Strained-semiconductor-on-insulator device structures
The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.
1. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the strained semiconductor layer comprises approximately 100% silicon and has a misfit dislocation density of less than about 10 5 cm/cm 2 .
2. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the strained semiconductor layer comprises approximately 100% silicon and has a threading dislocation density selected from the range of about 10 dislocations/cm 2 to about 10 7 dislocations/cm 2 .
3. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the semiconductor layer comprises approximately 100% silicon and has a surface roughness selected from the range of approximately 0.01 nm to approximately 1 nm.
4. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the strained semiconductor layer comprises approximately 100% silicon and has a thickness uniformity across the substrate of better than approximately ±10%.
5. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the strained semiconductor layer comprises approximately 100% silicon and has a thickness of less than approximately 200 Å.
6. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein the semiconductor layer comprises approximately 100% silicon and has a surface germanium concentration of less than approximately 1×10 12 atoms/cm 2 .
7. A structure comprising:
a substrate having a dielectric layer disposed thereon; and
a strained semiconductor layer disposed in contact with the dielectric layer,
wherein an interface between the strained semiconductor layer and the dielectric layer has a density of bonding voids of less than 0.3 voids/cm 2 .
8. The structure of claim 1 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
9. The structure of claim 2 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
10. The structure of claim 3 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
11. The structure of claim 4 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
12. The structure of claim 5 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
13. The structure of claim 6 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.
14. The structure of claim 7 , further comprising:
a transistor including:
a gate disposed above the strained semiconductor layer, the gate comprising a material selected from the group consisting of a doped semiconductor, a metal, and a metallic compound.