Utilizing sidewall spacer features to form magnetic tunnel junctions in an integrated circuit
View Patent ↗Novel methods for reliably and reproducibly forming magnetic tunnel junctions in integrated circuits are described. In accordance with aspects of the invention, sidewall spacer features are utilized during the processing of the film stack. Advantageously, these sidewall spacer features create a tapered masking feature which helps to avoid byproduct redeposition during the etching of the MTJ film stack, thereby improving process yield. Moreover, the sidewall spacer features may be used as encapsulating layers during subsequent processing steps and as vertical contacts to higher levels of metallization.
1. A method of forming a magnetic tunnel junction, the method comprising the steps of:
forming a film stack, the film stack comprising one or more magnetic layers and one or more masking layers, at least one of the one or more masking layers comprising a refractory material;
forming one or more trenches in the film stack, sidewalls of the one or more trenches being substantially vertical;
forming a spacer layer at least partially on top of the film stack, the spacer layer comprising an electrically conductive material;
etching the spacer layer using substantially anisotropic etching such that portions of the spacer layer only remain on the sidewalls of the one or more trenches in the film stack, the etched spacer layer being substantially tapered;
etching at least a portion of the film stack utilizing the etched spacer layer as a mask using substantially anisotropic etching, portions of the one or more masking layers acting as a mask during the step of etching at least a portion of the film stack, the etched portion of the film stack being substantially tapered; and
forming a metallization feature above at least a portion of the film stack, wherein the etched spacer layer is operative to electrically connect the film stack to the metallization feature.