Semiconductor device and method for manufacturing same
There is provided a semiconductor device of a chip-on-chip structure having a support semiconductor chip, first and second chip blocks supported and connected on one surface of the support semiconductor chip and an insulator arranged between the first and second chip blocks. The first and second chip blocks each include one or a plurality of semiconductor chips having an active surface nearly parallel with the one surface of the support semiconductor chip. Within the insulator, an intralevel wiring is arranged on a wiring plane as a plane including an inactive or active surface of any of the semiconductor chips structuring the first or second chip block.
1. A method for manufacturing a semiconductor device including:
a step of connecting, to one surface of a support semiconductor chip, first and second chip blocks each including one or a plurality of semiconductor chips having an active surface substantially parallel with the one surface of the support semiconductor chip;
a step of arranging an insulator between the first and second chip blocks; and
a step of forming, within or on a surface of the insulator, an intralevel wiring on a wiring plane as a plane including an inactive or active surface of any of the semiconductor chips constituting the first or second chip block.
2. A method for manufacturing a semiconductor device according to claim 1 , wherein a plurality of semiconductor chips are present in the first chip block and a plurality of semiconductor chips are present in the second chip block, and wherein the active or inactive surface of one of the semiconductor chips in the first chip block and the active or inactive surface of one of the semiconductor chips in the second chip block are commonly on the wiring plane.
3. A method for manufacturing a semiconductor device according to claim 1 , wherein the step of forming the intralevel wiring includes a step of forming first and second intralevel wirings respectively arranged on first and second wiring planes not in a same plane, and further including a step of forming an interlevel wiring connecting between the first and second intralevel wirings.
4. A method for manufacturing a semiconductor device according to claim 1 , further including a step of forming a penetration hole in at least one of the semiconductor chips constituting the first and second chip blocks, and a step of arranging a conductor in the penetration hole.
5. A method for manufacturing a semiconductor device including:
an on-substrate connecting step of connecting face down a semiconductor chip having an active surface with a recess and a conductor disposed in the recess onto one surface of a semiconductor substrate; and
a step of polishing or abrading an inactive surface of the semiconductor chip to expose the conductor at the inactive surface of the semiconductor chip after the on-substrate connecting step,
wherein the semiconductor substrate is a semiconductor wafer, wherein the semiconductor chip is a first semiconductor chip, wherein the on-substrate connecting step comprises arranging and connecting the first semiconductor chip and a second semiconductor chip side by side on the semiconductor wafer, and further including a step of cutting the semiconductor wafer based on a predetermined region that includes at least one of the first and second semiconductor chips to obtain a semiconductor device having a chip-on-chip structure.
6. A method for manufacturing a semiconductor device including:
an on-substrate connecting step of connecting face down a semiconductor chip having an active surface with a recess and a conductor disposed in the recess onto one surface of a semiconductor substrate; and
a step of polishing or abrading an inactive surface of the semiconductor chip to expose the conductor at the inactive surface of the semiconductor chip after the on-substrate connecting step,
wherein the one surface of the semiconductor substrate is an active surface, and further including a substrate polish step of polishing or abrading the inactive surface of the semiconductor substrate to reduce the thickness thereof.
7. A method for manufacturing a semiconductor device according to claim 6 , wherein the active surface of the semiconductor substrate has a recess with a conductor therein, the substrate polish step including a step of polishing or abrading the inactive surface of the semiconductor substrate to expose the conductor at the inactive surface of the semiconductor substrate.
8. A method according to claim 5 , further including an on-chip connecting step of connecting, on the semiconductor chip, another semiconductor chip.
9. A method according to claim 8 , wherein the other semiconductor chip has an active surface with a recess having a conductor therein, the on-chip connecting step being to connect face down the other semiconductor chip on the semiconductor chip, and further including a step of polishing or abrading an inactive surface of the other semiconductor chip to expose the conductor of the other semiconductor chip at the inactive surface of the other semiconductor chip.
10. A method according to claim 6 , further including an on-chip connecting step of connecting, on the semiconductor chip, another semiconductor chip.
11. A method according to claim 10 , wherein the other semiconductor chip has an active surface with a recess having a conductor therein, the on-chip connecting step being to connect face down the other semiconductor chip on the semiconductor chip, and further including a step of polishing or abrading an inactive surface of the other semiconductor chip to expose the conductor of the other semiconductor chip at the inactive surface of the other semiconductor chip.