Sputtering target for forming high-resistance transparent conductive film, and method for producing the film
The present invention provides an ITO sputtering target for forming a high-resistance transparent conductive film which target can be used virtually in a DC magnetron sputtering apparatus and can form a high-resistance, transparent film, and a method for producing a high-resistance transparent conductive film. The sputtering target for forming a high-resistance transparent conductive film having a resistivity of about (0.8–10)×10 −3 Ωcm contains indium oxide, an insulating oxide, and optionally tin oxide.
1. A sputtering target for forming a high-resistance transparent conductive ITO film having a resistivity of about (0.8–10)×10 −3 Ωcm, the target comprising indium oxide, an insulating oxide comprising silicon oxide, and optionally tin oxide, wherein a transparent conductive film formed by subjecting the sputtering target to DC magnetron sputtering has a resistivity of (0.8–10)×10 −3 Ωcm, and wherein the sputtering target contains an amount of an element which forms the insulating oxide with oxygen, the amount being 0.00001 to 0.26 mol based on 1 mol of indium.
2. A sputtering target for forming a high-resistance transparent conductive film according to claim 1 , wherein the sputtering target contains tin (Sn) in an amount of 0 to 0.3 mol based on 1 mol of indium.
3. A method for producing a high-resistance transparent conductive film, comprising forming a transparent conductive film having a resistivity of (0.8–10)×10 −3 Ωcm through DC magnetron sputtering from a sputtering target containing indium oxide, an insulating oxide comprising silicon oxide, and optionally tin oxide, wherein the sputtering target contains an amount of an element which forms the insulating oxide with oxygen, the amount being 0.00001 to 0.26 mol based on 1 mol of indium.
4. A method for producing a high-resistance transparent conductive film according to claim 3 , wherein the sputtering target contains tin (Sn) in an amount of 0 to 0.3 mol based on 1 mol of indium.