Structures and methods for enhancing capacitors in integrated circuits
View Patent ↗Systems, devices, structures, and methods are described that inhibit dielectric degradation at high temperatures. An enhanced capacitor is discussed. The enhanced capacitor includes a first electrode, a dielectric that includes ditantalum pentaoxide, and a second electrode having a compound. The compound includes a first substance and a second substance. The second electrode includes a trace amount of the first substance. The morphology of the semiconductor structure remains stable when the trace amount of the first substance is oxidized during crystallization of the dielectric. In one embodiment, the crystalline structure of the dielectric describes substantially a (001) lattice plane.
1. A method for enhancing a dielectric, comprising:
forming an as-deposited film of a conductive compound that includes a first substance and a second substance, wherein the act of forming incorporates a substantial amount of the second substance in the as-deposited film so as to inhibit undesired oxidation of the first substance at a high temperature;
crystallizing the as-deposited film to form ruthenium dioxide and a trace amount of ruthenium; and
forming the dielectric over the conductive compound.
2. The method of claim 1 , wherein the first substance includes ruthenium.
3. The method of claim 1 , wherein the second substance includes oxygen.
4. The method of claim 1 , wherein the conductive compound includes RuO x , wherein the x is indicative of a desired number of atoms.
5. The method of claim 1 , wherein the dielectric includes ditantalum pentaoxide.
6. A method for enhancing a semiconductor structure that stores charges, comprising:
forming an as-deposited film of a conductive compound that includes a first substance and a substantial amount of a second substance so as to inhibit volatile oxide states caused by the first substance;
crystallizing the as-deposited film to form ruthenium dioxide and a trace amount of ruthenium; and
forming a dielectric over the conductive compound.
7. The method of claim 6 , wherein forming the as-deposited film includes forming in about 210 degrees Celsius.
8. The method of claim 6 , wherein forming the as-deposited film includes forming with a first substance, wherein the first substance includes about 200 sccm of Ru-HEC.
9. The method of claim 6 , wherein forming the as-deposited film includes forming with a second substance, wherein the second substance includes about 250 sccm of O 2 .
10. The method of claim 6 , wherein forming the as-deposited film includes forming at a pressure of about 2.5 torrs.
11. A method for enhancing a semiconductor structure that stores charges, comprising:
forming an as-deposited film of ruthenium and oxygen that includes a substantial amount of oxygen so as to inhibit morphological change caused by oxidation of ruthenium;
crystallizing the as-deposited film to form a crystallized film of ruthenium dioxide and a trace amount of ruthenium; and
forming a dielectric over the crystallized film.
12. The method of claim 11 , wherein crystallizing includes crystallizing at a temperature that is greater than about 750 degrees Celsius and less than about 800 degrees Celsius.
13. The method of claim 11 , wherein crystallizing includes crystallizing in an ambient of nitrogen.
14. The method of claim 11 , wherein forming the as-deposited film includes depositing the as-deposited film using a technique of chemical vapor deposition.
15. A method for enhancing a semiconductor structure that stores charges, comprising:
forming an as-deposited film of ruthenium oxide that includes a substantial amount of oxygen so as to inhibit morphological change caused by oxidation of ruthenium;
crystallizing the as-deposited film to form a crystallized film, wherein the act of crystallizing results in compounds and substances that include ruthenium dioxide and a trace amount of ruthenium; and
forming a dielectric over the crystallized film.
16. A method for enhancing a semiconductor structure that stores charges, comprising:
forming a conductive layer of RuO x ;
crystallizing to form RuO 2 and a trace amount of Ru;
forming an amorphous insulator layer of Ta 2 O 5 ; and
crystallizing to form crystallized Ta 2 O 5 , wherein the act of crystallizing to form crystallized Ta 2 O 5 converts the trace amount of Ru into RuO 2 .
17. The method of claim 16 , wherein crystallizing to form crystallized Ta 2 O 5 includes crystallizing at a temperature of about 800 degrees Celsius.
18. The method of claim 16 , wherein crystallizing to form crystallized Ta 2 O 5 includes crystallizing in an ambient of dinitrogen oxide.
19. The method of claim 16 , wherein crystallizing to form crystallized Ta 2 O 5 includes crystallizing in an ambient of oxygen.
20. The method of claim 16 , wherein crystallizing to form crystallized Ta 2 O 5 acts to passivate the conductive layer from volatility caused by the trace amount of Ru.
21. A method for enhancing a semiconductor structure that stores charges, comprising:
forming a conductive layer of RuO x ;
crystallizing to form RuO 2 and a trace amount of Ru;
forming an amorphous insulator layer of Ta 2 O 5 ; and
forming a crystallized Ta 2 O 5 with a desired lattice plane such that the permittivity of the crystallized Ta 2 O 5 is greater than about 25.
22. The method of claim 21 , wherein forming a crystallized Ta 2 O 5 includes forming substantially a (001) lattice plane.
23. The method of claim 21 , wherein forming a conductive layer of RuO x includes forming with a substantial amount of oxygen.
24. The method of claim 21 , wherein crystallizing includes crystallizing at a temperature of greater than about 750 degrees Celsius to less than about 800 degrees Celsius.
25. The method of claim 21 , wherein forming a crystallized Ta 2 O 5 includes forming at a temperature of about 800 degrees Celsius.