Semiconductor thin film forming system
View Patent ↗In a semiconductor thin film forming system for modifying a predetermined region of a semiconductor thin film by exposing the semiconductor thin film to a projected light patterned through a pattern formed on a photo mask, the system includes a mechanism (opt 20 ′) for uniformizing the light for exposure in a predetermined area on the photo mask. This system can provide a crystallized silicon film having a trap state density less than 1012 cm −2 and can provide a silicon-insulating film interface exhibiting a low interface state density.
1. A semiconductor thin film forming system for modifying a predetermined region of a semiconductor thin film by exposing the semiconductor thin film to a projected light, from an irradiation optical system, patterned through an exposure pattern formed on a photo mask, said semiconductor thin film being formed on a substrate held on a substrate stage, said system comprising:
a first mechanism for sequentially scanning the semiconductor thin film with the patterned light by driving at least one of the photo mask and the substrate stage;
a second mechanism for measuring a distance of a periphery of the substrate relative to the irradiation optical system;
a third mechanism for measuring a tilt orientation of a periphery of the substrate relative to the irradiation optical system;
a fourth mechanism for altering the distance of the periphery of the substrate relative to the irradiation optical system, thereby focusing the projected light; and
a fifth mechanism for altering the tilt orientation of the periphery of the substrate relative to the irradiation optical system.
2. The system according to claim 1 , wherein said projected light comprises a laser beam.
3. The system according to claim 2 , wherein said laser beam is generated by an excimer laser.
4. The system according to claim 2 , wherein said light is uniformized using a homogenizer, a mask and a projection lens through which said light is applied.
5. The system according to claim 4 , wherein said mask includes a slit for throttling light passed through the homogenizer into a rectangular beam.
6. A system according to claim 4 , wherein a projection lens is used for reducing and projecting a slit image of the mask onto said film.
7. A system according to claim 1 , wherein said predetermined region of the semiconductor thin film is modified by exposing, at a travel pitch of the order of micrometers, the semiconductor thin film to said projected light.
8. A system according to claim 1 , wherein said predetermined region of the semiconductor thin film is modified by exposing a target exposure position of the semiconductor thin film to said projected light with a target accuracy of 0.1 μm to 100 μm.
9. The system of claim 1 , wherein the first mechanism, the second mechanism, the third mechanism, and the fourth mechanism are operable during sequential scanning of the semiconductor thin film.