or an organic or semi-organic material optically resistant to exposure of said photoresist layer.
3. A method as claimed in claim 1 , comprising multiple layers of said planarizing material.
4. A method as claimed in claim 1 , wherein prior to performing said deep etch into said bulk layer, a preliminary etch is performed to remove said planarizing material in exposed regions.
5. A method as claimed in claim 4 , wherein said preliminary etch is a dry oxide etch.
6. A method as claimed in claim 5 , wherein the thickness of the photoresist layer lies in the range 1.0 μm to 500 μm.
7. A method as claimed in claim 1 , wherein said bulk layer is polysilicon.
8. A method as claimed in claim 7 , wherein said polysilicon is deposited by a technique selected from the group consisting of LPCVD, PECVD and MOCVD.
9. A method as claimed in claim 7 , wherein the thickness of said polysilicon layer lies in the range 0.5 μm to 100 μm.
10. A method as claimed in claim 7 , wherein said planarizing material is spin-on glass.
11. A method as claimed in claim 10 , wherein said spin-on material is selected from the group consisting of methyl-based, ethyl-based or other semi-organic spin-on glass.
12. A method as claimed in claim 10 , wherein said spin-on glass is inorganic spin-on glass.
13. A method as claimed in claim 12 , wherein said spin-on glass is a phosphorus-doped silicate-based spin-on glass.
14. A method of making an etched structure in the fabrication of a MEMS device, comprising die steps of:
depositing a thick polysilicon layer forming part of said MEMS device, said thick polysilicon layer being prone to surface roughness;
forming at least one layer of spin-on glass on said polysilicon layer;
depositing a photoresist layer on said spin-on glass;
exposing said photoresist layer to define a pattern of exposed regions;
etching away said planarizing material in said exposed regions; and
performing a deep etch into said polysilicon layer through said photoresist layer and said spin-on glass in said exposed regions to form deep-etched patterns in said polysilicon layer.
15. A method as claimed in claim 14 , wherein said spin-on glass is phosphorus-doped silicate-based spin-on glass.