Forming of local and global wiring for semiconductor product
View Patent ↗Methods of forming different back-end-of-line (BEOL) wiring for different circuits on the same semiconductor product, i.e., wafer or chip, are disclosed. In one embodiment, the method includes simultaneously generating BEOL wiring over a first circuit using a dual damascene structure in a first dielectric layer, and BEOL wiring over a second circuit using a single damascene via structure in the first dielectric layer. Then, simultaneously generating BEOL wiring over the first circuit using a dual damascene structure in a second dielectric layer, and BEOL wiring over the second circuit using a single damascene line wire structure in the second dielectric layer. The single damascene via structure has a width approximately twice that of a via portion of the dual damascene structures and the single damascene line wire structure has a width approximately twice that of a line wire portion of the dual damascene structures. A semiconductor product having different width BEOL wiring for different circuits is also disclosed.
1. A method of forming different back-end-of-line (BEOL) wiring for different circuits on the same wafer, the method comprising the steps of:
providing a structure including a first circuit and a second circuit and at least two metal wire levels thereover;
forming, in a first BEOL dielectric layer, a first dual damascene structure over the first circuit having a via opening width while forming a single damascene via structure over the second circuit having a width approximately twice that of the via opening width;
forming a metal in the first dual damascene structure and the single damascene via structure;
depositing a second BEOL dielectric layer including a cap layer;
forming, in the second BEOL dielectric layer, a second dual damascene structure in contact with the metal of the first dual damascene structure and over the first circuit having a line wire opening width while forming a single damascene line wire structure in contact with the metal of the single damascene via structures and over the second circuit, the single damascene line wire structure having a width approximately twice that of the first line wire opening width; and
forming a metal in the second dual damascene structure and the single damascene line wire structure.
2. The method of claim 1 , wherein the first dual damascene structure and single damascene via structure forming step includes:
forming a first via opening for the first circuit having the via opening width while forming the single damascene via structure for the second circuit; and
forming a first line wire opening for the first circuit connected to the first via opening to complete the first dual damascene structure.
3. The method of claim 1 , wherein the second dual damascene structure and the single damascene line wire structure forming step includes:
forming a second via opening for the first circuit while forming the single damascene line wire opening for the second circuit; and
forming a second line wire opening for the first circuit connected to the second via opening to complete the second dual damascene structure.
4. The method of claim 1 , wherein each metal forming step includes:
opening the cap layer;
depositing a liner;
depositing the metal; and
planarizing the metal.
5. The method of claim 1 , wherein the via opening width and the line wire opening width correspond to a width of a first metal level wiring.
6. The method of claim 1 , wherein the via opening width and the line wire opening width correspond to approximately twice a width of a first metal level wiring.
7. The method of claim 1 , wherein the via opening width and the line wire opening width correspond to four times a width of a first metal level wiring.
8. The method of claim 1 , further comprising the steps of repeating the method for subsequent layers.
9. A method of forming different back-end-of-line (BEOL) wiring for different circuits on the same wafer, the method comprising the steps of:
simultaneously generating back-end-of-line (BEOL) wiring over a first circuit using a dual damascene structure in a first dielectric layer, and BEOL wiring over a second circuit using a single damascene via structure in the first dielectric layer; and
simultaneously generating BEOL wiring over the first circuit using a dual damascene structure in a second dielectric layer, and BEOL wiring over the second circuit using a single damascene line wire structure in the second dielectric layer,
wherein the single damascene via structure has a width approximately twice that of a via portion of the dual damascene structures and the single damascene line wire structure has a width approximately twice that of a line wire portion of the dual damascene structures.
10. The method of claim 9 , wherein each generating step includes:
opening the damascene structures;
opening a cap layer over each dielectric layer;
depositing a liner;
depositing a metal; and
planarizing the metal.
11. The method of claim 9 , wherein a line wire portion of each dual damascene structure has a width corresponding to that of a first metal level wiring.
12. The method of claim 9 , wherein a line wire portion of each dual damascene structure has a width corresponding to approximately twice that of a first metal level wiring.
13. The method of claim 9 , wherein a line wire portion of each dual damascene structure has a width corresponding to four times that of a first metal level wiring.
14. The method of claim 9 , further comprising the steps of repeating the method for subsequent layers.
15. A semiconductor product comprising a first circuit and a second circuit, the product comprising:
a first dual damascene metal structure in a first back-end-of-line (BEOL) dielectric layer over the first circuit, the first dual damascene metal structure having a via opening width;
a single damascene metal via structure in the first BEOL dielectric layer and over the second circuit, the single damascene metal via structure having a width approximately twice that of the via opening width;
a second dual damascene metal structure in a second BEOL dielectric layer over the first BEOL layer and over the first circuit, the second dual damascene metal structure having a line wire opening width; and
a single damascene metal line wire structure connected to the single damascene metal via structure over the second circuit, the single damascene metal line wire structure having a width approximately twice that of the first line wire opening width.
16. The product of claim 15 , wherein a line wire portion of each dual damascene metal structure has a width corresponding to that of a first metal level wiring.
17. The product of claim 15 , wherein a line wire portion of each dual damascene metal structure has a width corresponding to approximately twice that of a first metal level wiring.
18. The product of claim 15 , wherein a line wire portion of each dual damascene metal structure has a width corresponding to four times that of a first metal level wiring.
19. The product of claim 15 , wherein the first BEOL dielectric layer is positioned above at least two metal levels.
20. The product of claim 15 , further comprising a cap layer between the first and second BEOL dielectric layers.