Chucking system comprising an array of fluid chambers
View Patent ↗The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with said first support region cincturing said second support region and said first and second recesses, and said second support region cincturing said second recess, with said substrate resting against said first and second support regions, with said first recess and a portion of said substrate in superimposition therewith defining a first chamber and said second recess and a portion of said substrate in superimposition therewith defining a second chamber, with each column of said first chambers and each row of said second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in said array of fluid chambers.
1. A chucking system to hold a first portion of a substrate and simultaneously bow a second portion of the substrate, comprising:
a chuck body having first and second opposed sides, the first side including an array of fluid chambers arranged in rows and columns, the array of fluid chambers including a first fluid chamber in superimposition with the first portion of the substrate and a second fluid chamber in superimposition with the second portion of the substrate, each fluid chamber comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with the first support region cincturing the second support region and the first and second recesses, and the second support region cincturing the second recess, with the substrate capable of resting against the first and second support regions, such that the first recess and a portion of the substrate in superimposition therewith define a first chamber and the second recess and a portion of the substrate in superimposition therewith define a second chamber, with each of the first chambers and each of the second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in the array of fluid chambers, the first chamber of the first fluid chamber in a vacuum state and wherein the second chamber of the first fluid chamber and the first chamber and the second chamber of the second fluid chamber in a pressure state.
2. The chucking system as recited in claim 1 wherein each first chamber in a column of the fluid chambers is in fluid communication with a common fluid source.
3. The chucking system as recited in claim 1 wherein each second chamber in a row of the fluid chambers is in fluid communication with a common fluid source.
4. The chucking system as recited in claim 1 wherein each first chamber in a column of the fluid chambers is in fluid communication with a first common fluid source and wherein each second chamber in a row of the fluid chambers is in fluid communication with a second common fluid source differing from the first common fluid source.
5. The chucking system as recited in claim 1 wherein a fluid chamber of the array of fluid chambers is sealed from the remaining fluid chambers of the array of fluid chambers.
6. The chucking system as recited in claim 1 further including a plurality of throughways, with each column of the first chambers and each row of the second chambers being coupled to differing throughways to place the first and second chambers in fluid communication with the differing source of fluid.
7. A chucking system to hold a substrate a first portion of a substrate and simultaneously bow a second portion of the substrate, the system comprising:
a chuck body having first and second opposed sides, the first side including an array of fluid chambers including a first fluid chamber and a second fluid chamber, each fluid chamber comprising first and second spaced-apart recesses, defining first and second spaced-apart support regions, with the first support region cincturing the second support region and the first and second recesses, and the second support region cincturing the second recess, with the substrate capable of resting against the first and second support regions such that the first recess and a portion of the substrate in superimposition therewith define a first chamber and the second recess and a portion of the substrate in superimposition therewith define a second chamber; and
a pressure control system in fluid communication with the first fluid chamber and the second fluid chamber, the pressure control system in fluid communication with each of the first and second chambers of the first fluid chamber and the second fluid chambers to control a pressure within the first and second chambers such that the first and second chambers of the first fluid chamber have a positive pressure therein and the the first and second chambers of the second fluid chamber have a negative pressure therein, wherein for a given positive pressure within the first and second chambers of the first fluid chamber and a negative pressure within the first and second chambers of the second fluid chamber, a ratio of an area between the first and second recesses is such that the first fluid chamber exerts a negative force upon a portion of the substrate in superimposition with the fluid chamber.
8. The chucking system as recited in claim 7 further including a plurality of fluid chambers arranged in rows and columns.
9. The chucking system as recited in claim 7 further including a first and second throughways to place the first and second chambers of the first fluid chamber, respectively, in fluid communication with the pressure control system.
10. The chucking system as recited in claim 8 wherein the pressure control system comprises a plurality of sources of fluid, with each column of the first chambers and each row of the second chambers are in fluid communication with a differing source of fluid of the plurality of sources of fluid to control a flow of fluid in the array of fluid chambers.
11. The chucking system as recited in claim 10 wherein each first chamber in a column of the fluid chambers is in fluid communication with a common fluid source.
12. The chucking system as recited in claim 10 wherein each second chamber in a row of the fluid chambers is in fluid communication with a common fluid source.
13. The chucking system as recited in claim 10 wherein each first chamber in a column of the fluid chambers is in fluid communication with a first common fluid source and wherein each second chamber in a row of the fluid chambers is in fluid communication with a second common fluid source differing from the first common fluid source.
14. The chucking system as recited in claim 10 wherein a fluid chamber of the array of fluid chambers is sealed from the remaining fluid chambers of the array of fluid chambers.
15. The chucking system as recited in claim 10 further including a plurality of throughways, with each column of the first chambers and each row of the second chambers being coupled to differing throughways to place the first and second chambers in fluid communication with the differing source of fluid.
16. A chucking system to hold a first portion of a substrate and simultaneously bow a second portion of a substrate, the system comprising:
a chuck body having first and second opposed sides, the first side including an array of fluid chambers arranged in rows and columns, the array of fluid chambers including a first fluid chamber and a second fluid chamber, each of the first fluid chamber and the second fluid chamber comprising first and second spaced-apart recesses, defining first and second spaced-apart support regions, with the first support region cincturing the second support region and the first and second recesses, and the second support region cincturing the second recess, with the substrate resting against the first and second support regions, with the first recess and a portion of the substrate in superimposition therewith defining a first chamber and the second recess and a portion of the substrate in superimposition therewith defining a second chamber; and
a pressure control system having a plurality of sources of fluid, with each column of the first chambers and each row of the second chambers being in fluid communication with a differing source of fluid of the plurality of sources of fluid, the pressure control system controlling a pressure within the first and second chambers such that the first and second chambers of the first fluid chamber has a positive pressure therein and the of the first and second chambers of the second fluid chamber has a negative pressure therein, wherein for a given positive pressure within the first and second chambers of the first fluid chamber and a negative pressure the first and second chambers of the second fluid chamber, a ratio of an area between the first and second recesses is such that the first fluid chamber exerts a negative force upon a portion of the substrate in superimposition with the first fluid chamber.
17. The chucking system as recited in claim 16 wherein each first chamber in a column of the fluid chambers is in fluid communication with a common fluid source.
18. The chucking system as recited in claim 16 wherein each second chamber in a row of the fluid chambers is in fluid communication with a common fluid source.
19. The chucking system as recited in claim 16 wherein each first chamber in a column of the fluid chambers is in fluid communication with a first common fluid source and wherein each second chamber in a row of the fluid chambers is in fluid communication with a second common fluid source differing from the first common fluid source.
20. The chucking system as recited in claim 16 further including a plurality of throughways, with each column of the first chambers and each row of the second chambers being coupled to differing throughways to place the first and second chambers in fluid communication with the differing source of fluid.